Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 1 (180°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 03 (ø5/32")
Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: 1 (180°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: 9mm, Tubing: 03 (ø5/32")
Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: None (0°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: 9mm, Tubing: 03 (ø5/32")
Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 03 (ø5/32")
Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 2 (90°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: 9mm, Tubing: 03 (ø5/32")
Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: None (0°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 03 (ø5/32")
Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None
Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None
Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None
Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None
Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None
Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None
Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None
Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None
Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7
;'16" 03/4" 'ol/2~ AsP330F'!U R(PT)1/8 M5 X 0.8 J\SP. 4;JOF~02 R(PT)I /4 Rc(PD1 /8 IIS'P530F:03 R(PT)318 Rc(PT)lIS 'ASi"!)30l"'lJ4 " R(PT)1!2 Rc(PT)1I4 ASP;l3OF:,FO~ RIPT)114 G(PF)1I8 I\Sps:ioFf;03' R(PT)318 G(PF)118 ),I'SPsJOF;;04: R(PT)1 /2 G{PF)1/4 A~P33!1F" 'l Il1 NPT1 /8 10-32UNF ,~Sp430FNO,?
-2No.VFR3000-OMY0001 / 1 1.5 *3) *3)1 1 () No.VFR3000-OMY0001 -3- VFRA30004000 5 / () () () () -10 3 3 EXH (VVFS3000-R-03-1,2 VVFS4000-R-04-1,2) () () 3 , 4 VFR3000-OMY0001 VFRA3000,4000 5 1) 2) 1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 1 1) M5 1/61/4 11.5Nm ) 2) Rc Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 5 VFR3000-OMY0001 VFRA3000,4000 5 () () 5 3 30 ( ) 1 ()ISO
Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread Type: R, Port Size: U10/32 (10-32 UNF), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None
Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread Type: R, Port Size: U10/32 (10-32 UNF), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None
Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread Type: R, Port Size: U10/32 (10-32 UNF), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None