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35 35 40 40 90 98 110 116.5 11 14 18 21 VXEZ2230 VXEZ2240 VXEZ2350 VXEZ2360 (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry Port size P Model L a b d e f g h i N.C.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

(PD) port (One-touch fitting: Applicable tubing O.D. 4) Common pilot pressure exhaust (PE) port (One-touch fitting: Applicable tubing O.D. 4) Release to the atmosphere. 13 (Pitch) P = 10 A B 0 A B 0 L1 L2 Vacuum release flow adjusting needle 8 Exhaust part 12.2 13.6 13.6 4 x M5 through (for mounting) 79 5.5 Vacuum pressure switch Suction filter 63.6 68.9 Note 2) 76.8 62.4 SMC SMC SMC V 90

Smooth Cylinder

CAT.ES20-178 A Smooth Cylinder Minimum 0.01 to 0.03 MPa operating pressure Minimum Minimum 0.01 to 0.03 MPa operating pressure 0.04 Minimum operating pressure MPa 12 16 0.03 20 25 32 40 0.02 50 63 80 100 0.01 0 0 10 20 30 40 60 50 70 80 90 100 Bore size mm (Measurement based on JIS B8377) Series CQSY/CQ2Y/CM2Y/CG1Y/CA2Y 12 to 25 32 to 100 20 to 40 20 to 100 40 to 100 Stable operation possible

Membrane Air Dryer

Max. 59 mm Shortened by 40 minutes saving performance Reduced purge IDG90 Series IDG

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Switching element OFF Push-turn locking slotted type [D type] While pressing, turn in the direction of the arrow (90 clockwise). If it is not turned, it can be operated the same way as the non-locking type.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Nil W 2-5-5 Base Mounted Series VQ4000 Plug-in Type Conduit terminal 2 position single: VQ410 0 1 23.5 23.5 50 158 50 90 108 158 Indicator light 11(12.5) 11(12.5) 5 3 2(B) port 4(A) port 9 4 2 38 48 10.5 1 11 A B 38 24.6 48 4 2 A 13.5 13.5 30 45 2-5.6 Mounting hole 14 5 1 3 12 30 45 2-5.6 Mounting hole 5-Rc 1/4, 3/8 (5(R1), 3(R2) port Rc 1/4) Manual override Bottom ported drawing 27 4(A),

Magnet: D (Switch Unit), Body Size: 1, Rotation Angle: 90 (Rotation Angle 90), Vane Type: S (Single), Port: Side, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M

Magnet: D (Switch Unit), Body Size: 3, Rotation Angle: 90 (Rotation Angle 90), Vane Type: S (Single), Port: Side, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M

Magnet: D (Switch Unit), Body Size: 3, Rotation Angle: 90 (Rotation Angle 90), Vane Type: S (Single), Port: Side, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Switch Unit), Body Size: 1, Rotation Angle: 90 (Rotation Angle 90), Vane Type: D (Double), Port: Side, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Switch Unit), Body Size: 3, Rotation Angle: 90 (Rotation Angle 90), Vane Type: D (Double), Port: Side, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Switch Unit), Body Size: 3, Rotation Angle: 90 (Rotation Angle 90), Vane Type: D (Double), Port: Side, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M

Magnet: D (Switch Unit), Body Size: 3, Rotation Angle: 90 (Rotation Angle 90), Vane Type: S (Single), Port: Side, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M, Lead Wire or Prewired Connector: Z (5m)

Magnet: D (Switch Unit), Body Size: 1, Rotation Angle: 90 (Rotation Angle 90), Vane Type: D (Double), Port: Side, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M, Lead Wire or Prewired Connector: Z (5m)

Magnet: D (Switch Unit), Body Size: 1, Rotation Angle: 90 (Rotation Angle 90), Vane Type: D (Double), Port: Side, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M

Magnet: D (Switch Unit), Body Size: 1, Rotation Angle: 90 (Rotation Angle 90), Vane Type: D (Double), Port: Side, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc)

Magnet: D (Switch Unit), Body Size: 3, Rotation Angle: 90 (Rotation Angle 90), Vane Type: D (Double), Port: Side, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc)

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

90%RH or less (non-condensing) Ambience Indoors (no direct sunlight) Free from corrosive gas, flammable gas, oil mist, dust and dirt Altitude Max. 1000m (3280 ft) above sea level LECS-S5 (Note) Vibration [m/s2] 5.9 or less LECS-S7 X Y: 49 LECS-S8 series Securely attach the servo motor to the machine.

OMR0032

10100ms Reset processing time Reset processing time 300ms 450ms ON ON 150ms 150ms Reset signal Reset signal 10100ms 300ms 90 - 16. Alarm Detection It is possible to check the type of an alarm by a combination of the ALM and PWR LEDs on or flashing.

SI Unit for Vacuum Manifold

Pressure/Hysteresis parameter failure status (Index 90) Table 3-25.