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Repet~ ion accuracy (standard) (reversed) 12 24VDC (Ripple 10% max.) Power supply Peak I Bottom hold function ConsumptIOn current 45mA max. Fau ~ display Indication: Red LED f lashes! LCD error code displayed .

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing OV printing OV 7150SZ Printed in Japan. D-DN

300 X40 0.4m 99.9% Element category Symbol Element J HEPO D Membrane Port size Port size Symbol (Rc) 03 3/8 04 1/2 06 3/4 8/12 FGX-OMZ0008 4.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved 1st printing August, 2003 D-YGA P-120 (YG) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller, One Touch, FLOW CONTROL, 10 lb

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing October, 2001 D-SMC.L.A. P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Note 1) How to Order Sub-plate Note 2) VQ4000 Note 3) Electrical entry Port size P S Plug-in conduit terminal Plug lead 02 03 Rc1/4 Rc3/8 Piping B Side piping Note 1) Bottom piping type is applicable to only Rc1/4. Refer to p.1.11-46 for thread standard.

Air Combination Air Filter + Regulator + Lubricator AC20-A to AC40-A JIS Symbol 2 1 L How to Order AC A 30 03 DG Option/Semi-standard:Selectoneeachforatom. Option/Attachment/Semi-standardsymbol:Whenmorethanone specificationisrequired,indicateinalphanumericorder.

Modular Adapter How to Order E210/310/410 Series AC-A AF-A AF-A E310 03 U AR-A Size AL-A Piping port size 210 310 410 Size 310 Port size Uni thread AW-A Symbol 410 210 01 02 03 04 1/8 1/4 3/8 1/2 AC-B Thread AF-A Uni thread U AF-A AR -A -B Specifications AL-A Model E210 E310 E410 AW -A -B Port size 3/8 1/4 1/4 1/4 3/8 1/2 1/8 AW Piping I.D. 10 8 8 8 10 12 6 AG Fluid Air Ambient and fluid

Note 10) For thread type NPT. This product is for overseas use only according to the new Measurement Law. (The SI unit type is provided for use in Japan.) (1) (3) (2) (1) (2) Note 1) Wall mount is not available for size 20 regulator with downward facing handle in B combination. Contact SMC when wall mount is needed.

D DIN terminal 3 8 3 8 DO DIN terminal (Without connector) 04 1 2 1 2 1 2 3 4 1 2 3 4 1 04 5 06 Body ported G Grommet (Lead wire length 300 mm) 10 1 1 1 H Grommet (Lead wire length 600 mm) 10 7 12 14 9 20 2 E Grommet terminal 1 4 1 T Conduit terminal 1 4 1 2 D DIN terminal 1 2 G Grommet (Lead wire length 300 mm) Grommet (Lead wire length 600 mm) DIN terminal DIN terminal (Without connector

VDW Thread type Nil T F N VQ Orifice size Rc NPTF G NPT 3 mm 4.5 mm 6 mm 8 mm 10 mm 2 3 4 5 6 VX2 VX Refer to the table (1) given below for availability. Port size VX3 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.) / Single unit Normally open (N.O.) / Single unit VXA 3 8 1 2 Refer to the table (1) given below for availability.

CD1 CD2 CL CP 0.500 0 -.002 0.106 2.28 1.94 NCDP-150-SUS 0.750 0 -.002 0.140 3.10 2.72 NCDP-325-SUS Note: Cotter Pins are included. 7 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, Japan Phone: 03-5207-8271 Fax: 03-5298-5361 URL http://www.smcworld.com 10100 SMC Boulevard Noblesville, IN 46060, U.S.A.

HAl Accessories (Options) HAA7 AT Auto drain Applicable Model HAA7 HAA15 HAA22 HAA37 HAA7-F AD402-03 HAA7-S HAA15-F AD402-03 HAA15-S HAA22-F AD402-03 HAA22-S HAA37-F AD402-04 IDl Dust protecting filter Mounting bench HAA37-S AMG How to Select (Flow Capacity l/min (ANR)) Operation Principle AFF Model HAA7 HAA15 HAA22 HAA37 AMl 50C 70C 100C 1000 1500 700 2200 4000 1500 3300 6000 2200 5700 13000

VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16-7

Pad typePad diameter Pad diameter (Symbol) Pad type B04 B06 07 B08 06 05 03 U (Flat) C (Flat with rib) UT (Thin flat) B (Bellows) Dimensions: Pad Unit ZP2-05UT ZP2-06UT ZP2-B06B ZP2-B08B ZP2-03U ZP2-B04U 7 7 7 7 7 7 12 12 12 12 13 13 4 4 0.5 0.8 0.3 0.3 0.8 1.2 1.6 1.6 2.5 2.5 5 6 4 3 4.7 3.3 4.7 6 3.5 8 9 7 9 10 ZP2-B06C ZP2-07C ZP2-B08C Adapter Mounting Dimensions 7 7 7 If an adapter will

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 03 04 1 2 1 4 6 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size 03 04 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure