CJP

40.5 45.5 7 9 14 14 3 8 6.5 6 6 17 6 8 M3 x 0.5 M12 x 1.0 8 30.5 35.5 40.5 45.5 10 12 15 17 5 8 6.5 6 7 20 7 8 M4 x 0.7 55.5 CS1 M14 x 1.0 10 30.5 35.5 40.5 12 14 20 19 6 10 8.5 6 7 24 9 8 M5 x 0.8 45.5 55.5 C76 Symbol Z C With auto switch Bore size (mm) W 5 st 10 st 15 st 20 st 30 st E P C85 6 10 15 16.5 10.5 20 62.5 57.5 3 52.5 47.5 20 13 21 75.5 65.5 60.5 3 55.5 50.5 C95 24.5 15.5 23

MGC

142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1 32 46 95 70 52 30 M5 x 0.8 25 161 82 37 28.5 50 53 112 16 38 12 21 M6 x 1 32 50 105 80 60 35 Rc1/8 20 188 92 44 33 60 63 132 20

MGQ

OUT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 OUT 201 40 60 80 101 121 141 161 181 201 Symbol Specifications 16 8 IN 151 30 45 60 76 91 106 121 136 151 -XA Change of rod end shape OUT 314 63 94 126 157 188 220 251 283 314 Heat resistant cylinder (150C) -XB6 20 10 Low speed cylinder (10 to 50 mm/s) -XB9 IN 236 47 71 94 118 142 165 189 212 236 Intermediate stroke

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

Symbol Position detector arms Switch bracket Positioning angle For the applicable auto switch model, refer to the table below. a b c d 10 11 12 13 14 15 20 23 25 180 X X X X X Data X X X X X X X 90 b d X Table position detector arm X X X X X X X a X Switch mounting bracket X X Cylinder Unit/Applicable Auto Switch Load voltage Lead wire length (m) Auto switch model Electrical entry Wiring

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

For more information, please refer to page 8-14-23.

EXxx-OMQ0015CN

No.EX-OMQ0015CN PROFINET SI // EX600-SPN# EX600-ED# 2 8 9 10 12 12 14 SI 15 15 16 16 LED 17 19 19 20 21 21 22 22 23 23 23 25 26 35 35 56 GSDML 56 56 SIEMENS PLC S7 57 62 65 66 66 71 -1No.EX-OMQ0015CN 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems

PFxx-OMJ0005CN

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Digital Flow Switch ( compatible)

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Flow diagnosis 0: Within range 1: Out of range (HHH/LLL). 9 Fixed output 0: Normal output 1: Fixed output (for checking output) 15 Error diagnosis 0: Error is not generated 1: Error is generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

PFxx-OMS0001CN

No.PF-OMS0001CN-A // PFMC7501 PFMC7102 PFMC7202 2 10 11 12 14 15 17 18 [] 22 OU1OUT2 {3 ] 23 [] 25 26 F0 27 F1 OUT1 29 F2 OUT2 37 F3 42 F10 43 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F82 53 F90 54 F98 56 F99 57 58 62 63 65 66 66 69 71 -1No.PF-OMS0001CN-A (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

Digital Flow Switch ( compatible)

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Flow diagnosis 0: Within range 1: Out of range (HHH/LLL). 9 Fixed output 0: Normal output 1: Fixed output (for checking output) 15 Error diagnosis 0: Error is not generated 1: Error is generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

PFxx-OMX0002

text www.smcworld.com 0x0011 0x0012 (18) 0 R Product name Example: PF3A703H-xx-Lx-xxx 0x0013 (19) 0 R Product ID Example: PF3A703H-xx-Lx-xxx (20) 0 R Product text FloW sensor 0x0014 Initial value is indicated as 8-digit. 16 octets fixed character string 0x0015 (21) 0 R Serial number Example: "x" (22) 0 R Hardware version HW-Vx.y x: Large revision number y: Small revision number 0x0016 (23

PFxx-OMX0007

0 R Vendor text www.smcworld.com 0x0012 (18) 0 R Product name Example: PF3A701H-Lx-xx-x 0x0013 (19) 0 R Product ID Example: PF3A701H-Lx-xx-x 0x0014 (20) 0 R Product text FloW sensor Initial value is indicated as 8-digit. 16 octets fixed character string 0x0015 (21) 0 R Serial number Example: "x" (22) 0 R Hardware version HW-Vx.y x: Large revision number y: Small revision number 0x0016 (23

PFxx-OMY0005

In this case, there is a contradiction in the display of the sub screen. 19 oFF mode 20 Flow rate HYS mode set value 21 Flow rate HYS mode hysteresis 22 Flow rate Wind mode lower side set value 23 Flow rate Wind mode upper side set value 24 Flow rate Wind mode hysteresis 25 Temperature HYS mode set value 26 Temperature HYS mode hysteresis 27 Temperature Wind mode lower side set value OUT2

Digital Flow Switch (Integrated display type)

MODEL / Series / Product Number PF2A7##H Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 11 Definition and terminology 12 Mounting and Installation 14 Installation 14 Piping 15 Wiring 16 Outline of setting 18 List of outputs 19 Function selection mode 20 F_0 Initialize mode 21 F_1 Selection of display mode 22 F_2 Unit selection function 23

Digital Flow Switch (Remote type monitor unit)

PF2D3 series Item Default settings Page Selection of the connected sensor [04d] 0.4 to 4 L/min type (PF2D504) Page 21 Selection of display mode [d_1] Display instantaneous flow Page 22 Unit selection function [U_1] L/min Selection of output mode (OUT1) [o10] Instantaneous output mode Selection of output mode (OUT2) [o20] Instantaneous output mode Page 23 Selection of switch operation (OUT1

4-channel Flow Monitor (Remote type monitor unit)

. -20No.PF-OMH0003-F Initialize mode Default settings PF2A20 series Item Default settings Page Selection of the connected sensor [10L] 1 to 10 L/min type (PF2A510) Page 22 Selection of display mode [d_1] Display instantaneous flow Page 23 Unit selection function [U_1] L/min Selection of output mode [o10] Instantaneous output mode Selection of switch operation [1_n] Reverse output Page 24

PF-OMM0004_C

4 0.1L 0.5L 1L NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 25 0.5 s/1 s/2 s -65No.PF-OMM0004-D PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA IP65 050 () 3585R.H.() 7 AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSSUS304FKMSCS13 PPSSUS304 FKM 3/8 3/81/2 1/23

PF-OMN0011_C

No.PF-OMN0011CN-C / / PF3W3## SMC 2 9 12 13 15 15 16 21 23 23 F0 25 F1 OUT1 26 F2 OUT2 34 F3 40 F10 41 F20 45 F22 46 F30 48 F80 49 F81 50 F82 51 F90 52 F96 53 F97 54 F98 57 F99 58 59 62 63 66 66 69 71 -1No.PF-OMN0011CN-C (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

VCC13-02(F) 45.9 Rc1/8 pilot (12) port G1/4, Rc1/4 IN(1) port 16.5 15 2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 6 22 22 58 6 25 25 50 15 15 G1/4, Rc1/4 RETURN(3) port M5 leakage detection port 30 19 11 23 Part number for sub-base VCC13-S02 02F [Rc1/4] [G1/4] 38.4 Sub-base material is aluminum + hard anodized containing PTFE. 70 0.5 to 2 12 Valve for Water and Chemical Base Fluids