Process Pump Series PA3000/5000/PAX1000 Series PB1000 C Ambient temperature C Dew point indicator purge air flow rate Port size (nominal size B) 1/4, 3/8 1/8, 1/4 Weight kg (with bracket) 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (0.87) 0.77 (0.90) Note 1) With no freezing Note 2) ANR indicates the flow rate converted to the value for 20C at atmospheric pressure.
Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.
D A B Side support B MY-SB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.
D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.
Combination Catalog CAT.E5G-C for types of attachments.)
Mounting bracket Ass'y Mounting screws Controller model M3 x 0.5 LC1-1-N3 LC1-1B-N3 M5 x 0.8 LC1-1-N5 LC1-1B-N5 M3 LC1-1-L3 LC1-1B-L3 M5 LC1-1-L5 LC1-1B-L5 Note) This controller comes with either the T-nuts or T-brackets as accessories.
Dimensions: Stroke Adjusting Bolt (mm) Applicable size Model Stroke adjustable range (mm) A B C M M C MXF-A827 MXF-A827-X11 MXF-A1227 MXF-A1227-X11 MXF-A1627 MXF-A1627-X11 MXF-A1627-X12 MXF-A2027 MXF-A2027-X11 MXF-A2027-X12 5 15 5 15 5 15 25 5 15 25 17 27 23.5 33.5 26.5 36.5 46.5 30 40 50 MXF8 M4 x 0.7 6 2 MXF12 M5 x 0.8 7 2.5 MXF16 M6 x 1 8 3 A B MXF20 M8 x 1 12 4 8-6-9 10 Series MXF Dimensions
Q (Depth) 90 100 R P E(g6) A F(h9) B C D G1 G2 J K L M N Model RQ1 M3 (10) RQ2 3.4 (6) (Q3 M3 (5) CRB1BW15-lD CRB1BW15-lDE CRB1BW20-lD CRB1BW20-lDE CRB1BW30-lD CRB1BW30-lDE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 29 5 34 12 20 9 18 4 1.5 6 10 0.5 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 36 6 42 14 29 10 20 4.5 1.5 7 10 0.5 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014
Q 27 30 32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers under the manifold base part number.
9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 $0 $1 MK(2) RS Q G Clear anodized Clear anodized 20, 32 only 20, 32 only RS H A RZQ MI W S Nickel plated Nickel plated CEP1 Type C snap ring for shaft Type C snap ring for shaft CE1 Type C snap ring for shaft Return spring CE2 Hexagon socket head set screw Hexagon socket head set screw 20 only Nickel plated 20 only ML2B Hexagon
7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 NLP-32A RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 NLP-40A RCS-12 GMY40 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR C-7 SO-015-22 SO-015-16 8.3 X 4.5 X 1.9 SO-010-16 SO-010-16 C-100 NLP-25-19A RCS-8 GMY25 $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 %9 Hard anodized Hard anodized Hard anodized M1L025-17A82076
9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 $0 $1 MK(2) RS Q G Clear anodized Clear anodized 20, 32 only 20, 32 only RS H A RZQ MI W S Nickel plated Nickel plated CEP1 Type C snap ring for shaft Type C snap ring for shaft CE1 Type C snap ring for shaft Return spring CE2 Hexagon socket head set screw Hexagon socket head set screw 20 only Nickel plated 20 only ML2B Hexagon
One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.
Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa
x 0.8, NPTF 1/8, M5 x 0.8 Port size R 1/8, M5 x 0.8 NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Enclosure IP40 Note 1) Instant pressure supply of 0.5 MPa has no influence on the switch.
Stroke range (mm) Bore size (mm) A N AD AC M AF L AE F K AB C E J AA AP B D G H I 99 45 75 16.5 25 80 30 60 11 92 55 24 5.5 12 25 108 60 30 20 75, 100, 125, 150, 200 M5 x 0.8 depth 10 9.5 depth 6 M8 x 1.25 depth 14 109 54 85 16.5 35 100 30 70 13 26.5 113 6.6 65 16 30 130 65 35 25 11 depth 8 M10 x 1.5 depth 18 M6 x 1 depth 12 75, 100 125, 150 200, 250 300 129 60 100 19 35 106 35 80 16 118
Voltage leakage Particularly when using a C-R element (surge voltage suppressor) for protection of the switching element, use cation that leakage voltage will increase due to leakage current flowing through the C-R element, etc. Caution 1.
16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5 4 8.2 C6L 15.2 18.3 4 10.4 N7L 20.9 20.6 6 11.1 -78No.PS-OMU0002CN-D A B -79No.PS-OMU0002CN-D 0.57 + 0.57 -80No.PS-OMU0002CN-D 2 (n ) <> <> 31n +3.5n -1 31n +3.5n -1 -81No.PS-OMU0002CN-D Revision history A [2018 7 ] B [2020 2 ] C [2021 2 ] D [2022 2 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5,298 5,362
x 0.8 through (Opposite side 7.6 counter bore depth 4.2) B With double shaft DD W D H 2 10 2-M5 x 0.8 (port size) (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.
M5 thread OUT IN Symbol Plate PEEK PEEK PEEK Diaphragm EPDM FKM Kalrez A B C 11R 2 N.C. (Symbol 1) IN (Symbol 2) OUT Option Nil Nil Bracket Manual override Bracket, Manual override 1 2 3 12R N.O.