Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Refer to front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port Solenoid Valve Precautions. w t q Caution on Design 2 (A) 1 (P) Warning y (1) Do not supply air pressure from ports other than the 1 (P) port. The valve will malfunction when air pressure is supplied from other ports. (2) Do not use the valve under negative pressure.

ISE70/75/75H

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Real-time switch output ( ) Unit switching Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES OFF P-1 P-2 GPM gal (US) Real-time flow rate GPM = gal (US)/min "P" Window comparator mode H : Hysteresis Note ) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.

70astamb1

L1 E1 E1 L1 MM NDH10 NX U1 NDH10 NZ R1 U1 R1 NX A A1 MM CA2 32 40 50, 63 80 100 32 40 50, 63 80 100 20 22 28 40 40 30 40 50 65 65 I-03M I-04M I-05M I-08M I-10M Y-03M Y-04M Y-05M Y-08M Y-10M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 Note) Pin, cotter pin and plain washer are attached

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 18 22 26 32 3 4 5 6 13 14 17 23 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

mb1

5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 3 4 5 6 13 14 17 23 18 22 26 32 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

Non-contact Gripper

C H 4 x M depth ML 4 x M depth ML P depth PL Air supply port 16.5 16.5 H D D XT661-8C-X321 XT661-10C-X321 P depth PL Air supply port P depth PL Air supply port 45 45 45 45 P.C.D. C P.C.D. C H H 4 x M depth ML 4 x M depth ML 16.5 16.5 D D XT661-120E-X322 XT661-150E-X322 45 P depth PL Air supply port 45 P depth PL Air supply port 45 45 P.C.D. C P.C.D.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Confirmation of allowable lateral load From the graph, the allowable lateral load at L = 50 mm and P = 0.4 MPa is 18 N. Because 2.1 N < 18 N, it is applicable. 30 20 D2. Confirmation of allowable lateral load In the same way, the lateral load at L = 50 mm and P = 0.4 MPa is 48 N from the graph.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Operation conditions Operation conditions Point of application L Operating pressure P (MPa) Operating pressure P (MPa) Workpiece weight m (Kg) Workpiece weight m (Kg) Workpiece quantity x (Qty.) Workpiece quantity x (Qty.)

IDX-OM-W011

6 IDF11E-10 ILS SYMBOL WIRE COLOR PTC (WH) (BK) 1 2 (BK) AC100/100,110V (50/60Hz) 3 (BU) M (BK) Black 4 C01 S (WH) White CM 4 2 (GR) (GR) Gray PC OLR (SY) C (SY) Sky Blue (SY) C 1 3 (RD) Red FM PRS (RD) (BU) Blue (BK) (G/Y) / Green/Yellow P (BK) IDF11E-20 ILS PTC (50/60Hz) AC200/200,220V 2 1 (BK) 3 M (WH) L S CM (GR) 4 2 (SY) N (G/Y) OLR C (SY) PE 3 1 C TB PRS (RD) (BK) (WH) C11

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

0 y !5 !4 @2 !3 w @4 @3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !6 !7 !8 !1 @1 !2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

Hydraulic Cylinders

sides -XC61W 22 25 8 16 39 94 M16 x 1.5 50 27 30 9.5 21 45 105 M20 x 1.5 Note) The relationship between the mounting taps (X and Y dimensions) provided on cylinder tubes and their order numbers is as shown above. 63 32 35 11.5 27 53 120 M24 x 1.5 80 40 43 15 36 64 142 M30 x 1.5 100 47 50 17.5 41 76 172 M39 x 1.5 10 Series CH KDB Made to Order Specifications 2 Contact P/A for detailed specifications

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

VNl VQ 1 (P) N.C. Note 5) DIN connector style: Applicable to dust and jet proof (IP65).

VCS

P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 e OR-1400-178P P: PTFE F: FKM OR-2670-178P r P: PTFE F: FKM Wave washer For VCS30, 40 When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y, and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

Compact Type

3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Suction cups with flange

Center of gravity (ZXP7-PFL1-ZPB25JN-X1) Y Y Z X (Unit: mm) Z Center of gravity X Y Z 0.64 0.57 13.96 X -11No. TQ1230001-OM107 5.3. Suction cup with adapter *It is shown here for representative model only. See the suction cup catalog for the other models.

SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

Made to order options (see Page 55) Low temperatureresistant (XB6) resistant Modification of rod end auto switch Page P 8 P 1 7 P32 fechnical Data Auto switch guide P 4 6 P 3 8 ?