Manifold Specifications

Flow Characteristics Port size Manifold b Cv b Cv Flow characteristics C [dm 3/(sbar)] C [dm 3/(sbar)] 1 4/2 (P A/B) 4/2 5/3 (A/B R) 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-45 C10 C10 1.5 2.1 0.31 0.26 0.38 0.51 2.2 2.2 0.17 0.15 0.52 0.52 C6 C8 VZ54 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold Instruct by specifying the valves and blanking plate

90

Refer to Fig.1 ) 3) Remove the junction box B (top) for all stations using a precision screwdriver. (Refer to Fig.2 ) (Remove the junction box B from D side.) 4) Remove all connectors mounted to the junction box B.

Title not found

See RLTexamples on opposite page, line 30. 45 45 15 32 3 8 3 8 3 8 1 4 1 4 1 49/64 5 16 Hex 43/64 43/64 43/64 5 16 Hex 34 1/16 LT2 1/2 1/16 LT2 1/16 LT3 1/16 LT1 1/16 LB3-45 1/16 LB6-45 Tees: 1/16 NPT Male to Tube Note: Also available as Reducing Tee combinations similar to the example below 15/16 1 2 3 8 3/4 #4 #2 17/32 19/32 Typ. 3/4 1 1/16 5 16 Hex Typ. 1 3/4 17/32 Typ. 19/32

Electric Rotary Table

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Compact Manifold Regulator Series ARM5

End plate ass'y 1 pc. 2500 3000 A B 146 Return to Menu Specialty Regulators NARM Series Regulator for Manifold NARM2500, 3000 P Dimensions Symbol A B C D E F G H I J K L M N O P Model NARM2500 .24 .67 1.73 2.20 1.65 4.98 2.28 1.77 .67 .83 1.50 1.65 1.14 1.89 2.68 1.32 (6) (17) (44) (56) (42) (126.5) (58) (45) (17) (21) (38) (42) (29) (48) (68) (33.5) NARM3000 .28 .83 2.13 2.68 2.17 6.04

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

DC Specification Temperature rise (C) Note) Temperature rise (C) Note) Model Power consumption (W) 45 45 60 Model Power consumption (W) 45 45 60 VX21 VX22 VX23 VX21 VX22 VX23 4.5 7 10.5 4.5 7 10.5 AC Specification AC Specification Apparent power (VA) Holding 19 16 43 35 62 52 Apparent power (VA) Holding 22 18 46 38 64 54 Temperature rise (C) Note) Temperature rise (C) Note) Model Model Inrush

180° Angular Style Air Gripper Series MHY2/MHW2

Calculate the moment of inertia for A and B separately as shown in the figures on the right. A part B part Procedure Calculation Calculation example 1. Check the operating conditions, dimensions of attachment, etc. Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

reduces flow setting time

Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Auto switches / Proper mounting position for stroke end detection Electrical entry direction: Inward Electrical entry direction: Outward B D C A (mm) D-Z73 D-Y59A,D-Y59B A B C D Bore size D 0.5 4 0.5 3 5 5 C 16.5 23 34 46 46.5 56 6 20.5 27 38 50 50.5 60 -1 2.5 -1 1.5 3.5 3.5 32 15 21.5 32.5 44.5 45 54.5 4.5 8 4.5 7 8.5 9 10 15 20 25 Note 1) The above mentioned values are indicated as a guide

Series IDG

Accessories Nil B None (standard) With bracket Note) When symbol B is indicated, a bracket assembly with a part number shown in the table below is included as an accessory.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Max. 12 (Retraction end adjuster) 5H9 ( ) depth 5 +0.030 0 GA 6 HA 5H9 ( ) depth 5 +0.030 0 NN x M6 x 1 thread depth 12 A B 1 24 5.1 5.1 10.5 9.5 10.5 A B G (NN 1) x H H 21 9 21 9 A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18

0.5

30 30 16 IZF21/31 Series Dimensions IZF31-m-m 4 x M4 x 0.7, depth 6 (Female thread mounting) 2 x 3.5, depth 1 144 55 25 12.5 179 195 36.6 (10.5) 20 40 Bracket IZF31-m-mBmm 162 (144) 90 2 x 25 (195) 4 x 4.5 211.5 163 144 47 148 3 x 5.5 40 2 x 5.5 45 45 45 17 Fan Type Ionizer IZF21/31 Series Dimensions IZF21/31 IZF10/IZF10R Technical Data With automatic cleaning unit IZF21-m-mmSm IZF31-m-mmSm

Electric Actuator

With lock L 167 (B: With lock/207) A (Table traveling distance) Note 1) (60) (58) 37 Encoder cable (7) Stroke 2o1 (4) 50.8 45 35 6.7 Lock cable (4.5) Motor cable (6) 25.5 0 6H9 ( ) depth 4 +0.030 B 30 +0.030 0 6H9 ( ) depth 4 n x 5.5 11 114 64 200 E C x 200 (=D) 20 Note 1) Distance within which the table can move when it returns to origin.

AWG

Metal bowl B B B B B B Dimensions N.O.: Black B B N.C.: Gray O S 1/8 O 1/4 Width across flats 17 S 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 17 Standard specifications Accessory specifications Bracket mount Model Port size A B C D E G H J K M N P Q R AWG20K AWG30K AWG40K 1/8, 1/4 40 179 91 52 45 47 40 35 48 65 5.4 10.4 65 2.3 1/4, 3/8 53 223.5

LEF-OM002xx

300 400 500 600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PB B A B A B A N.C. N.O. Double acting Double acting With flow rate adjustment PA PA N.C. B A PB B A Double acting N.C. Double acting With by-pass PA PA N.C. PB B A B A Double acting N.C. Double acting With flow rate adjustment & by-pass PA PA N.C. PB B A B A Double acting N.C.

HRL

flow rate L/min 120 16 130 16 180 16 Maximum pump head m 50 49 55 49 68 49 Settable pressure range*5 MPa 0.10 to 0.50 0.10 to 0.49 0.10 to 0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum operating flow rate*6 L/min 20 2 25 2 40 2 Tank capacity L 42 7 42 7 60 7 Bypass circuit (With valve) Installed Electric conductivity setting range S/cm 0.5 to 45*9 0.5 to 45 0.5 to 45*9 0.5 to 45 0.5

MHZ

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.

MHZ

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.

Modular Type Regulators Series AR

V 33 45 50 W 34.5 41 AC21A AC31A AC41A * Without relief valve option ** With relief valve option mm AC-B A* 90 117 154 AA** 140 181 238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21B AC31B AC41B * Without relief valve option ** With relief valve option 2 Series AC21~41 F.R.L.