Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4)

This is a legacy product, and replaced byZH13DSA-N01-N02-N02, VACUUM EJECTOR, VACUUM SERIES, ZH VACUUM EJECTOR, DC, ZH NOZZLE SIZE 1.3, .08250 lb

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133

0.4

3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1) 1(P) 3(R2

HRX-OM-W002

M V 1 1 [ ] 2 WH 18AWG BK 18AWG BK 9 9 2 V G 3 U U [ ] 1 RD 18AWG BK 5 5 1 U (CN3) PM PUMP 7 7 Option T1 6 6 4 4 3 3 2 2 1 1 PM PUMP 2/2 PM PUMP (CN1) 16AWG G/Y G4 [ ] V G PM 16AWG G/Y G4 [ ] G U DC Power Supply Standard BL DCPS [ ] 18AWG G/Y G2 5 5 Condenser 18AWG BK 1 1 3 3 3 3 18AWG BK 3 3 1 1 1 1 C3 (CN51) (CN1) (CN6) Compressor CM CM AC Power Board 3 1 PCB1 3 3 [ ] TH 14AWG BK 14AWG

IDX-OM-W023

MC MC OLR MC PTC MC MC EDV TDR TDR For Option M TDR V CM MC For Option V OLR MC TDR MC 01 OLR MC 01 OLR MC 01 PTC CM MC OLR PTC CM PTC MC TDR PTC CM CM FM1 PRS C11 PRS MC FM1 FM1 PRS FM1 PRS P TDR MC P FM2 TDR P C12 P FM2 FM2 TDR FM2 TDR PRS C11 FM1 MOV MOV MOV M For Option M P C12 FM2 MOV M For Option M M For Option M M For Option M M For Option M CM PTC PTC C01 FM1 PRS C11 FM2

Multistage Ejector Series ZL

SYJ514 With valve 16 4 Multistage Ejector Series ZL Dimensions/Series ZL112 (without Valve) 2-5.4 Mounting hole Scale: 40% Label 50 117 Exhaust with silencer P Standard ZL112 20 V 4.5 166 56 Exhaust port Rc1/2 35 P Port exhaust ZL112P V 14 Vacuum pressure gauge Exhaust with silencer 2-5.4 Mounting hole P With vacuum pressure gauge ZL112-G V Exhaust with silencer Vacuum adapter Rc1/8 2-5.4

LJ1H

P N Ground ball screw Rolled ball screw Specifications Combinations other than the above cannot be manufactured.

Table of Contents

Series VQ1000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46

Ionizer

or higher +100 V to +400 V +30 V to +100 V Within 30 V 30 V to 100 V 100 V to 400 V 400 V or lower Light ON Positive Static neutralization completion Flash at 4 Hz Detects the electric potential difference and outputs in an analog voltage.

LV50-OMQ0002

Analogue output 1 to 5 V Output impedance 1 K Max.28 V, 80 mA Internal voltage drop 1 V max.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Real-time switch output Unit switching Hysteresis mode ON YES Accumulated flow l Display Real-time flow rate l/min OFF P-1 P-2 Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.

HRX-OM-W060

Indication Item Output Setting, selection and display CH1 circulating fluid temperature 0C to 100C: 0 to 10 V CH2 circulating fluid Analog temperature 0C to 100C: 0 to 10 V (1) Analog output signal 1 Output 1 CH2 electrical conductivity 0.1 to 50.0 S/cm: 0.02 to 10.0 V CH1 circulating fluid temperature 0C to 100C: 0 to 10 V Analog CH2 circulating fluid temperature 0C to 100C: 0 to 10 V (2

LVQ

T) V N M V LVQ30S, LVQ50S C B A D A B SMC U (Max. T) Z N M LVQ40S, LVQ60S C B A D (Max.

IIIIIIIIII

/min. (28 LPM) RECOMMENDED FILTRATION 5 micron Model Number Description V-800-10-W/K 0-10" Hg Vacuum regulator with adjusting knob V-800-10-W/S 0-10" Hg Vacuum regulator with 1/4" adjusting shaft V-800-10-W/OS 0-10" Hg Vacuum regulator with slotted adjusting shaft V-800-30-W/K 0-30" Hg Vacuum regulator with adjusting knob V-800-30-W/S 0-30" Hg Vacuum regulator with 1/4" adjusting shaft V-

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A96V A96 5 V Grommet Yes 12 V A93 A93V 24 V 100 V Relay, PLC 2-wire 3-wire (NPN) M9N M9NV IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) M9B M9BV 2-wire 12 V F9NW F9NWV Relay, PLC 3-wire (NPN) Diagnostic indication IC circuit 5 V, 12 V 24 V Grommet Yes 3-wire (PNP) F9PW F9PWV (2-color display) F9BW F9BWV Improved water resistance (2-color display) 2-wire 12 V F9BA Though it is possible

Turntable Cylinder Series MGT

OUT () Brown [Red] Reed switch D-Y7NW(V) D-F9NW(V) Brown [Red] DC (+) Brown [Red] OUT( ) Blue [Black] DC (+) OUT Black [White] Main switch circuit OUT Black [White] Main switch circuit D-A93(V) Brown [Red] LED OUT (+) Brown [Red] Contact protection box CD-P11 CD-P12 DC (-) Blue [Black] Resister Reed switch DC (-) Blue [Black] Zener diode D-Y7PW(V) D-F9PW(V) OUT( ) Blue [Black] DC (+) Brown

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)