MHY2/MHW2

thread) Bottom through hole dia. 8.5 (Mounting hole) 69 48 112 56 70 80 MHZ2 58 17 MHZJ2 +0.4 +0.1 4 44 MHQ 40 52 52H9 +0.074 Depth 5 0 66 MHL2 4-M10 X 1.5 Depth 13 (Thread for mounting attachment) Rc(PT)1/4 (Finger closing port) Auto switch mounting groove position MHR MHK 13 13 58.6 85 38 30 O S MHS Rc (PT)1/4 (Finger opening port) 5 16 44 MHC2 6.45 MHW2-50D1 6 MHT2 Right angle finger

PA3145/3165/3185

1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc A Model Mounting hole C D E F G H K L B J 3 8 1 2 3 4 VPA3145 71 3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

TA301

VVTA300 05 1 01 Exhaust type Thread type Stations 02 1 Nil F N T 2 stations Individual exhaust 3 Common exhaust Rc G NPT NPTF For manifold Caution 20 20 stations 1. Each valve is fixed on the manifold with two M4 mounting screws. Please tighten the screws properly when valves are reassembled. Screw tightening torque: 1.4 Nm 2.

Miniature Regulator Series ARJ310

port size Rc, NPT 1/8 M5 x 0.8 (female thread) 26 (Width across flats) 11 26.1 Approx. 3 26.1 R, NPT 1/8 13.6 18.3 3

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Work piece mounting reference plane Rc 1/4 Vacuum suction port Rc 1/4 Vacuum suction port 80 Stroke + 115 (table movement range) 7.5 194 (249) 41 46 58 2-T-slot 1 57 65 69 90 95 9.3 44 40 (T-slot pitch) 2-T-slot 2 Stroke + 350 (405) 17 28 23 (78) 40 36 Body mounting reference plane 3-5H10 depth 5 3.3 5.8 1.7 5.3 T-slot 1 dimensions (switch groove) 11.5 45 27 (82) 40 80 Stroke + 145 9.4 4.5

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Automatically Operated Type (Internal Switching Type) How to Order 1 1 PA 3 03 0 PA3000 Option Body size Nil N Body only With silencer 3 5 3/8 standard 1/2 standard For AIR EXH: AN200-02 Liquid contact body material Connection port size 03 04 06 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Diaphragm material Thread type 1 2 PTFE NBR Nil T Rc

Series M Miniature Fittings M3, R(PT) 1/8, M5

female. 4/2.5 4/2.5 1 8 1 8 Rc(PT) -M5 female M-5B For nylon tube.

Digital Flow Switches Series PF2A

Nil N F Rc NPT G Nil C The cable and connector are shipped unassembled.

VT325-OMT0001

Rc Rc Rc 1 Nm Rc 1/4 12 14 Rc 3/8 22 24 5 VT325-OMT0001 VT325 Series VT325 Series VT325 Series VT325 Series 3 3 3 3 / / / / ( ( ( ( ) ) ) ) 5 1 1 1 1 30 ( ) 1 ()ISO VG32 6 VT325-OMT0001 VT3 VT3 VT3 VT32 2 2 25 Series/ 5 Series/ 5 Series/ 5 Series/ DIN DIN DIN DIN 1. 1) () 2) 3) 4) 2. 1) 2) 3) Y )0.5Nm15% a b O 1.253.5mm 2Y 1.254mm 2 c 612 912mm 3. 1 ) 2) 3) ) 0.5Nm20% DIN DC

VFR3000-OMY0001

-2No.VFR3000-OMY0001 / 1 1.5 *3) *3)1 1 () No.VFR3000-OMY0001 -3- VFRA30004000 5 / () () () () -10 3 3 EXH (VVFS3000-R-03-1,2 VVFS4000-R-04-1,2) () () 3 , 4 VFR3000-OMY0001 VFRA3000,4000 5 1) 2) 1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 1 1) M5 1/61/4 11.5Nm ) 2) Rc Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 5 VFR3000-OMY0001 VFRA3000,4000 5 () () 5 3 30 ( ) 1 ()ISO

Air Preparation Equipment

1 For port size Rc 3/4 For port size Rc 1/2 Bracket Stainless steel 304 BP-14S BP-15S 272 Low Maintenance Filter Series FN1/FN4 P.483 1 Replacement Procedure is Replacement Parts and Seal List How to Order Actuators Modular F.R.L.

Thermo-chiller/

Pipe thread type Nil Rc F G (With Rc-G conversion tting set) N NPT (With Rc-NPT conversion tting set) Power supply Single-phase 200 to 230 VAC (50/60 Hz) 9 A

Thermo-chiller/

Pipe thread type Nil Rc F G (With Rc-G conversion tting set) N NPT (With Rc-NPT conversion tting set) Power supply Single-phase 200 to 230 VAC (50/60 Hz) 9 A

Soft Start-up Valve AV2000/3000/4000/5000 1

ITV IC 1 2 Proper tightening torque (Nm) Tightening Torque when Piping VBA Connection threads Rc 1/4 12 to 14 VE Rc 3/8 22 to 24 Terminal 1 2 Rc 1/2 28 to 30 DIN terminal + VY1 Rc 3/4 28 to 30 Rc 1 36 to 38 G Lubrication 4. Piping to products When piping to products, avoid making an error of supply port, etc., by referring to the instruction manuals. 5.

ARJ1020F

Metric size 4, 6 Inch size 5/32", 1/4" Port size Rc, NPT 1/8 2 2 VBA 1 1 Pressure gauge port size Rc, NPT 1/8 (Width across flats) 11 M5 x 0.8 (Female thread) 26 VE VY1 26.1 3 R, NPT 1/8 13.6 18.3 G 26.1 PPA AL 14-4-13

ZSE40/ISE40

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP A ISA2 Piping specifications IS Bracket B (ZS-24-B) W1: Rc 1/8 01: R 1/8 (With M5 female threads) T1: NPT 1/8 (With M5 female threads) ZSM Rc 1/8 Reverse pressure two directions B R 1/8, NPT 1/8 PF2 M5 x 0.8 female threads Panel mount (ZS-22-A) Rc

VDW

Thread type Voltage Rc G NPT Nil F N 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Port size Please consult with SMC regarding other voltages.

Drain Separator for Vacuum Series AMJ 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil J Rc ZY 03 3/8 F Flow: Right Left R G 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

Series SYJA300 3 Port Air Operated Valve

Base mounted (With sub-plate) 75 (Without sub-plate 45) Rc(PT)1 /8 4.5 (0.25) SYJA524-01 N.O. SYJA712-01 N.C. Rc(PT)1 /8 9 (0.5) 80 Body ported SYJA722-01 N.O. Base mounted M5 X 0.8 Rc(PT) 1 /8, 1 /4 01 02 01 02 SYJA714N.C. Base mounted (With sub-plate) 130 (Without sub-plate 80) SYJA724N.O.

VCB

Proper tightening torque N m Tightening torque for piping Connection threads 7 to 9 Rc 1/8 12 to 14 Rc 1/4 22 to 24 Rc 3/8 28 to 30 Rc 1/2 28 to 30 Rc 3/4 5. Connection of piping to products When connecting piping to a product, refer to its instruction manual to avoid mistakes regarding the supply port, etc.