A

E N S I O N S 5K8-10P/4P/2.5P D I M E N S I O N S 4K8-10P/4P/2.5P D I M E N S I O N S G27-10-R1 VACUUM GAUGES H O W T O O R D E R V A C U U M G A U G E S Scale in mmHg Center Back Mount 18 or 14 Connection 42mm Diameter Face GZ46 A T H R E A D T Y P E Rc(PT) N NPT M O U N T I N G Standard C Panel Mounting C O N N E C T I O N T H R E A D 01 1/8 02 1/4 M M5 (10-32Nom) Female I N T E R N A L

Valve Single Unit

A: Orange B: Green SX M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) 3 4 5 3 4 5 L plug connector (L): SX5 40(R)-L 02 M plug connector (M): SX5 40(R)-M-02 Manual override (Press and turn for the locking type.)

Table of Contents

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

ZP3

w q ZP3 T N 04 B5 e Connection thread (Female thread) M5 x 0.8 Width across flats D B5 M5 x 0.8 5 Model A B C2 D Vacuum inlet direction q Pad dia.

Modular F.R.L. Unit

1/8 3/8 1/2 3/4 1 Thread type AL20 Port size Metric thread (M5) Rc NPT G Symbol Nil Nil M5 01 02 03 04 06 10 M5 x 0.8 1/8 1/4 3/8 1/2 3/4 1 Note) N F Accessory When more than one specification is required, order in alphanumeric order.

MHZ

9@0@1 Seal kit MHZ2-(N) MHZ2-(N)1 MHZ2-(N)2 MHZ2-3 MHZ2-D MHZ2-S MHZ2-C MHZ2-DW MHZ2-K MHZ2-M MHZ2-E rty!1!3 Mounting screw MHZ-A1002(N)-1 MHZ-A1602(N)-1 MHZ-A2002(N)-1 MHZ-A2502(N)-1 Finger assembly MHZ-A1002(N)-2 MHZ-A1002-3 MHZ-A1602(N)-2 MHZ-A1602-3 MHZ-A2002(N)-2 MHZ-A2002-3 MHZ-A2502(N)-2 MHZ-A2502-3 MHZ-A4003 MHZ-A3203 MHZ-A1003 MHZ-A1603 MHZ-A2003 MHZ-A2503 Piston assembly wo!0!

MHZ

9@0@1 Seal kit MHZ2-(N) MHZ2-(N)1 MHZ2-(N)2 MHZ2-3 MHZ2-D MHZ2-S MHZ2-C MHZ2-DW MHZ2-K MHZ2-M MHZ2-E rty!1!3 Mounting screw MHZ-A1002(N)-1 MHZ-A1602(N)-1 MHZ-A2002(N)-1 MHZ-A2502(N)-1 Finger assembly MHZ-A1002(N)-2 MHZ-A1002-3 MHZ-A1602(N)-2 MHZ-A1602-3 MHZ-A2002(N)-2 MHZ-A2002-3 MHZ-A2502(N)-2 MHZ-A2502-3 MHZ-A4003 MHZ-A3203 MHZ-A1003 MHZ-A1603 MHZ-A2003 MHZ-A2503 Piston assembly wo!0!

SQ1000/2000

indicator position Applicable connector: Flat ribbon cable connector (20P) (conforming to MIL-C-83503) D side U side 1 Stations 2 3 4 5 6 7 8 n C8: EXH port For top ported C8: SUP port 29.5 (49.5) 26 37 13 27 41.5 P = 11.5 7.5 2n-C3, C4, C6, M5 (A, B port) C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 threads L n Formula: L1 = 11.5n + 54 n: Stations (maximum

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Made to Order

Double clevis CT 2 x N D E M Y CD hole H10, Axis d9 RR CW CU CX +0.4 +0 T L CZ 0.1 0.3 [mm] Part no.

3 Port Air Operated Valve Series SYJA300

8.5 SYJ R P 36 20.5 5 X X 5 8 8 (Pitch) P=10.5 18.5 VK M5 x 0.8 (X port) (Station 1) (Station n) 1/8 (P, R port) 8.5 48.5 [55.5] VZ (Station 1) (Station n) 48.5 [55.5] A A 20 VT (Pitch) P=10.5 18.5 5.1 VP A A 20 M5 x 0.8 (A port) One-touch fitting (A port) Applicable tubing O.D.: 4, 5/32" (Pitch) P=10.5 18.5 5.1 VG VP L plug connector (L) M plug connector (M) M8 connector (WO) S070 Approx

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

) [ ] for AC L plug connector (L) M plug connector (M) SS3YJ3-S42Station -M5, C4 53.4(GZ, GS: 54.1) [55.1] 20.5 20.5 P R P R 32.5 36.1 36 (Lead wire length) 300 59.6 [66.1] 300 2-4.5 (Lead wire length) (Mounting holes) 12 12 (Pitch) 11.5 P=10.5 53.2 [54.5] L2 4 62.8 49.2 L1 17.5 11.5 17.5 11.5 n-M5 X 0.8 48.5 [55] (A port) 8.5 8.5 36.1 29.5 48.5 [55] A A 20 5 (Pitch) n-M5 X 0.8, n-C4 P=10.5

Table of Contents

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

VZ100/300/500

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

Compact Rotary Actuator Series CRQ2

(Example) For M5: L2 = 10 Applicable shaft types: K, T, X Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5,

4/5 Port Air Operated Valve Series SYJA3000

S 20 20 stations P, R port thread type + + + + + + + A, B port size R R P P port 1/8 R port 1/8 A B M5 Nil Rc M5 x 0.8 B A A, B port M5 x 0.8, C4 A, B port M5 x 0.8, C4 C4 F G One-touch fitting for 4 N3 N NPT One-touch fitting for 5/32" T NPTF Common SUP/Individual EXH type Note) For more than 10 stations, supply air to both sides of P port.

MXQ

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12.5 (Adjuster at extension end) 28 24.5 58 49 3.5 24 29 24.5 14.5 5H9 depth 5 +0.030 0 1 F 6.5 14 4-M5 x 0.8 thread depth 7 2 N 1 x F 21 3-M6 x 1 thread depth 10 NA-M5 x 0.8 thread depth 6.5 10 M 21 KA Bottom view of MXQ6-30 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H

NCG/CG1

L D-A73 (Example) Lead wire length 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

0.55

M-type plug connector (M): VF1220-;M;;1; M5 01 Conduit terminal (T): VF1220-;T ;;1; M5 01 (Lead wire length) 142.9 Max. 10 Approx. 300 Applicable cable O.D. 4.5 to 7 120.3 (Indicator light) 110.1 Pg9 88.7 [78.7] 78.7 [68.7] 55.5 5EA 5EA 3EB 3EB [ ]: Without indicator light Unless otherwise indicated, dimensions are the same as Grommet (G).