SMC Corporation of America
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Devise a safe system so that if a person engages the emergency stop, or if a safety device is tripped during a system malfunction such as a power failure, the movement of the rotary actuator will not cause a hazard to humans or damage the equipment. (10) Consider the action of the rotary actuator when restarting after an emergency stop.

Option Bracket J: With drain guide (Option) female thread T: With element service indicatior Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

IR How to Order VEX VVEXB 5 01 1 AMR Pilot type 01 Port size Body size ITV Thread type Nil F N T Rc G NPT NPTF 8 1 IC Internal pilot Common external pilot 1 2 Valve stations VBA 2 2 stations VE 10 10 stations VY1 VVEX2 5 02 1 G Pilot type 02 Port size Body size Thread type PPA Nil F N T Rc G NPT NPTF 4 1 AL Internal pilot Common external pilot 1 2 Valve stations 2 2 stations 8 8 stations

Kit components CXSL 6PS CXSL 10 B PS CXSL 15 A PS CXSL 20 A PS CXSL 25 A PS CXSL 32 A PS Chromium steel Nickel plated 6 10 15 20 25 32 15 Nickel plated Special steel Synthetic resin 16 17 Items 22 through 24 from the chart above Note 1) Anodized aluminum alloy for CXSL6.

7 w i t q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A' @6 #2 @8 @9 #0 !8 !9 #1 @7 !4 !

A A -13No.PS-OMG0001CN-H DC+5 OUT1 4 OUT2 3 2 DC-1 M3 mm 0.30.35 Nm PSE3T 3 PSE31T 2 -14No.PS-OMG0001CN-H ZS-28-A PSE30(T) PSE31(T) NPN 2 NPN 2 Max.30 V80 mA 1 V Max.30 V80 mA 1V :15 V 1 k :420 mA 300 (DC12 V) 600 (DC24 V) 50 DC+ DC+ OUT1 OUT1 OUT2 OUT2 DCDCPSE32(T) PSE33(T) NPN 2 PNP 2 Max.80 mA 1 V Max.30 V80 mA 1 V 15 V 1 k DC+ DC+ OUT1 OUT1 OUT2 OUT2

at front side QB 2-Plug WB GB E W (Diagonal I) (mm) I B GB P QA CD QB CT CZ D E FT FX FZ GA H Stroke A L Bore (mm) N O 1 8 1 4 1 4 50 14 depth 5 85 93 16 10 20 7 8 36 32 64 20 73 93 16 128 30 221 45 9 63 18 depth 6 103 107 24 12.5 20 8.5 10 45 40 77 25 90 114 24 144.5 30 251.5 54 11 80 20 depth 6 132 128 35 12.5 25 10 10 45 50 98 25 110 138 24 171.5 40 299.5 56 13 SRSH Bore size A, #1 (

Reference dimensions of 10-32 UNF and NPT threads after installation. 15-9-79 6 Dimensions Universal type L6 D4 Applicable tubing O.D. d H D1 (Hexagon width across flats) M1 L3 A L4 L5 D3 L1 D2 T L2 Metric Size Inch Size A Model A d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 Model M1 AS131F-M5-23D AS131F-U10/32-01D 1/8" 8.4 3.2 8.4 19.8 19.8 12.7 17.5 28.7

Orifice and Port Size Combinations Class Orifice size (mm) Port size 3 2 4 5 7 10 T Conduit terminal 1/8 (6A) 2 1/4 (8A) 1/4 (8A) 3 3/8 (10A) 1/2 (15A) 1/4 ( 8A) 3/8 (10A) 4 1/2 (15A) Available types of electrical entry are either G, C and T.

size (mm) B A A B 90.5 29.5 39.5 80.5 90.5 10 to 50 75, 100 39.5 40 Rod end nut 38.5 Rear flange type: CLQG40 54 40 4-5.5 A + Stroke 8 7 B + Stroke 34 72 62 Rear flange type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B A B Rod end nut 28.5 88.5 29.5 39.5 78.5 88.5 10 to 50 75, 100 39.5 40 Double clevis type: CLQD40 4-M5 x 0.8 Cap bolt 10 hole H10 Shaft d9 6 B

. l b t t . l b kwh Volume ins 16387 in3 16.387 ft3 0.0283 ft3 28.329 gal(U.S.)3.785 Volume mm3 6.10 x 10-5 cm3 (cc) 0.0610 m3 35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)

Bore size (mm) B A A B 90.5 29.5 39.5 80.5 90.5 10 to 50 75, 100 39.5 40 Rod end nut 38.5 Rear flange type: CLQG40 54 40 4-5.5 A + Stroke 8 7 B + Stroke 34 72 62 Rear flange type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B A B Rod end nut 28.5 88.5 29.5 39.5 78.5 88.5 10 to 50 75, 100 39.5 40 Double clevis type: CLQD40 4-M5 x 0.8 Cap bolt 10 hole H10 Shaft d9

Series 10-/11-/12-/13Clean Series Available for clean environment. Particle generation in a clean room can be prevented.

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Model A L D KQ2P-04 KQ2P-06 KQ2P-08 4 6 32 16 6 8 35 18 8 10 39 20.5 A A A A A B B 5 Series SZ3000 DIN rail dimension table/weight table D-sub connector (25 pins)/cable assembly VZ1000-11-11 VVZS3000-21A~ 3 Refer to the L dimension table Enter a number from the DIN rail dimension table below in the .

. l b t t . l b kwh Volume ins 16387 in3 16.387 ft3 0.0283 ft3 28.329 gal(U.S.)3.785 Volume mm3 6.10 x 10-5 cm3 (cc) 0.0610 m3 35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)

53-SY5000/7000 Dimensions: 53-SY5000 L-type plug connector (L) 53-SS5Y5-20Stations L1 71 (E-type) 59.5 10 L2 Manual override {1/8"} 16.5 11.5 4 x 4.5 (Mounting hole) 32.7 45.3 EA EB P EA EB P A B A B A B B A 32.7 76.8 32.3 30 L 166.2 21 21 153.6 60 16.2 20 6 x 1/4" {P(1), EA(5), EB(3) port} (Pitch) P = 16 1/8" {A(4), B(2) port} 22 (Lead wire length) Stations n 2 1 67 41.7 36.2 26.5 L-type

Never mount a switch in a place that will be used as a scaffold during piping. Damage may occur if an excessive load is applied to the switch. 10. Be sure to allow straight pipe length that is minimum 8 times the port size upstream and downstream of the switch piping.

Install a suitable circuit breaker applicable for the specific model. The voltage fluctuation should be maintained within 10% of the rated voltage. Note) Select a circuit breaker with a sensitivity current 30 mA.