MVGQ

80 100 M8 x 1.25 80 5 125, 150, 175, 200 Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

Low-Speed Rotary Actuator

Flat face and parallel key position indicate B port is pressurized. adjustment 5 adjustment 5 adjustment 5 Key or flat Key or flat Port B Port B Angle Angle Angle Port A Port A Angle adjustment 5 Rotation range180 Rotation range90 -20- Internal construction and parts Size 10, 15 24 23 Heat transferred label 1 22 Seal washer 2 21 Piston seal 4 20 End cover gasket 1 19 Cover gasket 2 18 Seal

Ionizer Gun

Function . 13 4-1. Name of parts . 13 4-2. LED indication . 13 4-3. Mode setting switch . 14 4-4. Emitter maintenance (cleaning and replacement) . 15 4-5. Alarm function . 17 5. Performance . 18 5-1. Installation distance and Discharge time (Discharge time of 1000V100V) . 18 5-2. Static neutralization range (Discharge time of 1000V100V) . 19 5-3. Pressure Flow characteristics . 20 6.

ASR

5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

Transfer

0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !

Rotary Cylinder Series MRQ Size: 32, 40 1

1 !2 !3 !4 !5 !6 !7 !8 !

Compact Cylinder

Male elbow Without Magnet for Auto Switch Bore size [mm] 12 16 20 25 32 Port size M3 x 0.5 M5 x 0.8 Stroke [mm] 5 or more 5 or more 5 or more 5 or more 5 or more V: Applicable to mounting condition 1 and 2. v: Applicable to mounting condition 1.

Air Cylinder CLA Series Fine Lock Model

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1

Standard Combinations

Use piping whose I.D. is 6.5 or larger, and whose length is 5 m or less. Avoid riser piping. AD27: Use piping whose I.D. is 2.5 or larger AD37/47: Use piping whose I.D. is 4 or larger Length is 5 m or less. Avoid riser piping. Recommended Tightening Torque (Nm) Air Supply Connection thread 1/8 1/4 3/8 1/2 Caution 7 to 9 12 to 14 22 to 24 28 to 30 Torque 1.

Return Filter

The warranty period of the product is 1 year in service or 1. The warranty period of the product is 1 year in service or 1.

MIW/MIS

Confirm that the value is within the operating range of the point of application L = 60mm. Work piece weight (kg) Work piece weight (kg) 10 10 5 5 1 1kg 1 0.25kg 0.1 10 20 40 0.1 5 10 20 30 Transfer speed (m/min) Transfer speed (m/min) 32.5m/min 12m/min Procedure3 Confirmation of allowable lateral load MIW12 MIS12 1.

SL5200

0.00 0 0.00 0 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

, 3/4 Rc 1/4 5 Process Pump Air Operated Type (External Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 3 PA3000 Body size Connection port size 03 04 06 3 5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard Liquid contact body material Thread type 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Nil T F N Rc NPTF G NPT Diaphragm material 1 PTFE T, F,

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(pilot air exhaust port) FLUID IN 1/2, 3/4 1/4 5 Series PA3000/5000 Process Pump Air Operated Type (External Switching Type) How to Order 1 1 PA 3 03 3 PA3000 Body size Connection port size 03 04 06 3 5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard Liquid contact body material Thread type 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Nil T F N Rc NPTF G NPT

CUJ

M3 x 38L M3 x 27L M3 x 29L M3 x 31L M3 x 33L M3 x 38L M3 x 43L M3 x 27L M3 x 29L M3 x 31L M3 x 33L M3 x 38L M3 x 43L 5 5 18 M3 x 18L 5 5 18 M3 x 18L 5 5 18 M3 x 18L 3 Mini Free-mount Cylinder Series CUJ Clean Room Series How to Order Double acting 10 6 8 D C D UJB F8N Number of auto switches Nil S 2 pcs. 1 pc.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Note 4) When n is an odd number, an even number that is one larger than this odd number is used for the calculation. However, the minimum even number is 4. So, 4 is used for the calculation when n is 1 to 3.

4-channel Flow Monitor (Remote type monitor unit)

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H Hysteresis The difference between ON and OFF points used to prevent chattering. Hysteresis can be effective in avoiding the effects of pulsation.

VCC

Qty. 1 6 11 2 7 12 3 8 13 4 9 14 5 10 15 2 port valve is specified for the gate valve and the cleaning valve. 7 valves + 1 valve + 4 valves = 12 valves 668

Title not found

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1 6

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm