Sine Rodless Cylinder Series REBR Direct Mount Type

D-Y7WV D-Z7 D-Z80 D-Y5 D-Y6 D-Y7P D-Y7PV Cylinder model REBH15 6 5 A B REBH25 6 5 REBHT25 6 5 REBHT32 9 6 Proper auto switch mounting position (mm) Note) Operating ranges are standards including hysteresis, and are not guaranteed.

CE2

Standard Stroke Bore size (mm) Standard stroke (mm) Range of manufacturable stroke Auto switch model 40 CV Bore size (mm) 50 63 80 100 Without rod boot With rod boot Without rod boot With rod boot D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NTL D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL 40 25 to 850 25 to 700 Up to 1200 Up to 950 MVGQ 50 25 to 800 25

Guide Table Series MGF ø40, ø63, ø100 1

K (6 places) 93 186 8-23-12 13 Guide Table Series MGF Operating Range Proper Auto Switch Mounting Position (Detection at stroke end) Auto switch model Bore size (mm) 40 63 100 10 10 10 D-Z7/Z80 D-Y59, D-Y69 D-Y7P/Y7PV D-Y7W/Y-7WV 6 6 6 B A 5 5 5 D-Y7BAL Since this is a guideline including hysteresis, not meant to be guaranteed.

ML1

Note Applicable swich USwitch mounting screw M2.5 X 10 l BMY1-025 D-E73A/76A/80A 25 32 40 USwitch mounting nut USwitch mounting screw M2.5 X 12 l D-M5N/M5P/M5B D-M5NW/M5PW/M5BW D-M5NTL/M5PTL BMY2-025 USwitch mounting nut 4.7-4 Hy-Rodless Cylinder SeriesML1 Cylinder Specifications 25 32 40 Bore size (mm) Guide mechanism Cam follower guide Fluid Air Action Double acting Operating pressure range

Hydraulic Cylinders

MA B D-F9BAL A Proper auto switch mounting positions (mm) 32 to 100 D-Z7, D-Z8, D-Y5 D-Y, D-Y7 D-Y7V, D-Y7WV D-Y7BAL B Bore size (mm) D-Z7 D-Z8 D-Y5 D-Y7 D-Y7W A 10 12 13 16.5 18.5 26.5 B 16.5 18.5 22.5 26 35 44.5 32 40 50 63 80 100 A B D-Y6 D-Y7V D-Y7WV Auto switch mounting heights (mm) SMC D-Y7BAL Bore size (mm) SMC MA 32 40 50 63 80 100 32.5 37 43 51.5 62 74.5 Approx.

3 Port Air Operated Valve Series SYJA300

6 stations for type 40, or more than 9 stations for 41 type, supply air to both sides of P port and exhaust air from both sides of R port.

Fieldbus System

Fixes the D-sub connector in place. (No.4-40 UNC) 4 Lock screw 5 Joint bracket Links units to one another. Transmits signals to the neighboring unit and supplies power. Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

(mm) Auto switch model Bore size (mm) Bore size (mm) Auto switch model MGJ 40, 63, 100 40 63 100 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL MGP BMG2-012 6 6.5 6 MGQ D-Z7/Z80 10 10 10 D-M9(V)/M9W(V)/M9A(V)L D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL MGG 6 6 6 MGC BMG2-012 Since this is a guideline including hysteresis, not meant to be guaranteed.

HRX-OM-W002

pump mounted . 6-2 6.4 Option T1Inverter pump mounted . 6-3 6.5 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.1 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.2 Anti-quake bracket (Optional Accessories) . 6-5 6.6 Option ZRemoved Parts . 6-6 6.6.1 Option ZRemoved Parts . 6-6 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

D A L Series Part no. 10-SZ3000 SZ3000-114-2A Dimensions Applicable fitting size d Model A L D 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-03 10-KQP-07 10-KQP-09 4 16 32 6 6 18 35 8 8 20.5 39 10 5/32" 16 32 6 1/4" 18 35 8.5 5/16" 20.5 39 10 383 Cassette Type Manifold 10-SZ3000 Manifold Option DIN rail dimensions / Weight D-sub connector (25 pins) / Cable assembly Directional Control Valves Air Grippers

39

port Nil TN 90 G 105 NPT 120 135 A015 C S CKZT Clamp Arm 40 Mounting hole Bore size 40 80 Equivalent Power clamp cylinder European type D1 H D2 D1 D2 H symbol S B 6 7 16 6 9 25 8 20 8 10.2 10.2 25 Bore size Only S type is available for A015 of 40. 40 80 40 Arm mounting position 80 Equivalent Right D1 D2 Offset H R A015 A045 Offset 15 Offset 45 Center D1 D2 C H Left D1 D2 L H Cylinder Specifications

Thermo-con/Rack Mount Type

Communication connector D-sub 9 pin (socket) Holding screw: M2.6 6 Contact a for output cutoff alarm (open when alarm occurs) 7 Common for output cutoff alarm 9 15 10 11 12 13 14 Pin no.

DOC1023125

Size Order No. 24 Return Plate Aluminum alloy Coating 25 LE-D-15-1 25 Cover plate Aluminum alloy Anodized 27 32 LE-D-19-1 26 Table spacer Aluminum alloy Anodized 40 LE-D-19-2 27 Belt Replacement parts/Grease pack Order No.

HRX-OM-X084

Option . 6-1 6.1 Option DMElectric conductivity control function , DI water (pure water) piping . 6-1 6.1.1 Option DMElectric conductivity control function , DI water (pure water) piping . 6-1 HRR Series HRX-OM-X084 Contents 6.2 Option MDI water (Pure water) piping . 6-2 6.2.1 Option MDI water (Pure water) piping . 6-2 6.3 Option T1Inverter pump . 6-2 6.3.1 Option T1Inverter pump . 6-2 6.4

Low Profile Air Gripper Series MHF2

71 6 (Mounting thread) 62 86 2 x M6 x 1 thread depth 6 33 56 M5 x 0.8 Finger closing port (Mounting thread) E 13 25 25 30 41 E MHZ 2 x 5.2 through (Mounting hole) 0 0.1 32 31 31 MHF M5 x 0.8 2 x 10 1.2 1.2 Finger opening port MHL E-E Close: 0 +0.1 0 Open: 201 MHR MHK 8 x M4 x 0.7 thread depth 4 4 x M6 x 1 thread depth 6 40 (Attachment mounting thread) (Mounting thread) MHS MHC Auto Switch

HEC_001W-E

I C o n s t a n t M O D E < 5 0 C 150 sec 7-9 Operation 6. D Constant Setting range : 0.0 to 99.9sec Min. increment : 0.1sec Indicated content : D constant(Ex. : 0.0sec) Function : Sets differential time used for PID control. When 0 is set, this function becomes invalid. D C o n s t a n t M O D E < 0 . 0 s e c 7.

MHF2

0 depth 3 6 30 8 30 8 3 2-M6 x 1 thread depth 6 Mounting thread Groove for auto switch mounting 25 144 12-3-23 24 Series MHF2 Body Option: Side Piping Type (mm) MHF2-DR Body Option Dimension B Model A D C A B 25 MHF2-8DR 5.5 37 M3 x 0.5 11 MHF2-8D1R 61 MHF2-8D2R C 38 MHF2-12DR 7 54 M5 x 0.8 14.8 MHF2-12D1R 90 MHF2-12D2R 54 MHF2-16DR D D 9 M5 x 0.8 19 76 MHF2-16D1R ( Finger closing port)

MHF2

60 40 20 0 0 50 30 10 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 100 0.5MPa 100 Pressure 0.2MPa Pressure 0.2MPa 80 0.5MPa 0.6MPa 80 0.6MPa Overhang Hmm Overhang Hmm 0.3MPa 0.7MPa 0.3MPa 60 0.7MPa 0.4MPa 60 0.4MPa 40 40 20 20 100 80 60 40 20 0 100 80 60 40 20 0 Gripping point L mm Gripping point L mm 12-3-6 7 Model Selection Series MHF2 Confirmation of External Force on Fingers

Thermo-chiller/Rack Mount Type

6 !7 @0 @1 !8 No.