Micro Mist Separator

Standard specifications Bracket mount Indicator mount P A B C D E G J M N Q R S T U V W AMD20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AMD30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AMD40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Type Metric size Inch size Elbow Universal 2 3 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 3.2 4 6 8 10 12 03 05 07 09 11 13 04 06 08 10 12 Control type Meter-out Meter-in 0 1 Use 1/8" tube.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

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High Vacuum L Type Valve

Refer to Chapter 5, Construction and Dimensions" (P. 11) for the part indication numbers.

IDX-OM-V020

DUTY AUTO DRAIN . 10-2 10.4 MAINTENANCE . 10-2 Chapter 11 Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR SIGNAL OUTPUT . 12-1 12.3 REMOTE OPERATION . 12-2 12.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 12

EX600-DX_DY_DM_eng

13 12 7 6 5 7 6 5 Group Group Pin number Pin number Pin number 3 3 1 0 1 0 2 2 13 11 13 11 12 12 10 10 8 6 8 6 5 3 1 9 7 9 7 4 2 5 3 1 5 3 1 4 2 4 2 Pin number Pin number 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 4 3 2 1 EX600-DMPE EX600-DMPF EX600-DYPE EX600-DYPF 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output

PFxx-OMX0007

The time interval for memorizing can be selected from 2 or 5 minutes. Accumulated-value hold time Outputs a value proportional to the flow rate. When the analogue output is in the range 1 to 5 V, it will vary between 1 to 5 V according to the rate of flow. The same for analogue output of 0 to 10 V or 4 to 20 mA.

IDX-OM-V022

Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR SIGNAL OUTPUT . 12-1 12.3 REMOTE OPERATION . 12-2 12.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 12-3 12.5 ELECTRIC CIRCUIT . 12-4 Chapter 13 Option V . 13-1

High Vacuum L Type Valve

Refer to Chapter 5, Construction and Dimensions" (P. 11) for the part indication numbers.

XL-OMY0002

10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD-63,XLD-80,XLD-100 S 1 SUS304+ 4 1) S S O 2) S O FKM 5 O 6 S O 2 FKM 9 S SUS304 10 11 XL-OMY0002 6. 6-1.

CYP_EN

Table 5. Applicable grease pack Grease pack Weight GR-X-005 5 g 10/11 10-1. Model Selection 1 11/11 10-2.

KA

(mm) A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17

ZL3-OM00601

No.ZL3-OM00601-B 1.How to Order ZL3 M 06 1 K1 5 LO Z 1 E A M G 1 Without valve ZL3 M 06 1 K1 5 LO Z 1 E A M G 1 With valve Pressure switch ZL3 M 06 1 K1 5 LO Z 1 V A M W 1 with energy saving function 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 1) Max. suction flow 2) Standard supply pressure 4) Exhaust specifications 3 300L/min(ANR) M 0.35MPa Nil Exhaust through silencer H 0.50MPa

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5 23.3 26.5 23.3 26.5 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Metric Long stroke Standard stroke Without auto switch With auto switch A Long stroke L1 24 25.5 28.5 32.5 Long stroke (mm) Standard stroke (mm) Standard C Bore (mm) Bore (mm) With/Without auto switch A C1 H1 X Inch L1 14 15.5 18.5 22.5 B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 A B 32 32 41 44 F 7.5 7.5 9 11 L B 17 17 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 Metric 6 8 7 12 12 16 20 25 12 16 20 25 9 10

Digital Pressure Switch ( compatible)

R Current read value For example, when the display value is 1.000[MPa], 5%R.D. is 5% of 1.000[MPa], which becomes 0.05[MPa]. When the display value is 0.800[MPa], 5%R.D. is 5% of 0.800[MPa], which becomes 0.04[MPa]. R.D. The pressure range within which the product will meet all published specifications.

Environment

SpeedWork Load Graph (Guide) For Step Motor (Servo/24 VDC) LECPA Horizontal Vertical LEY16m LEY16m for acceleration/deceleration: 2000 mm/s2 10 40 LEF 35 Horizontal work load [kg] Lead 2.5: LEY16C Lead 2.5: LEY16C 8 Vertical work load [kg] 30 LEJ 25 LEL 5 15 17 20 Lead 5: LEY16B Lead 5: LEY16B 4 LEM 10 11 2 Lead 10: LEY16A Lead 10: LEY16A 6 LEY LEY 5 4 0 0 LES 0 300 200 400 100 500 600 0

High-precision Digital Pressure Switch ( compatible)

R Current read value For example, when the display value is 1.000[MPa], 5%R.D. is 5% of 1.000[MPa], which becomes 0.05[MPa]. When the display value is 0.800[MPa], 5%R.D. is 5% of 0.800[MPa], which becomes 0.04[MPa]. R.D. The pressure range within which the product will meet all published specifications.

Compressed Air Preparation Filter

6 7 8 1 2 3 4 2 1 3 4 5 6 7 8 9 10 11 12 0 2 4 6 8 1 3 5 7 9 10 12 14 11 13 15 16 0 Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] 5 Compressed Air Preparation Filter AFF/AM/AMD Series Mist Separator AM Series Standard Specifications Model AM70D AM80D AM90D Fluid Compressed air Operating pressure range [MPa] 0.1 to 1.0 Ambient and fluid temperatures

LJ1H

5 !5 i q A A !2 @1 @0 !4 u Section AA Parts list Material Note No. Description No.