ZP

Model A B C D Y Y B C D Flat A Model ZPT10D-B5-A10 10 12 15 24 6 Flat with ribs U C ZPT13 -B5-A10 U C ZPT16 -B5-A10 U C ZPT16D-B5-A10 ZPT10 -B5-A10 16 18 16 25 7 10 12 1.7 12 21 3 13 15 1.8 Dimensions by Stroke 16 18 12.5 21.5 3.5 1.2 10 16 G Model Dimensions by Stroke E F E F 10, 13 16 ZPTD10-B5-A10 71.5 36.5 35.5 72.5 23 G Model E F E F ZPTD20-B5-A10 109.5 45.5 46.5 110.5 51 U C ZPT 20-

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Flow Characteristics Model 1, 5, 3 (P, EA, EB) 4, 2 (A, B) 14/2(PA/B) 4/25/3(A/BEA/EB) Port size Flow characteristics C[dm3/(sbar)] b Cv C[dm3/(sbar)] b Cv 1 8 1 8 C6 C6 C8 1 4 0.19 0.20 0.23 0.20 0.25 0.18 0.18 0.44 0.46 0.75 0.81 0.82 1.9 1.9 3.0 0.23 0.20 0.16 0.12 0.12 0.75 0.75 1.8 1.9 3.0 0.20 0.20 0.45 0.43 0.66 1 4 10-SS5Y7-42 10-SS5Y3-41 10-SS5Y3-42 10-SS5Y5-41 C8 1 4 10-SS5Y5-42

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

F

KQT10-00 18.5 26.5 6.8 21 40 28.4 8 10 KQT08-10 18.5 15.2 26.4 23 6 21 18.5 36 27.2 12 KQT12-00 20.9 28.5 7.5 22 57.4 45.4 10 12 KQT10-12 20.9 18.5 28.4 26.5 6.8 22 21 56 44.5 16 KQT16-00 26.5 33 10 24 100 (84) Note) Parenthesized Dimensions are for Soft Nylon P R O D U C T S E L E C T O R B U L K H E A D C O N N E C T O R : KQE (KQ2E) Use for connection of a tube and a male thread for installation

Table of Contents

hole) 1.5 IDF-TR500-1 IDF1E-10 to 8E-10 IDU3E-10, 4E-10 500 VA IDF-TR500-2 Output sealing C A Output outlet Input fuse 5A Voltage selector B 220V INPUT 200V 230V 240V E D 4-5.5 x 10 long hole F Input cord 2 m Transformer part no.

5-Port Solenoid Valve

B Circular Connector B EX500 C Individual EXH (SUP) spacer assembly EX600 C EX250 SY7000222-1A [for 10 valves (30 pcs.)] SY5000222-1A [for 10 valves (20 pcs.)] SY7000221-1A [for 10 valves (30 pcs.)] SY3000222-1A [for 10 valves (20 pcs.)] SY5000221-1A [for 10 valves (20 pcs.)] SY300023-24A [for 10 valves (20 pcs.)]

AC Servo Motor Driver (Network card type ）

temperature of encoder (10 V/128 C) 2.

LX

pitch N x P U 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A Body mounting reference plane +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

V100

10 units.

Part Number Description: GAUGE VACUUM 1/4 NPT (KPA)   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 625   Family Description: GZ VACUUM GAUGE   Class Code: KD   Part Code: 2   Reference Code:  K   Click here to report information errorImage shown may not match exact part number

Made to Order

Plug) FAFB C + Stroke S A + Stroke x 2 (RA) MC E + Stroke B + Stroke Common Dimensions (mm) Slide DB Bore size (mm) Standard stroke (mm) B C DA FA FB G GA GB H J L MA MM ML NN HA E MT K MB A MC Ball bushing 12 16 20 25 32 40 50 63 6 6 8 8 8 8 9 9 8 8 10 10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.5 1.5 1.55 1.55 2.05 2.55 2.55 0.7 0.7 0.9 1.15 1.15 1.15 1.35 1.35 0.030 0.060 Type C 5 for axis 0.030 0.060 Type C 8 for axis 0.040 0.076 Type C 10 for axis 0.040 0.076 Type C 10 for axis 0.040 0.076 Type C 14 for axis 0.050 0.093 Type C 18 for axis 0.050 0.093 Type C 22 for axis 0.065 0.117 7-6-20 21 Accessory Bracket Series CQ2 Simple Joint: 32 to

Table of Contents

50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) Misc.

LX

pitch N x P U 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A Body mounting reference plane +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

V

Station 26 2~20 B 20 2~16 H 10 2~8 24VDC 12V 12 VDC * Mixed Porting Available by Special Order SUP/EXH B L O C K A S S E M B LY M O U N T I N G P O S I T I O N S U U Side 2 ~ 10 Stations D D Side 2 ~ 10 Stations B Both Sides 2 ~ 20 Stations *M Special Specifications (by Special Order) C O N N E C T O R M O U N T I N G P O S I T I O N U U Side D D Side V A LV E S TAT I O N S (BLANKING PLATE

ZP

M-5AU-6 D D C Width across flats 10 Model A B C D Vacuum inlet direction q Pad dia.

Smooth Cylinder/Low Speed Cylinder

L IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 8 10 10 14 18 22 16.2 20.2 36.2 44.2 56.2 64.2 Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis Type C 18 for axis Type C 22 for axis 1.5 1.55 1.55 2.05 2.55 2.55 0.9 1.15 1.15 1.15 1.35 1.35 7.6 9.6 9.6 13.4 17 21 21 25.6 41.6 50.6 64 72 20 to 63 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 Material

Air Slide Table

) Lr = 70 mm MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C 0.007 0.004 0.120 ST 10 to 30 ST 75 0.006 ST 75 0.100 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 40 0.003 0.005 ST 30 to 50 0.080 0.004 ST 50, 75 0.060 0.002 ST 50 0.003 ST 20 0.040 0.002 ST 40 0.001 ST 10 ST 10 to 30 0.020 0.001 ST 75 ST 10 to 30 0.000 0.000 0.000 0 5 10 15 0

LJ1H

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

CQ2

-015A NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 4 5 5 6 8 11 13 16 8 10 13 17 22 27 32 41 9.2 11.5 15.0 19.6 25.4 31.2 37.0 47.3 5 5 8 10 10 14 18 22 0.7 0.7 0.9 1.15 1.15 1.15 1.35 1.35 14.6 16.6 21 25.6 41.6 50.6 64 72 10.2 12.2 16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.5 1.5 1.55 1.55 2.05 2.55 2.55 For axis C shaped 5 For axis C shaped 8 For axis C shaped 10 For axis C shaped 10 For axis C shaped