Compact Manifold Regulator

AP100 17 735 ARM11A/B Series Pressure Switch Block 56 ARM11AW Z A 0.4 0.2 0.6 0.5 20 MPa 24 q w 0.3 0.1 1. Accessory 2.

Vacuum Ejector Series ZM

(With light: 1.05 W), 100 VAC: 1.4 W (1.45 W), 110 VAC: 1.45 W (1.5 W) Mass Made to Order (Refer to pages 1004 to 1006 for details.)

Air Slide Table Series MXJ

L1 A1 Mr Static moment Dynamic moment Graph (1) Load Mass: W W W MXJ4 A3 L3 L2 A2 0.10 L3 A3 Rubber stopper Mr Load mass W kg Mp 0.08 My Metal stopper W 0.06 W W 0.04 Mey Mep We 0.02 We L3 L2 A2 0.00 Collision speed V mm/s (Average speed x 1.4) 0 200 100 300 400 500 600 700 A3 MXJ6 Note) Static moment: Moment generated by gravity Dynamic moment: Moment generated by impact when colliding with

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

13 340 1/2 66 140 12 20 16 47 125 15 340 1/2 77 140 12 20 16 55 160 20 375 3/4 94 159 12 24 20 60 109 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW Front flange type: CHAWF Width across flats G 4-FD 4-J 2-Rc P T T V V Cushion adjustment screw MM Width across flats G GA Air release GA M MM R (max.) d d W W D E E D FY B C MA a a FT MA B F NA NA F K A A

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

dia. 5.1 19 6.5 W 32 0.05 46 0.5 0.05 8 B D Piping port 2-M5 x 0.8 47 13 J Mounting reference planes B D 16.5 14.5 Section AA MXP16-30 Without magnet and switch rail 2-M3 x 0.5 depth 3.5 For rail mounting 8 2-M2 x 0.4 depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8 depth 7 20 20 L (mm) MXP16-20 MXP16-30 SMXP16, #1(#1 + #3) SMXP16, #2(#2 + #4) L K J V H S Z G M W Model 36 40 93 82 58 20

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N

ChemicalThermo-con

: 95F (35C) Facility water: 95F (35C) 400 400 200 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) HED007 60 80 100 120 140 F 40 1600 Facility water: 50F (10C) Facility water: 77F (25C) Cooling capacity (W) 1200 Facility water: 95F (35C) 800 400 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Heating Capacity

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

PFxx-OMY0005

Y 0: 2_P (Normal output) 1: 2_n (Reverse output) 1540 0x0604 0 R/W Dir (Setting of the accumulated flow direction) 0: Add 1: dEC1 2: dEC2 Addition/Subtraction U8 0 Y 1600 0x0640 0 R/W 0: 1.0 sec 1: 2.0 sec 2: 5.0 sec 1 R/W FiL_FLoW (Digital filter_flow rate) U8 0 Y Set digital filter 1800 0x0708 2 R/W FiL_PrES (Digital filter_pressure) U16 10 Y 0 to 3000 ms 10 ms increments (0 to 30 sec.)

Rotary Clamp Cylinders

MK2B25-10 MK2B25-20 MK2B32-10 MK2B32-20 MK2B40-10 MK2B40-20 MK2B50-20 MK2B50-50 MK2B63-20 MK2B63-50 8.5 To attach and detach the arm to and from the piston rod, fix the arm with a wrench or vise and then tighten the bolt.

HRX-OM-R005

-(BJM) . 9-5 9.3.2 HRS060-W-20-(BJM) . 9-6 9.4 Cooling capacity . 9-7 9.4.1 HRS060--20-(BJM) . 9-7 9.5 Heating capacity . 9-7 9.5.1 HRS060-A-20-(BJM) . 9-7 9.5.2 HRS060-W-20-(BJM) . 9-7 9.6 Pump capacity. 9-8 9.6.1 HRS060--20-(BJM) . 9-8 9.7 Required facility water flow (For water-cooled type) . 9-8 9.8 Compliance . 9-9 HRS Series HRX-OM-R005 Contents 9.9 Sample DoC. . 9-10 9.10 Daily Check

CQM

12 CUJ A B W CU 16/20/25 CQS CQM W A B CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RQ Hs 32/40/50 MU D(mm) -X D-A9 D-M9 D-F9 W Auto switch model D-F9BAL Mounting height Hs exists only for the D-F9BAL type. 20Symbol A B W A B W A B W HS 16.5 18.5 22 24 26.5

CJ2

Refer to pages 6-20-3 to 6-20-6 for Safety Instructions and Actuator Precautions.

Compressed Air Preparation Filter

AMK Series Construction Size 20 to 40 q w OUT IN t Component Parts e No.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

%silltr

E , W E , W M P Work Potential energy Kinetic energy Torque Power Joule = Newton meter Joule Joule Joule Watt J J t ' J w = kg . m2's-2 0.5-m-i = J's-l 3.

Low Profile Slide Table Series MXF

moment Static moment L2 A3 W MXH Mp Mr My MXU W W W MXS L1 A2 L3 A6 W L2 A4 MXQ Mey Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

REC

RSH REC20 20 Front flange: F Rear flange: G 39 50 56 61 0.3 Foot: L L CE1 10 30 38 43 47 0.5 W W W CE2 F 5 24 31 36 39 0.7 11 17 19 21 0.3 ML2B 7 11 13 13 G 0.5 ML1C 1 10 50 100 200 300400 Max. speed u (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 REA Front trunnion: U Rear trunnion: T 32 42 48 52 0.3 Clevis: C, D C 22 30 35 37 0.5 REC Graph w Applicable max. stroke against lateral load

Shock Absorbers and Rate Controls

resred lIr) flor. l{rn/rytle (lloloq l{0. tt odell OEtl l ,5lllx l 20 25.0 0.3.3.J 260 126,000 t3,000 19 58 2,890 0.9 lR0tl.5lltxl 20 25.0 0.08-t.3 260 t26,000 13,000 49 68 6,660 0.9 Offll.5Xtx2 20 50.0 0.3-3.5 520 167.000 t3,000 JI 68 2,890 1.0 tR0tXll.5ltlx2 20 50.0 0.08-1.3 520 1o,000 r3,000 49 80 6,660 L0 0tlSl.5flr3 20 75.0 0.3-3.5 7S0 201,000 ,000 32 80 2,890 1.2 0IIlt2.0tltx2 30 50.0

Mechanically Jointed Rodless Cylinder Series MY2

Load Mass Allowable Moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 q r w e t 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load mass kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 D3 3 3 3 MY2H16 -X 2 2 2 2 0.2 MY2H16 MY2H16 Individual -X MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300