Manifold Type: 20 (Body Ported, Bar Manifold, Individual Wiring), Valve Stations: 5 Stations, A, B Port: 00F (G)

Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 5 Stations, A, B Port: NPT, Q: -

Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 5 Stations, A, B Port: G, Q: -

Stations: 05

Stations: 05, Thread: -

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

ASD

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

SI Unit for Vacuum Manifold

24 VDC +10%/-10% Under-voltage detection approx. 18 VDC PWR(V) Operating voltage 24 VDC +10%/-5% Galvanic isolation Yes (between PWR and PWR(V)) Fieldbus Bus protocol PROFINET I/O Version PROFINET Specification Version 2.3 Conformance Class C Yes (Only for IRT switch function) FSU (Fast Start Up) Yes MRP (Media Redundancy Protocol) Yes MRPD (Media Redundancy for Planned Duplication) Yes

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

M1 AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1 35.6 36.8

High Purity Fluoropolymer Needle Valve Series LVN 1

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 6 8 10 12 Inch sizes 03 05 07 11 13 1/8 3/16 1/4 3/8 1/2 Different diameter tubing order example Basic size With reducer Note) Applicable fitting: LQ2 Different diameter tubing (with plug-in reducer) can be selected within the same body class. (Example) Body class 3 A side: 10 x 8 B side: 8 x 6 Order as shown below.

Body Ported Type Vacuum Ejector ZH Series

(SUP. port) (VAC. port) (EXH. port) ZB D A S 10 ZH 06 06 08 Body Ported ZA Accessories (Standard bracket/Silencer)2 Nozzle size ZX 05 0.5 mm 07 0.7 mm 10 1.0 mm 13 1.3 mm 15 1.5 mm 18 1.8 mm 20 2.0 mm Symbol Standard bracket Silencer Nil N S1 NS1 1 Options S and NS are not available for EXH. port with a screw-in connection. 2 Each accessory is not assembled with the product, but shipped

SI unit for PROFINET

Assembly and disassembly of the SI unit -30No.EX-OMO0030-E Specifications Specifications General specifications Item Specifications Ambient temperature -10 to +50 oC Ambient humidity 35 to 85%RH (No condensate) Ambient temperature for storage -20 to +60 oC Withstand voltage 500 VAC applied for 1 minute Insulation resistance 500 VDC, 10 M or more Operating atmosphere No corrosive gas Enclosure

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow