CHKD/CHKG

Symbol -XA1/2/7/18/20/22/31/32/33/34 Change of Rod End Shape 1 CHQ CHKD Mounting type Bore size Rod size series Stroke X A0 Suffix for auto switch CHK CHK CHN Indicate the rod end shape pattern symbol CHM A0 A1 A2 A7 CHS C0.5 30 30 30 CH2 D D D D CHA 30 Related Products F H C C C Note) Male thread effective length should be no more than 100 mm.

Power Clamp Cylinder

300.2 300.02 1050.1 Weight kg (lbs) CKZT50-A015CS CKZT50-A015CB CKZT50-A015RS CKZT50-A015RB CKZT50-A015LS CKZT50-A015LB 0.79 (1.74) 0.78 (1.72) 0.90 (1.98) 0.89 (1.96) 0.90 (1.98) 0.89 (1.96) 144 65 280.1 150.2 19 200 Power Clamp Cylinder Series CKZT Dimensions (Clamp Arm: Offset 15) 50 How to Order CKZ50 42 3680N R Right type CK1 CLK2 C(L)KQ MK2T/MK2/MK CKZ2N CKZT CLKZ1R CK/M(D)UKA 44 34

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The

SMC Pneumatic Clean Series

Proper auto switch mounting position (mm) Auto switch mounting height (mm) D-Z7 D-Y59 D-Y7P D-Y7W D-Y7BAL D-Z7 D-Y59 D-Y7P D-Y7BAL D-Y7W Auto switch model Auto switch model D-A54 D-A59W D-J51 D-F59F D-A54 D-A59W D-J51 D-F59F Bore size (mm) A 40 50 63 Bore size (mm) Hs 40 50 63 B 3.5 3.5 6 Ht 30 34 41 A B 0 0 2.5 A B 4 4 6.5 A B 7 6.5 12.5 Hs Ht 38.5 42 46.5 Hs Ht 38 42 47 1.5 1.5 5 30 34

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

G5W D-K59W 20 to 100 Hs Hs 24.5 24.5 B A B A Auto Switch Proper Mounting Position (Detection at Stroke End) (mm) Auto Switch Mounting Height (mm) Auto switch model D-M9 D-M9W D-G5/K59 D-G5W/K59W D-B5 D-B64 D-A9 Auto switch model D-G5/K5 D-G5W D-K59W D-B5/B6 D-M9 D-M9W D-A9 Bore size Bore size A 41 40.5 42 39 46 44.5 A 31.5 31 32.5 29.5 36.5 35 48 47 A 37 36.5 38 35 42 40.5 A 33 32.5 34

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

V Effective thread depth Y H A B E G Mounting nut width across flats C G E H B NN Effective thread length T (R) NA Q N F NA I F N CC 0.1 + 12-CY3B50, 63 12-CY3B6 to 15 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34

CL

RR1 RR1 E1 L1 MM A A1 U1 NDH10 NX +0.058 0 +0.058 0 +0.058 0 0.2 0.4 0.2 0.4 0.3 0.5 0.4 0.2 0.4 0.2 0.5 0.3 +0.058 0 +0.058 0 +0.058 0 16 20 22 I-G02 I-G03 I-G04 16 34 41 42 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 20 25, 32 40 8 10 10 8 10 18 Y-G02 20 8.5 25 30 30 M8 x 1.25 10.3 12.8 12 16 20 36 21 IY-G02 IY-G03 IY-G04 34 41 42 11.5 14 14 8 8 20 M10 x 1.25 Y-G03 25, 32 40

CV/MVGQ

CM-T020B 10-15-34 Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVM3 Construction Spring return RE A B REC CX CY MQQ M Spring extend RHC MK(2) RS Q G Built-in One-touch fitting RS H A RZQ MI W S CEP1 CE1 CE2 DIN terminal ML2B Component Parts C J G5-S Note Material No. Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CXS

Bore size (mm) 32 6 10, 15 20, 25 CXS06-34 -A5157 CXS10-34A 28747 CXS20-34A 28749 CXS32-34A 28751 Part no. A B Qty. 1 Disassembly and Maintenance Caution A Section AA Bolt holder (movable) B Section BB 1. Never use a cylinder with its plate removed. When removing the hexagon socket head cap screw on the end plate, the piston rod must be secured to prevent from rotating.

Slider Type/Ball Bushing Bearing

C Q + Stroke Shock absorber Shock absorber RB0805 Side plate Section IF (CY1L6) (mm) A B D d C EA FA EB Model G HP J JK FB GP H HB HG HI HO HS HT HA CY1L6 CY1L10 7.6 8 3 6.5 7 M4 x 0.7 6 26 6.5 36 27 10 11 9 25 14 16 5 12 10 4 8 8.5 M5 x 0.8 6 3 12 7.5 33 9.5 5 50 34 17.5 14.5 13.5 33 21.5 18 6 PA (N) (NA) (NB) RW Q Z W tb ta T PB MM NN M L QW LD Model CY1L6 CY1L10 TT PW 12 54 68 56 10

20

300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 31 32 33 34

Coolant Valve

(mm) Model Conversion Cv 1.2 1.3 1.5 3.9 5.0 4.5 5.8 7.0 11 9.1 15 17 23 17 23 26 34 30 40 41 62 41 66 49 70 73 100 Threaded Note) Flange Kv VNC1-6A VNC1-8A VNC1-10A VNC24-10A VNC2-10A VNC24-15A VNC2-15A VNC34-20A VNC3-20A VNC44-25A VNC4-25A VNC54-32A VNC5-32A VNC54-32F VNC5-32F VNC64-40A VNC6-40A VNC64-40F VNC6-40F VNC74-50A VNC7-50A VNC74-50F VNC7-50F 1 8 1 4 1.1 1.1 1.3 3.4 4.3 3.9 5.0

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

SJ3A6

Refer to the SI unit part numbers on page 34. For D side Connector Block Assembly Part No. Note Connector specifications Mounting position Part no.

NCQ8

Auto Switch Internal Circuit D-F9NW, F9NWV DC (+) Brown Weight Unit: OZ, ( ):g Switch main circuit Switch main circuit Switch main circuit OUT Black D-F9NW(V) D-F9PW(V) D-F9BW(V) Model 20 (0.5) 0.25 ( 7) 0.25 ( 7) 0.25 ( 7) DC () Blue Lead wire length in (m) 118 (3 ) 1.20 (34) 1.20 (34) 1.13 (32) 197 (5 ) 1.98 (56) 1.98 (56) 1.83 (52) D-F9PW, F9PWV Dimensions Unit: in DC (+) Brown ( ): mm

IDG

.: 6 (NPT thread: 1/4 inch) (86) Purge air outlet for dehumidification (34) (67) (25) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Hexagon width across flats 14 Hexagon width across flats 17 IDG3, 5 IDG3H, 5H With fitting for purge air discharge (Option: P) 73

CXS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (mm) 32 6 10, 15 20, 25 CXS06-34 -A5157 CXS10-34A 28747 CXS20-34A 28749 CXS32-34A 28751 Part no. A B Qty. 1 Disassembly and Maintenance Caution A Section AA Bolt holder (movable) B Section BB 1. Never use a cylinder with its plate removed.

CNS

NDH10 125 140 160 I-12 I-14 I-16 0.1 0.3 25 32 +0.084 0 2033 27 46 54 100 M30 x 1.5 E1 0.1 0.3 28 36 +0.084 0 39 30 48 54 105 M30 x 1.5 NX 0.1 0.3 32 40 +0.100 0 Data 39 34 55 60 110 M36 x 1.5 L1 U1 RR1 Rod End Nut Material: Rolled steel 30 d Applicable bore size (mm) d H B C D Part no.

MTS

Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 35 26 79 59 141 105 220 165 343 251 563 422 879 659 30 22 68 50 121 90 188 141 294 215 482 362 754 565 25 19 57 42 101 75 157 118 245 179 402 302 628 471 20 15 45 34 80 60 126 94 196 143 322 241 502 377 15 11 34 25 60 45 94 71 147 107 241 181

MXH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9.5 34 6 24.5 63.5 64.5 34 34 32 7 32 7 6 20 20 11 6 15 NS 15.5 52.5 + Stroke 68 + Stroke 32 4-M5 x 0.8 depth 8 10 + Stroke 15 20 (mm) Stroke (mm) LB LT NS LA J 5 64 20 4 10 10 20 64 4 10 15 25 20 74 4 20 74 25 20 4 25 84 40 4 30 30 40 84 4 30 40