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Range Back Pressure SMC 22 8.0 -750mmHg~58psi 0~100C 0~30psi (60psi) 136 150 75 Height Width Operator Dia. 1 LVQ60 LQ Seal Locations N u t S e a l L o c k T ubing Support T aper Surface T u b i n g T r ap e zoidal T h re a d s I n s e rt Bushing Nut Lock U.S. Patent #5,996,636 Quadruple Seal Maximum leak protection. Up to 215psi @ 200C.

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Be sure to loosen the locknut before adjusting the knob by hand. r After adjustment, tighten lock screw for tamper proof operation, Fluid-Air/Supply 1 05psig (7 kgt / cm2l NSR 1110 to-32^lrn {l',151 NSR 3110 NSR 4110 %tlPf 75 75 g q 6 0 il IJ I 6 a 60 d 5 F "ff 45 * 3 0 d 30 1 5 0 o o 7 1 4 2 1 2 A 3 FWSSM P r e ssur e C -lwr a ct eri st i e s Supply pressure 1OOpsig (7kgt/cm2l, Secondary

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

D-A9V/M9V/M9WV/M9A(V) types cannot be mounted. Caution Since there are other applicable auto switches than listed, refer to page 388 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785. D-A9/M9/M9W auto switches are shipped together (not assembled). (Only switch mounting brackets are assembled at the time of shipment.)

JIS Standard Compact Hydraulic Cylinder

Consult with SMC regarding water resistant type for foot type. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW Solid state auto switches marked are produced upon receipt of order.

CLG1

K ML1C 25, 50, 75, 100, 125, 150, 200 201 to 350 D25 32 40 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200, 250, 300 -X Intermediate stroke is available, too.

RLQ

RLQ Symbol Standard Stroke MLU W MLGP Bore size (mm) Standard stroke (mm) 20, 25, 30, 40, 50, 75, 100 30, 40, 50, 75, 100 32, 40 50, 63 ML1C Manufacture of Intermediate Stroke W Retraction locking Without bypass pipe Extension locking Without bypass pipe Method Ordering Description Exclusive body Please refer to How to Order for standard part no. (page 844).

IDX-OM-W026

314 IDF55E, IDF75E Guige Guige 10 (10, 1m 1m) 4-13 17 (911)[] mm A B C D E F G H J K L M N P Q R IDF55E 800 (868) IDF75E 900 (968) 526 (250) 5195 13 500 75 7001 (455) (110) 36 50 R2 470 855 (128) IDF Series 6-3 6 2 IDX-OM-W026 6 6-4 IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-30 GFCI GFCI R GFCI R R L1 L3 L2 PE TB N PE L TB PRR ILS THR ILS MC THR MC MC PRR CM C01 MC OLR OLP1 CM OLP2 C11

IDX-OM-W029

1ANR 2065% 2 330mA 4() IDU Series 6-1 6 1 IDX-OM-W029 6 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) 6-3 IDU22E75E A B (G) (D) E (F) C (10, (10 1m) 1m) J K L2 N1 M P 13 4x H (911)[] 911)[] mm A B C D E F G H J K L M N P IDU22E R1 325 775 1153 93 445 1235 279 353 600 379 46 85 IDU37E

IDX-OM-U010

Note 2: Air flow capacity converted by the compressor intake condition [32C, atmospheric pressure, and 75% relative humidity]. Note 3: Do not use this product with continuous voltage fluctuations. Note 4: These values are reference values under rated conditions and are not guaranteed. Do not use these values for the thermal set values, etc.

AMX-OM-Q015E

If they enter the inside of products, they could cause products to malfunction, lower performance or damage the element. d.

Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

Consult with SMC regarding water resistant types with the above model numbers. 21 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order. For D-P3DWA, 32 to 63 are available.

Digital Flow Switch Series PFA For Air Series PFW For Water

E F G H I J A Model Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow

Lightweight and Compact

-phase 380 to 415 VAC (50/60 Hz) Allowable voltage range 10% (No continuous voltage fluctuation) Electrical system Applicable earth leakage breaker (Standard) Rated current A 30 20 Sensitivity of leak current mA 30 Rated operating current 50/60 Hz5 A 16/18 8.4/9.1 Rated power consumption 50/60 Hz5 kW (kVA) 4.3/5.4 (5.5/6.0) 4.4/5.6 (5.8/6.3) Noise level (Front 1 m/Height 1 m)5 dB (A) 73 75

Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

Safety Instructions

2) Applications: Food, semiconductor, medical, automobile and machine tools fields LQ 20C 100C 200C 260C Recommended radius Refraction value 1.6 0.9 0.45 0.23 15 8 0.9 0.5 0.25 0.15 45 31 0.9 0.5 0.25 0.15 55 35 0.9 0.5 0.25 0.15 75 41 1.4 0.7 0.35 0.2 25 16 Max. operating pressure (MPa) MQR Compatible with the Food Sanitation Law Compatible with the test conforming to the Food Sanitation

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

TEL: 317-899-4440 FAX: 317-899-3102 GERMANY SMC Pneumatik GmbH Boschring 13-15 D-63329 Egelsbach, Germany TEL: 06103-4020 FAX: 06103-402139 CANADA SMC Pneumatics (Canada) Ltd. 6768 Financial Drive Mississauga, Ontario, L5N 7J6 Canada TEL: 905-812-0400 FAX: 905-812-8686 ITALY SMC Italia S.p.A.

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

Guide Table Series MGF ø 40, ø 63, ø 100

Guide Table Bore size/ Standard stroke (mm) Number of auto switches 40 63 100 30, 50, 75, 100 30, 50, 75, 100 30, 50, 75, 100 2 pcs. 1 pc. "n" pcs. Nil S n Auto switch Nil Without auto switch (Built-in magnet) Select applicable auto switches from the table below. Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.

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Precision measuring equipment (3-D measuring machines) Semiconductor manufacturing equipment Semiconductor inspection equipment Dental equipment Chemical analysis equipment Ozonizers, Hydrogen gas generating equipment Air (oxygen, nitrogen, etc.)