Clean Series: Vacuum Suction Type, Magnet: Built-in, Mounting: Basic Style, Cushion: Rubber Bumper, Bore Size: 20mm, Stroke: 125mm, Port Thread: Male Rod End, Auto Switch: -, Lead Wire or Prewired Connector: -

Clean Series: Vacuum Suction Type, Magnet: None, Bore Size: 25mm, Stroke: 125mm, Port Thread: Male Rod End, Auto Switch: -, Lead Wire or Prewired Connector: -

Clean Series: Vacuum Suction Type, Magnet: Built-in, Bore Size: 20mm, Stroke: 125mm, Port Thread: Male Rod End, Auto Switch: -, Lead Wire or Prewired Connector: -

Clean Series: Vacuum Suction Type, Magnet: None, Series: J2, Mounting: Basic Style, Bore Size: 10mm, Stroke: 125mm, Cushion: -, Head Cover Port Location: -, Version: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Type: -

Clean Series: Vacuum Suction Type, Magnet: None, Mounting: Basic Style, Bore Size: 20mm, Port Thread: Rc, Stroke: 125mm, Cushion: -, Rod End Thread: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Clean Series: Vacuum Suction Type, Magnet: Built-in, Mounting: Basic Style, Bore Size: 20mm, Port Thread: Rc, Stroke: 125mm, Cushion: -, Rod End Thread: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Clean Series: Vacuum Suction Type, Magnet: Built-in, Mounting: Bottom Mounting Style, Bore Size: 25mm, Port Thread: Rc, Stroke: 125mm, Rod End Thread: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Step Motor Controller

7 6 9 8 11 10 3 Connector B terminal no.

Swivels

PS1690202-16-16 4.32 3.46 2.16 1.62 1-11 1/2 1-11 1/2 109.8 mm 87.9 mm 54.9 mm 41.3 mm NPTF NPTF 3 Piece Design D Swivels A B D Part Number A B C D Wrench Flats Dia.

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 11 LEFS 16 100 B 1 1 S 6N H w e r t u y i o !0 !1 !

High Vacuum Angle Valve

XLG50, 63, 80, 100, 160/ Air operated (b) D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY DJ K XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLG-50 XLG-63 XLG-80 XLG-100 XLG-160 70 183 80 31 10.5 75 52 77 29 10.5 88 209 100 39 11 87 95 70 76.5 36 9 90 250 117 45.5 11 114 110 83 105 44 9 108 270.5 154 55 11 134 130 102 92 58 9 138 339 200 65 11

Fluoropolymer Piping Equipment

" A A 1/4" B B 1/4" B B 3/8" The table of combination is the same as that for A side.

CRBU

This specification is not available for the rotary actuator with auto switch unit. 2-d Body (B) (mm) (mm) Size d Size N M Q 10 3.4 10 9.5 8.5 M3 15 3.4 15 10 11 M3 Body (A) 20 4.5 20 13 14 M5 Q N 30 A port B port (Standard) (Altered) A port B port 5.5 30 14 15.5 M5 40 5.5 40 20 21 M5 M 11-3-30 Made to Order Series CRBU2 Symbol: C3 Change the position of the screws for tightening the actuator

Programless Controller Series LECP1

B-1 A-1 B-2 A-2 B-3 A-3 Nil Circuit Cable color 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue S Standard cable Cable color Connector D terminal no. Shield 12 13 7 6 9 8 3 Vcc GND A A B B Brown Black Red Black Orange Black B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

M-E05-1-LQ1

5 5-19 LQ1-5N19 LQ1-5B19 2-03 LQ1-2N03 LQ1-2B03 LQ1U6A-R2 6 6-25 LQ1-6N25 LQ1-6B25 4-13 LQ1-4N13 LQ1-4B13 LQ1U6A-R3 6 6-25 LQ1-6N25 LQ1-6B25 4-11 LQ1-4N11 LQ1-4B11 LQ1U6A-R4 6 6-25 LQ1-6N25 LQ1-6B25 3-07 LQ1-3N07 LQ1-3B07 5-11 B B side Space Saving Union Elbow LQ1E-SS Metric size A side Model Size A side B side Insert pin/Name plate symbol Part no.

Step Motor Controller

13 7 6 9 8 11 10 3 Connector B terminal no.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2-3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (11)

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

2/3 Port Valve

Class B H B Class H DIN connector or DC not available.

Aluminum High Vacuum Angle Valve

XLG50, 63, 80, 100, 160/ Air operated (b) D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY DJ K XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLG-50 XLG-63 XLG-80 XLG-100 XLG-160 70 183 80 31 10.5 75 52 77 29 10.5 88 209 100 39 11 87 95 70 76.5 36 9 90 250 117 45.5 11 114 110 83 105 44 9 108 270.5 154 55 11 134 130 102 92 58 9 138 339 200 65 11