HAW

Accessory (Option) Basic size Symbol Description Nil Applicable air compressor kW Symbol F With screw flange Screw type Reciprocating type D With auto drain Port size 2 2.2 7.5 7 Caution on Design HAW2 Size Applicable model 04 Symbol Rc 06 14 20 30 22 37 55 75 22 37 55 75 110 15 22 37 55 75 1 2 Rc 3 4 Rc 1 1 2 Rc 2 Warning HAW7 HAW22, 37 HAW55, 75 HAW110 1.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Blanking plate assembly D side SX3000-75-1A Connector box mounting position 10-SS5Y3-45-AU-05D-C6 1 set (Type 45, 5-station manifold base part no.) SX3000-75-1A 1 set (Blanking plate assembly part no.) 10-SY3140-5LOU 2 sets (Single solenoid part no.) 10-SY3240-5LOU 2 sets (Double solenoid part no.)

CG5-S

(Same side) A HS Number of switches 20 25 32 40 50 63 80 100 31.5 26 24 Mounting surface Port surface Port surface Port surface 31.5 28.5 24 32.5 33 25 37 36.5 28 45.5 42 36 45.5 48.5 36 Switch type 56 57.5 46 Minimum stroke (mm) 10 15 75 57 68 46 15

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

80 85 90 50 55 60 65 70 75 80 85 90 95 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L

NCA1

0.62 1 5 3/4 1.71 3 5/8 2.36 4.75 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 3/8 3/4 1/2 1/2 9/16 5/16-24 2.5 0.3 3/8 3/8 1.26 1.06 0.62 .75 0.62 1 5 3/4 1.71 3 5/8 2.4 4.75 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 3/8 3/4 1/2 1/2 9/16 5/16-24 3 0 3/8 3/8 1.30 1.06 0.62 .75 0.62 1 5 7/8 1.75 3 3/4 2.48 4.88 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1/2 1 1/4 3/4 5/8 7/8 3/8-24 3.75 0 1/2 5/8 1.57 1.18 1.05

Series HAW Water Cooled Aftercooler 1

Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

Guide Table Series MGF ø40, ø63, ø100 1

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

IP8001 Series

-Check the piping, and stop Large air consumption the leakage. 75-Air is leaking from the positioner. -Replace the pilot valve unit. (due to a seating failure of the pilot valve. ) 75-Others. -Contact SMC representatives. Automatic calibration -The angle of the feedback lever is -Refer to 2.

Soft Start-up Valve

-1 to 4G(Z)-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV2000-02-5 to 6G(Z)-A AV3000-03-1 to 4G(Z)-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV3000-03-5 to 6G(Z)-A AV4000-04-1 to 4G(Z)-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV4000-04-5 to 6G(Z)-A AV5000-06,10-1 to 4G(Z)-A 70 75

Filter Regulator

maintenance Clearance for Dimensions Optional specifications Standard specifications Model Digital pressure Square embedded ty pe switch pressure gauge P1 A B C D E F G K J J AW20-D 1/8, 1/4 40 87.6 71.8 26 M281 40 5 28 27 27.8 37.5 AW30-D 1/4, 3/8 53 115.3 86.5 31.5 30 M381.5 55 3.5 28 32.5 27.8 43 AW40-D 1/4, 3/8, 1/2 70 147.1 91.5 40.5 38.4 M421.5 80 0 28 41.5 27.8 52 AW40-06-D 3/4 75

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

force (N) 0.4 MPa 0.4 MPa 75 75 External grip 0.3 MPa 0.3 MPa 50 50 0.2 MPa 0.2 MPa F 25 25 0.1 MPa 0.1 MPa 0 0 10 10 20 20 30 30 40 40 50 50 Gripping point L (mm) Gripping point L (mm) F F MHS4-50D MHS4-50D 200 200 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 150 150 Gripping force (N) Gripping force (N) F 0.4 MPa 0.4 MPa Internal grip 100 100 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 50 50

Series CE1

7 NBR Valve retainer seal #7 * Since ther is a possibility of improper operation, contact SMC regarding the replacement of seals. 4.4-9 Series CE1 Dimensions 12, 20 Both ends tapped CE1B Bore size Stroke (mm) A B C D E G H I K L M Bore (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 X 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5

Series CQ2

switches No protrusion from cylinder body Can be mounted on four sides CS1 1in = 25.4mm CQ2 Overall length mm Weight kg (lb) Series 180 219 16.6 (36.6) CQ2 200 226 20.6 (45.4) 180 30.4 (67.0) 385 CS1 200 39.5 (87.1) 390 Comparison with 100mm stroke and rod end male threads Variations Applicable auto switch models Rod end configuration Standard strokes Size Type Action Series 10 20 30 40 50 75

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

85.5 156.5 169.5 200 210.5 167 180 200 210.5 177.5 190.5 212.5 223 188 201 225 235.5 198.5 211.5 237.5 248 209 222 250 260.5 219.5 232.5 262.5 273 83 96 125 135.5 93.5 106.5 137.5 148 104 117 137.5 148 114.5 127.5 150 160.5 125 138 162.5 173 135.5 148.5 175 185.5 146 159 187.5 198 30.5 43.5 75 85.5 62 75 100 110.5 72.5 85.5 112.5 123 51.5 64.5 87.5 98 L1 L2 L3 L4 4-14-36 37 Base Mounted

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

85.5 30.5 43.5 75 85.5 62 75 100 110.5 72.5 85.5 112.5 123 83 96 125 135.5 93.5 106.5 137.5 148 104 117 137.5 148 114.5 127.5 150 160.5 125 138 162.5 173 135.5 148.5 175 185.5 146 159 187.5 198 156.5 169.5 200 210.5 167 180 200 210.5 177.5 190.5 212.5 223 188 201 225 235.5 198.5 211.5 237.5 248 209 222 250 260.5 219.5 232.5 262.5 273 51.5 64.5 87.5 98 L1 L2 L3 L4 4-14-14 15 Body Ported 3

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

position 0.1 MPa (A) 4 (B) 2 Ambient and fluid temperature Lubrication Manual override Impact resistance/ Vibration resistance Enclosure Rated coil voltage 10 to 60C (1) VK None Push type (Tool required) 1 (P) 5 (R1) 3 (R2) VZ 2 position double (rubber) 150/50 m/s2 (2) (A) 4 (B) 2 VF IP65 (Dust/Splashproof type) 12 VDC, 24 VDC 15 to +10% of rated voltage Equivalent to Class B 1.8 W DC (75

KJ

Lock 15-2-75 4 Series KK Plug (P) Socket (S) Part no. Male thread type Male thread type Body size Port size Part no.

Plate Cylinder

Optimum operating position D-M9A(V) D-M9W(V) Series Variations Standard stroke (mm) Rod end configuration Action Type Size 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 Single rod 25 32 Double acting 40 Double rod 50 Male thread, Female thread 63 Spring return, Spring extend 25 32 Single acting 40 50 63 Features 1 Series MU Rod End Allowable Load Y axis X axis In case of a plate

Vacuum Module Series ZX

(mm) Stations Symbol 7 180 192 197 8 5 138 150 155 6 159 171 176 3 96 108 113 4 117 129 134 1 54 66 71 2 75 87 92 L1 33 45 50 L2 L3 900 Ejector System Series ZX Vacuum Module: ZA Circuit diagram ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ + + + + AMV AEP Vacuum port (V) M5 (or M6) HEP Related Equipment 10.7 V V 22.5 21 4.2 901 Vacuum Module: Vacuum Pump System Series ZX [Option] How