Title not found n.Al Cdu"' Rod Cross Section sl0 (3/8") 6 (5/81 Foot Type (L) r.rcizxL leo,e .I;]+L;G] @ Port location on Head Cover: In Llne T-TN rti \ =.1+@ L:_fr.,'t l l l L T r l I L H I f .
n.Al Cdu"' Rod Cross Section sl0 (3/8") 6 (5/81 Foot Type (L) r.rcizxL leo,e .I;]+L;G] @ Port location on Head Cover: In Llne T-TN rti \ =.1+@ L:_fr.,'t l l l L T r l I L H I f .
(When L/A IN LED is OFF.) (2)Check that the connectors of L/A IN and L/A OUT communication cables are connected and there are no broken wires. L/A IN and L/A OUT LEDs are OFF.
20 0.7 MPa 0.7 MPa 10 10 0 20 40 60 80 100 0 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74 6 ZFC75 8 0.1 MPa 0.3 MPa 0.5 MPa 0.1 MPa 0.3 MPa 30 30 Differential pressure [kPa] Differential pressure [kPa] 0.5 MPa 0.7 MPa 20 20 0.7 MPa 10 10 0 50 100 150 250 200 0 0 0 100 200 300 400 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3
10 5 16 8 4 20 10 5 2.86 Impact resistance/vibration Resistance [m/s2] Note5) 50 / 20 50 / 20 50 / 20 Ball screw Drive method Ball screw and Belt [1:1] / Ball screw Ball screw and Belt [1.25:1] Ball screw Ball screw and Belt [4:7] Guide type Sliding bush (Piston rod part) Sliding bush (Piston rod part) Sliding bush (Piston rod part) Operating temperature range [] 5 to 40 5 to 40 5 to 40
C Facility water temp. +15C Circulating fluid rated flow rate L/min 4 30 40 40 (1.1 [gal]/min) (7.9 [gal]/min) (10.6 [gal]/min) (10.6 [gal]/min) Facility water minimum necessary flow rate L/min 10 20 25 40 (2.6 [gal]/min) (5.3 [gal]/min) (6.6 [gal]/min) (10.6 [gal]/min) Operating temperature range C 20 to 90 Temperature stability *1 C 0.3 Circulating fluid *2 Galden HT200 or FluorinertTM
Centralized piping on right R R L L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 2. The plug position of the piping port can be changed to suit the operating conditions. When screwing in the plug for the second time, wrap a sealant tape around the plug to prevent leakage. (1) M5 First tighten lightly until the rotation stops.
(When L/A IN LED is OFF.) (2)Check that the connectors of L/A IN and L/A OUT communication cables are connected and there are no broken wires. (3)Keep noise sources away from the communication cable. L/A IN and L/A OUT LEDs are OFF. LINK has not yet been established. 11 : The L/A OUT LED will be OFF if the BUS OUT connector is not used.
DIN rail mounting bracket/IZN10-B3 (Mounting angle adjustable range) 40 17 50 Internal mounting 2 x 3.4 33 20.5 30 30 44 70 61 70 55 26 17 11 8 x 3.4 9 (7.5) 40 5 2 x Hexagon socket head cap screw M3 x 6 20 26 12 (Accessory) Internal mounting Pivot mounting 33 21 (Mounting angle adjustable range) (99) 30 Power supply cable/IZN10-CP 5.8 5 9 20 1 60 L Cable Specifications No. of cable wire
distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1
For a 10 orifice (VXS23/Port size 1/4), P 0.05 MPa The optimum size for a pressure differential of P 0.2 MPa and a flow of 50 L/min will be the VXS23 (10 orifice, port size 3/8). 500 400 VXS26 25 Cv = 12 300 VXS25 20 Cv = 9.2 200 VXS24 15 Cv = 5.3 Flow rate Q [L/min] 100 VXS23 Port size 3/8 10 Cv = 2.8 VXS23 Port size 1/4 10 Cv = 2.4 50 40 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3
26P Side 420 20 P kit: Flat ribbon cable C8 (For 8) Option Built-in silencer, direct exhaust 20P 1 to 9 stations VQC J kit: Flat ribbon cable SS5Q13SQ130 SQ131 420 20 1 to 8 stations PC Wiring System compatible L3 (For 3.2) L4 (For 4) L6 (For 6) L5 (M5 thread) SQ (2) 460 35 1 to 12 stations L kit: Lead wire Top VQ0 1 to 8 stations 475 20 S kit: Serial transmission Note 1) One-touch fittings
o"o+ oeep 3 o Cross section C-C 3 l "!l Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!
1500 Flow rate L/min (ANR) Flow rate L/min (ANR) AW20 Rc 1/4 AW40 Rc 1/2 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 600 800 400 200 0 2000 0 0 1000 3000 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics (Representative value) Conditions: Inlet pressure 0.7MPa; Outlet pressure 0.2MPa; Flow rate 20L/min (ANR) AW10 AW30 AW40-
7 t16-20 718 1.54 . 1 8 9 5/16 1t8 1/2-20 1/2 . 1 4 .220 5/r 6 'l 14 1t2-20 9/16 1.32 .220 5/16 318 'lt2-20 1 1 / 1 6t.!
l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than
o"o+ oeep 3 o 3 l "!l Cross section C-C Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!
Output transistor OFF OFF Hexagon socket head bolt (M3 x 6) Tightening torque: 0.290.01Nm Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L Be sure to use the attached mounting screws.
MX MTS MY Centralized piping on right CY MG CX R R L DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.