Compact 5-Port Solenoid Valve

(Tightening torque: 0.15 Nm) 11) For products with a switch, mount the switch assembly. (Be careful not to drop the O-ring.

ZP

-57 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

CNA

11 13 16 M8 X 1.25 M8 X 1.25 M10 X 1.25 M12 X 1.75 M12 X 1.75 6 7 7 11 11 14 18 18 22 26 With rod boot (mm) (mm) ZZ (One) ZZ (Both) Bore (mm) 40 50 63 80 100 Bore (mm) 40 50 63 80 100 Stroke range (mm) e M MM N P Q H S T V W ZZ f h l 37 to 39.5 42 to 44.5 50 to 51.5 59.5 to 62.5 66.5 to 69.5 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 11 11 14 17 17 M14 X 1.5 M18 X 1.5 M18 X 1.5

LEC-OM071xx

DISCONNECT 11 Turn OFF the control and main circuit power supplies.

SX

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

5 Port Solenoid Valve

(12.5) 2(B) port 11 (12.5) 4(A) port Indicator light 50 59 73 106 165 179 2 Indicator light 2 4 90 24.6 38 48 11 (12.5) 4(A) port 11 (12.5) 2(B) port B A 14 12 1 5 3 4 2 Manual override 30 45 38 24.6 A B 2 x 5.6 Mounting hole 48 B A 14 12 5 3 1 45 30 2 x 5.6 Mounting hole Manual override 129 91.5 41.3 32 30.6 27 14.5 G1/2 78.8 41.3 32 30.6 27 14.5 Electrical entry PE X X PE R1 R2 15.5 P

MU

148 FX 14 16 18 22 30 FV 76 94 118 144 168 FT 8 8 9 12 14 FD 5.5 7 9 11 13 Model MUF25, MUG25 MUF32, MUG32 MUF40, MUG40 MUF50, MUG50 MUF63, MUG63 Rear flange MUG25SMU25, #4 (#1+#4+#11) MUG32SMU32, #4 (#1+#4+#11) MUG40SMU40, #4 (#1+#4+#11) MUG50SMU50, #4 (#1+#4+#11) MUG63SMU63, #4 (#1+#4+#11) Front flange MUF25SMU25, #3 (#1+#3+#11) MUF32SMU32, #3 (#1+#3+#11) MUF40SMU40, #3 (#1+#3+#11) MUF50SMU50

KQ2

(inch) Min. port size D Note) Mass (g) D L M1 M2 Model MS 5 32 KQ2H01-03 KQ2H01-07 KQ2H03-05 KQ2H03-07 KQ2H05-07 KQ2H07-09 KQ2H07-11 KQ2H09-11 KQ2H09-13 KQ2H11-13 10.4 13.2 11.4 13.2 13.2 15.2 17.9 17.9 21.7 21.7 32.5 34.5 34 34.5 34.5 38.5 42 42 44 44 16 17 16.5 17 17 18.5 21 21 22 22 3 5 4 4 5 6 11 11 16 17 1 8 Applicable tubing 15.5 2.5 Applicable tubing 1 4 LQ 3 16 5 32 16 3 1 4 1 4 5

Applicable Auto Switch Model

9 9 10 10 11 11 11 11 11 10 10 10 10 OUT() 2nd terminal 9 9 9 10 10 11 8 9 9 Note) Average value at normal temperature including hysteresis.

AC

gauge B B AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 81.5 122 142 177 177 254 268 162 197 197 274 288 Model Port size A B C D LL M P E F G H J K Bracket mounting dimensions N 324(374) 334(384) 334(384) 336(386) 336(386) 38 41 39 45 45 53 70 75 90 95 106 106 106 106 106 11 11 11 11 11 25 18 16 35 35 66 66 66 66 66 70 70 70 70 70 210 210 210 210 210 90 90 90 90 90 13 13 13 13 13 3.2

Vacuum Pad

14 18 30.5 37 47 11 14.5 20.5 11 14 18 30.5 37 47 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Vacuum Pad

14 18 30.5 37 47 11 14.5 20.5 11 14 18 30.5 37 47 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Vacuum Pad

14 18 30.5 37 47 11 14.5 20.5 11 14 18 30.5 37 47 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

CNA

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One side) 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/

CNA

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One side) 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

For details, refer to pages 11 and 12. Table 1.

Refrigerated Air Dryers Series IDF/IDU

Power cable outlet 0.7 [17 mm] (Wire diameter 0.4 [9 to 11 mm]) IDFB6E to 15E-11 IDF-S0086 F One-touch fitting (KQ2H1002S) is not included.

CRBU

11-3-4.

Fluoropolymer Piping Equipment

LQ3T11-R1 4 3 4 3.5 10 9 10 9 10 9 4.8 9.5 11 11 11 28.5 27.5 28.5 27.5 28.5 27.5 14 14 14 2 LQ3T11-R5 4 3 LQ3T21-R1 4 6 4 17 16 10 9 17 16 6 12 16 11 16 34.5 33.5 30.5 29.5 34.5 33.5 20 14 20 2.5 LQ3T21-R2 3 6 2 LQ3T21-R5 6 4 17 16 10 9 16 11 34.5 33.5 30.5 29.5 20 14 2.5 LQ3T21-R6 6 3 2 LQ3T31-R1 6 8 10 25 25 6.4 LQ3T31-R2 6 10 17 16 16 38 37 20 4 LQ3T31-R5 10 8 22.5 19.5 21 21 47.5 44.5

Table of Contents

50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.