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Compression nut design resists side loading Nut Seal lock F Seal lock E B Tubing support C D A Tubing Taper surface Tube support resists crimping and deformation of tubing.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

PSE550/300

kPa 100 kPa 100kPa to 100 kPa 1 MPa 0 0 to 1 MPa For positive pressure 500 kPa 0 0 to 500 kPa C D Range Rated differential pressure range 1 4 For low differential pressure 0 to 2 kPa 2 kPa 0 A C B D Pressure Differential pressure Pressure Differential pressure A C B D 16-3-37 6 Series PSE300 Internal Circuit PSE300 NPN open collector output (2 outputs), Max. 30 V or 80 mA, residual voltage

PFxx-OMY0005

Accumulated flow is selected: Refer to page 41 c. Accumulated pulse output is selected: Refer to page 42 d. Error output is selected: Refer to page 43 e. Output OFF is selected: Refer to page 43 Press the SET button to set. Return to function selection mode.

MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !

Economy Valve

Varistor DIN connector B1B09-2A6(standard) Neon bulb When 100 VDC or more Coil When 24 VDC or less Varistor Coil Fig. 1 7 No.VEX-OMA0019-C VEX5 Series Specific Product precautions 2 Be sure to read this before handling.

I/O Configurator (NFC version)

Changed wireless units names to Base and Remote. 2.6.0 -123No.EX-OMV0017-C Revision history A: Contents revised in several places. [August 2018] B: Contents are added. [August 2018] C: Contents revised in several places.

VXA21/22

D E F With bracket G H I J VXA21 VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 1 4 3 8 10 1 8 1 4 VX 11.5 VNl Dimensions (Orifice size 8mm, 10mm) VXA225m, VXA226m VQ Thread fixed: (VXA226 2 0 -04 0nly) Bracket E Port size Rc(PT) Model A B C D VXA22 52 60 02 03 , 1 4 3 8 22 11 67 77 27 VXA226 -04 2 0 1 2 28 14.5 73 83 30 Fixing with thread is also possible. 4.1-61 VVXA21

HRX-OM-W004

This can be changed by the operation display panel. c) Function Command is assigned. d) Data Depending on the function, the address and the number of the register, the value of reading/writing are assigned. e) CRC CRC method.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

180

Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

Plug-in Unit

N.O. 4 position dual 3 port valve (C) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.C.

MHK2

-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9

MHK2

-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9

Fieldbus system PROFINET compatible SI Unit

. -8No.EX-OMY0027 Definition and terminology Terminology Definition 100 100BASE-TX Standard of LAN transmission line with communication speed of 100 Mbps. C Current consumption The current necessary to operate each unit. D DIN rail A metal rail conforming with DIN (German) standard. D Side The side connected to the end plate when the product is connected to a manifold.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

bolt B at ot ot (For clockwise rotation end adjustment) 5 5 r r 9 se 9 e e is e wi g w g n n k k ra oc c a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m

Low Differential Pressure Sensor

connector) ZS-28-C L C Note) The cable is unassembled in the factory, but is included with the shipment.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

4 4 D-M9mA Note 2) D-M9mAV Note 2) BJ6-010S (A set of a, b, d, e) BJ6-016S (A set of a, b, d, e) D-H7C 8 9 D-M9m/M9mV D-M9mW/M9mWV D-M9mA/M9mAV 3 3.5 Switch bracket (Resin) Transparent (Nylon) Note 1) Band mounting c e Smooth Cylinders Low Speed Cylinders White (PBT) D-A9m/A9mV 6 6.5 Rail mounting D-A7m/A80/A7H/A80H D-A73C/A80C 8 9 d Switch holder (Zinc die-casted) b D-A79W 11 13 Auto switch

Compact Cylinder with Solenoid Valve/

C Example) Bolt M5 x 45L: 4 pcs.

Peltier-type Chiller Thermo-con/ Compact Type

100 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the cooling capacity decreases by approx. 20 W.