EX120/121/122

Integrated Type/For Output Series EX120/121/122 Series EX120 Series EX121 Series EX122 SV1000/2000/3000/4000 SY3000/5000 SY3000/5000 D D D D D D VQ1000/2000 How to Order SI Unit DN1 EX12 S 0 Valve interface Dustproof 0 1 2 Nil -XP Plug-in Non-dustproof Flat ribbon cable DIN rail mounting Dustproof Plug-in DIN rail mounting Note) XP is not available for DN1 and DN1-X26.

High-Precision Digital Pressure Switch

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 7 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20

60

D-DN

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

Power Valve: Economy Valve Series VEX5

Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800

ASR

) L6 L8 Note 4) A2 M L7 L4 A1 Note 4) Weight (g) Note 5) Note 1) d D3 MAX.

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ECC-PNAL-20MT-D ECC-PNAL-20MR-D ECC-PNAL-20MR-A ECC-PNAL-10MT-D ECC-PNAL-10MR-D ECC-PNAL-10MR-A ECC-PNAL-6MR-A Please Note: 1) All PneuAlphas need to be connected to a power supply. 4/2 : 6/4 : 12/8 suitable to their rated voltage specifications. 2) Stand alone controllers can be programmed from the 8 front panel function keys. 3) All Pneu Alpha controllers have a CD-ROM supplied giving

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

Thermo-dryer

A D A D Data symbol Correction factor Data symbol Correction factor Condition Condition A A Inlet air temperature Inlet air temperature 68F (20C) 1.36 86F (30C) 1.11 Ambient temperature Ambient temperature 77F (25C) 1.07 86F (30C) 1.00 B B C C Outlet air pressure dew point Outlet air pressure dew point 37.4F (3C) 0.50 41F (5C) 0.67 Inlet air pressure Inlet air pressure D F D F 145psi (1 MPa

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

BM2-032 BM2-040 D-C7, D-C8, D-H7 D-B5, D-B6, D-G5 D-A3A, D-A44A, D-G39A, D-K39A BM2-020 BM2-025 BA2-032 BA2-040 BA2-020 BA2-025 BM3-032 BM3-040 BM3-020 BM3-025 Caution Mounting Type and Accessories 1. Be careful of the snap ring springing out. When replacing the rod seal, take care that the snap ring does not spring out while you are removing it.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

d C C B H B H Material: Carbon steel Material: Carbon steel Part no.

Rotary Table

Recommended tightening torque Auto switch model Recommended tightening torque [Nm] D-M9 0.05 to 0.15 D-M9A (Water resistant) 0.05 to 0.10 Fig. 8 D-F8 0.10 to 0.20 Set screw Auto switch 29 - Auto switch proper mounting position at rotation end Table 11 Auto Switch Rotation range / Actuation / most sensitive position A A A A B B B B D-M9 D-F8 Magnet Operation range at optimum set position (

EtherNet/IP TM Compatible Fieldbus System

Position code (Order #1 #4, Port A D) Message code #4 #3 #2 #1 D C B A 0 0 1 0 0 0 0 1 0 0 0 1 Message code 0x2 Product No.1 A port Ex.: Short-circuit or over current error with the first slave of COM A port. Message code and corrective action for diagnostic error are shown below.

ASR

Note3) L6 L8 Note 4) A2 M L7 L4 A1 Note 4) Weight (g) Note 5) Note 1) d D3 MAX.

3 Port Solenoid Valve Series VQ100 1

Enter in order starting from the first station on the D side.

3 Port Solenoid Valve Series VQ100

Enter in order starting from the first station on the D side.

3 Port Solenoid Valve Series VQ100 1

Enter in order starting from the first station on the D side.

XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

PROFINET Compatible Fieldbus System

NOTE The parameter for output modules takes priority over the system parameter [IO communication on port diagnostic (COM A-D)].