Thermoelectric Bath

W Water-cooled Radiating method 10 5.1 in (130 mm) x H7.1 in (180 mm) Liquid tank size Communication A B RS-485 RS-232C Liquid tank W HEB C H 10 002 C Round Shape of bath Option Nil N Rc1/4 NPT1/4 002 140 W Cooling capacity The option should be specified when ordering.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

3

Output specifications Symbol OUT1 OUT2 A NPN NPN B PNP PNP C NPN Analog (1 to 5 V) D NPN Analog (4 to 20 mA) E Note 2) PNP Analog (1 to 5 V) F Note 2) PNP Analog (4 to 20 mA) G Note 2) NPN External input Note 3) Unit specifications Nil Unit selection function Note 5) M SI unit only Note 6) Note 5) Since the unit for Japan is fixed to SI due to new measurement law, this option is for overseas

INFORMATION Step Motor Controller 5 types of communication protocols New New

Example: LEFS16B-100B-R1C917 1 D T 7 C Compatible actuators Electric Actuator/Rod LEY Series Electric Actuator/Guide Rod LEYG Series Electric Actuator/Slider LEF Series Electric Slide Table LES/LESH Series Electric Rotary Table LER Series Electric Actuator/Guide Rod Slider LEL Series Electric Actuator/Miniature LEPY/LEPS Series Electric Gripper LEH Series Electric Actuator/Low-Profile Slider

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

(For band mounting, only the auto switch mounting brackets are assembled before shipment.) * When mounting a band on bore size 8, 10, or 12, the D-A9l(V) cannot be mounted. * When mounting a rail on bore size 8, 10, or 12, the D-A9l(V) and A79W cannot be mounted. * When mounting a rail on bore size 20 or 25, the D-M9l(V), M9lW(V), and M9lA(V) cannot be mounted. 2 C85 Series Specications Bore

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

Digital Flow Switch (Remote type monitor unit)

C: Contents revised in several places. [September 2016] D: Contents are added. [February 2017] E: Contents revised in several places.[March 2018] F: Contents revised in several places.

e-Rodless Actuator

Auto Switch Specifications Grommet PLC: Abbreviation for Programmable Logic Controller D-F9W/D-F9WV (with indicator light) D-F9PW D-F9PWV D-F9BW D-F9BWV D-F9NW D-F9NWV Auto switch part no.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

D-A9V/M9V/M9WV/M9A(V) types cannot be mounted. Caution Since there are other applicable auto switches than listed, refer to page 388 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785. D-A9/M9/M9W auto switches are shipped together (not assembled). (Only switch mounting brackets are assembled at the time of shipment.)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Standard, Bore Size: 250 (2 1/2"), Stroke: 250 (2 1/2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Standard, Bore Size: 250 (2 1/2"), Stroke: 250 (2 1/2"), Body Option: C (Rubber Bumper)

In-line Air Filter

[C] 0 to 60 0.0 0 10 20 30 40 50 60 Filtration [m] 5 (Filtration efficiency 95%) Operating temperature [C] Element replacement differential pressure [MPa] 0.1 (Vacuum pressure 20 kPa) Filtration area [mm2] 140 470 750 1260 Applicable tubing material Nylon, Soft nylon, Polyurethane Weight [g] 2.5 4.5 10.5 20.0 25.0 Internal capacity [cm3] 0.5 1.7 4.5 6.0 7.0 Total length [mm] 45.0 60.5 53.9

Low Profile Slide Table Series MXF

Body tapped Model DReed auto switch D-A9, D-A9V 10 20 30 50 75 100 -X MXF8 8 Solid state auto switch D-M9, D-M9V MXF12 12 Individual -X 2-color indication solid state auto switch D-M9W, D-M9WV MXF16 16 MXF20 20 133 Series MXF Model Selection Model Selection Step Formula/Data Selection Example Operating Conditions 1 Cylinder: MXF20-50 Cushion: Rubber bumper Workpiece table mounting Mounting

Digital Flow Switches

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

AMX-OM-Q018E

Remove water droplets from the inlet air Water droplets in the air can lower performance and cause malfunction. c. Large quantities of dust (solid foreign matter) are contained in the supply air. When there are large quantities of dust (solid foreign matter), install an air filter or main line filter to the inlet side of the mist separator. d.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 9 Direct Operated Precision Regulator/Modular Style Series ARP20/30/40 Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K V P2 Pressure gauge port size B R Bleed port F S D U N Bracket (Option) J M T Panel fitting dimension Y The dimensions for special applications (not including

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 9 Direct Operated Precision Regulator/Modular Style Series ARP20/30/40 Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K V P2 Pressure gauge port size B R Bleed port F S D U N Bracket (Option) J M T Panel fitting dimension Y The dimensions for special applications (not including