High Vacuum L Type Valve

Note 1) Heat transfer sheet to seat only size 25.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

Note 2) Contact P/A regarding manifold type.

ZR

25 Series ZR Ejector exhaust Ejector air supply P port Vacuum pad connection V port Ejector System without Valve Circuit diagram Vacuum switch Silencer Ejector Nozzle dia./1.0, 1.3, 1.5 mm Suction filter ZR1 1-E 10 13 15 2 Slotted holes (Mounting holes) Spacer A 1 Indicator lilght (Red) Vacuum pressure setting trimmer Ejector indication 2 2 2 1 1 Thickness 1.2 Spacer A is used to leave space

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

H/DL/L/LL

Male elbow Bulkhead union K P. 62 DL P. 63 DE Use to pipe at right angles to female thread. Most general style. Use to connect tubes through a panel. M H D Union tee Bulkhead connector Use to connect male thead and tube through a panel. P. 62 DT P. 63 DEF MS Use to connect tubes in both 90 directions.

ZL3-OM00601

Exhaust Characteristics,Flow Characteristics, And Time required to reach the specified vacuum 25 11.1. Exhaust Characteristics 25 11.2. Flow Characteristics 26 11.3. Time required to reach the specified vacuum 26 12. Handling Precautions 27 13. Trouble shooting 28 1 - Doc.

PSxx-OMM0006CN

No.PS-OMM0006CN-E // ZSE40A(F) ISE40A 2 9 12 13 16 16 18 20 23 23 25 25 25 F0 27 F1 OUT1 28 F2 OUT2 31 F3 33 F4 34 F5 / 36 F6 38 F11 39 F80 40 F81 41 42 F90 42 F97 44 F98 46 F99 48 49 52 52 53 60 60 63 -1No.PS-OMM0006CN-E (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Digital Flow Switch (Integrated display type) ( compatible)

Indicator light Output 1 and 2: Orange Power supply Used as switch output device 12 to 24 VDC, including ripple (p-p) 10% voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Current consumption 50 mA max.

Compact Rotary Actuator

p e r I n s t a l l p o s i t i o n o f e x t e r n a l s t o p p e r C auti on on usi ng exte rnal stoppe r R o t a r y a c t u a t o r w i t h A u t o s w i t c h A u t o s w i t c h s p e c i f i c a t i o n A u t o s w i t c h i n s t a l l a t i o n A u t o s w i t c h s e t p o s i t i o n I n t e r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l e C u

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

LEF-OM006xx

- ) P.31 5.1 1. 2.

Membrane Air Dryer

: P IDG-EL75LA IDG100LA,100SA Option : P IDG-EL100LA -5- 4.

High Vacuum L Type Valve

Note) For XLA-16/25, mount the washer in the orientation that the groove of the washer faces to the valve seal 2.

Process Valve Series VNA

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 75 125.5 52 63 72.5 80.5 80 84.5 124 144.5 26 24.3 2.3 55 42 4.5 25 28 34 14 60.5 73 1 84 100 92 108 135.5 137 153 156 172 84 90 62 72 80 90 89 95 93.5 99.5 31 36 28.3 33.3 2.3 2.3 50 60 5.5 6.5 30 35 35 40 43 49 17.5 20 151.5 Port

Compact Hydraulic Cylinder Series CH
KGB

Standard Strokes Bore sizes (mm) Standard strokes (mm) 20 & 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75 40, 50, 63, 80, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Made to Order Pages 22 to 24 Manufacture of Intermediate Stroke Cylinders Hydraulic Fluid Compatibility Intermediate strokes in 5mm increments can be manufactured by installing spacers

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Rod end nut 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Clevis pin 50 Standard Locking release bolt (N type only) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 Single knuckle joint 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 80 Double knuckle joint (with pin) Option 100 25, 50, 75, 100, 125, 150,

2/3 Port Valve for Various

(25% ) Gas oil Silicon oil Fuel oil (up to 60C) Fuel oil (up to 100C) B PTFE EPDM Brass or BC6, Copper Note 2) FKM EPDM FKM NBR FKM EPDM PTFE FKM FKM EPDM PTFE(FKM) PTFE(FKM) NBR FKM Stainless steel H Note 1) Steam system (Steam) S Q Steam system (Boiler water) Steam system (Condensate) Insulation oil Parachloroetylene Brake oil Water (up to 99C) G, J E P A H A H B J E N, P B Polyacetal

Multi-channel Digital Sensor Monitor ( compatible)

Refer to the table for each pressure specification (page 110) Display/set pressure range Display/min. setting unit Power supply Used as switch output device 12 to 24 VDC (10%), and voltage ripple (p-p) 10% at max. voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Electric spec. Power supply voltage 12 to 24 VDC (10%), and ripple (p-p) 10% at max.

DOC1023126

Applicable stroke table Stroke [mm] Size 30 50 100 150 200 250 300 350 400 450 500 Manufacturable stroke range 25 15 to 400 32 20 to 500 25 - .

LA-OMP0023

A B C D E F G H LAT3-10 10 49 4 60 50 4 10.5 LAT3-20 20 69 6 25 90 80 14 20.5 LAT3-30 30 89 6 25 120 110 24 30.5 13 - LAT3-50 Note 1) Refer to Mounting screw specifications and tightening torques in section 4.3 Mounting (P.24). Note 2) The length of the part of the dowel pin inserted into the positioning hole should be shorter than the specified depth.