BP1000

Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Code Bonnet Standard Panel Installation 3) Code

Auto Switch Guide

If using other screws, switch may be damaged. (3) Load current range and Maximum load current 5 to 20 mA 5 to 40 mA 20 mA Contact protection circuit None D-A93 2.4 V or less (up to 20 mA)/3 V or less (up to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Auto Switch Internal Circuit Colors of lead wire inside ( ) are the ones before conformed to IEC standard.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Rack & Pinion Type Rotary Actuator Series 11-CRA1-Z Size: 30, 50 RoHS How to Order 11 Vacuum suction type Clean series Nil Auto switch No D Built-in magnet B Mounting Basic L Foot Shaft type S Single shaft W Double shaft 30 Size 50 11 C D R A 1 B S 50 90 Z M9B Rotating angle Number of auto switches 90 180 100 90 180 100 190 Nil S 2 pcs. 1 pc. 190 Type of auto switch (For model with auto switch

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24

Return Filter FH100 Series

(Reset type) Perform element replacement when the red ring floats up and covers the entire view port. 0.1 08 10 12 20 24 16 0.05 Pressure drop (MPa) 0.03 w Operation The hydraulic fluid used becomes high viscosity when the temperature is low during the winter, etc., and the differential pressure indicator or the switch may activate.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

4 @1 w !8 w !8 w !6 !5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Assembly of check valve body assembly, check valve cover and 2 screws 706 Direct Operated Precision Regulator/Modular Type Series ARP20/30/40 Working Principle (Regulator with Backflow Function) ARP20K/30K/40K w A-A A ARJ AR425 to 935 ARX 1 I N 2 OUT AMR C SM ARM ARP ARP A IR IRV w w VEX SRH Inlet pressure (IN side) Pressure in diaphragm chamber Inlet pressure Pressure in diaphragm chamber

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Assembly of check valve body assembly, check valve cover and 2 screws 764 Direct Operated Precision Regulator/Modular Type ARP20/30/40 Series Working Principle (Regulator with Backflow Function) ARP20K/30K/40K w A-A A ARJ AR425 to 935 ARX 1 I N 2 OUT AMR C SM ARM ARP ARP A IR-A IR w w IRV VEX Inlet pressure (IN side) Pressure in diaphragm chamber Inlet pressure Pressure in diaphragm chamber

Parallel Type Air Gripper

Specifications 1-1 Specifications Specifications Model MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-32 MHZ2-40 Cylinder inside diameter (mm) 10 16 20 25 32 40 Fluid Air Double acting: D 0.2 to 0.7 0.1 to 0.7 Operating pressure (Mpa) Normally open: S 0.35 to 0.7 0.25 to 0.7 Normally Single acting closed: C Ambient and fluid temperature (oC) 10 to 60 Repeatability (mm) +/-0.01 +/-0.02 Maximum operating

Series 10-, 21- AF-A Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Digital Gap Checker

(Bracket for centralized lead wire) 28 46 14 16 16 20 19 8 (1.6) 5.5 6 12 22 60 48 2 x 3 6.5 2 x 3.4 4 19.2 2 x 5.5 2 20 ISA3 Series Error Indication Main screen Name Description Measures Supply rated pressure (100 kPa to 200 kPa).

06-cbg1-e

CBG1A Air cushion type CBG1N40-PS CBG1A25-PS Locking at both ends CBG1A32-PS CBG1N20-PS-W CBG1A40-PS 20 25 32 40 CBG1N20-PS-W CBG1N25-PS-W CBG1N32-PS-W CBG1N40-PS-W Above no. @5, @6, @7, @8. And a grease pack.

Series 12-REA Sine rodless cylinder

x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x 16 M8 x 1.25 x

AMR3000 to 6000

If it does not locked easily, turn the handle s l i g h t l y c l o c k w i s e o r counterclockwise; then, push it until the orange colored line is no longer visible.

VP3145/3165/3185

W/ surge voltage suppressor is available for grommet type only.

MHx-OMU0057

20 2.5 0.95 25 3 2.25 0.2mm 0.2mm 14 - 3-4. 1025 (1)Assy (2) (3) (4) (5)Assy O Assy :GR-S-010(10g) O C 15 - 32,40 1C 2 3 4.Assy :GR-S-010(10g) C 32 3 40 4 32 2 40 2.5 Assy 16 - 3-5./ 1025 / / / / 1 12 13 2 10,16; 20;25; 14 20,25; 3 15 C 4 5 16 A 6 17 A 18 NO 7 19 NC 8 20 NBR 9 21 NBR 10 22 NBR 11 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-D MHZ2-C MHZ10-PS MHZ16-PS MHZ20

Series AP3100

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

Auto Switch Guide

If using other screws, switch may be damaged. (3) Load current range and Maximum load current 5 to 20 mA 5 to 40 mA 20 mA Contact protection circuit None D-A93 2.4 V or less (up to 20 mA)/3 V or less (up to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Auto Switch Internal Circuit Colors of lead wire inside ( ) are the ones before conformed to IEC standard.

JXCx-OMT0028CN

220239 ID1 240249 250253 254,255 / JOG(-) ON OFF FLGTH ON JOG(-) /INP OUT0~5 OFF/ INP OUT0~5 ON JOG(+) + FLGTH JOG(-) JOG(+)/ ON ON OFF 43 - / JOG *1 /(mm/s) 2) JOG *1 /( mm/ s 2) JOG *1 /( mm/ s JOG *1 /() 1 (mm) *1 PLC 8,16,32 8 8 )100%GW [OUT Data]Address.1620mm/sAddress.17 20mm/s 16 14h 10%100%1016 0Ah PLC 16 16 )100mm/s GW [OUT Data]Address.4-Address.5 Address

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 45 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AFF 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27 32