In-line Air Filter

Pressure drop [kPa] Pressure drop [kPa] 0.5 MPa 0.1 MPa 0.5 MPa 20 20 20 0.5 MPa 0.7 MPa 0.7 MPa 0.7 MPa 10 10 10 0 0 0 5 10 15 0 0 10 20 30 40 60 50 0 10 20 30 40 50 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC33/3B 4, 5/32" ZFC53/5B 4, 5/32" ZFC54/5D 6, 1/4" 0.3 MPa 0.3 MPa 0.3 MPa 30 30 30 0.1 MPa Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa

Low-Speed Rotary Actuator

Body pin hole Size Tightening torque 10 0.2 to 0.3Nm 15 0.3 to 0.5Nm 20 4.2 to 5.2Nm 30 4.2 to 5.2Nm 40 7.2 to 8.7Nm Size 10 , 15 Cover Assembly End cover Assembly Body pin hole Hexagon socket head bolt Fig.22 Size 20 , 30 , 40 (6) Perform operation test after assembling and check external leakage.

HRX-OM-K003

Alarm Code.01 to 08, 10 to 19, 22, 24, 29, 30: Eliminate the error cause. Press the [RESET] key on the operation display panel or power cycle the main breaker to enable error recovery to take effect. Alarm Code.09: Eliminate the error cause.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature specifications Indicator Valve size 16 25 40 50 General use Without XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 With XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 High temperature Without XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 With XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 Temperature

BP1000

30 40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa

Soft Start-up Valve

of the rated voltage 12V 10% of the rated voltage 100V 10% of the rated voltage Allowable voltage fluctuation 10% of the rated voltage 110V *1 [115V] [-15% to +5% of the rated voltage] AC 200V 10% of the rated voltage 220V *1 [230V] 10% of the rated voltage [-15% to +5% of the rated voltage] Power consumption [W] DC 0.35 (With light: 0.4) 0.35 (With light: 0.45) With light: 0.4 100V 0.78

A-HEC-OM-J004

25 20 0 10 20 30 40 50 60 70 80 Timemin. 65 Recirculating fluid temperature Cooling water 35 60 55 50 Cooling water 25 45 Cooling water 10 40 Ambient temperature25 Recirculating fluidGALDEN HT200 Recirculating fluid level180 (At recirculating fluid temp. 25) Cooling water flow rate3L/min Shut out from outside with a lid (styrofoam) 35 R 30 25 20 0 10 20 30 40 50 60 70 80 Timemin.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Made to Order 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Page 34 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30

Pilot Operated

Add 10 g for conduit, 30 g for DIN terminal, and 60 g for terminal type respectively. Refer to Glossary of Terms on front matter 10, for details on the max. operating pressure differential and the max. system pressure.

15

Allowable load mass on guides and moment Allowable moment [Nm] M1 1.3 2.6 8.6 17 30 67 96 Bore size (mm) Allowable load mass on guides m [kg] 6 10 15 20 25 32 40 M2 1.4 2.9 8.9 18 35 82 124 M3 1.3 2.6 8.6 17 30 67 96 9 15 35 60 104 195 244 The table above indicates the maximum performance of the guide, but does not show the actual allowable work load mass.

Round Type Hydraulic Cylinder

M10 x 1.25 M14 x 1.5 M16 x 1.5 12 M4 10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80 56 40 12 M5 12 13 7 9 7 10 M5 set screw (1 pc.) 44 12 24 30 88 64 43 16 M5 12 13 9 9 10 10 Y-type double knuckle joint Bracket pin 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NZ NZ

VQ4000

L n Dimensions 9 288 477 8 263 452 L1 L2 10 313 502 7 238 427 11 338 527 6 213 402 12 363 552 5 188 377 13 388 577 4 163 352 14 413 602 3 138 327 15 438 627 2 113 302 16 463 652 2-5-29 30 For details about certified products conforming to international standards, visit us at www.smcworld.com.

High Vacuum Angle Valve, XL Series

-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External 30 35 40 45 65 85 XLF Operating time ms Note 2) 30 35 60 60 100 130 XLFV Flange type KF (NW), K (

Modular Type Air Filter Series AF

Port size Port size Body size Body size Port size Port size Bowl Symbol Symbol 30 40 50 60 20 30 40 50 60 Applicable model AF20 to 60 Symbol 2 Note 4) Description 02 03 04 06 10 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 1/4 3/8 1/2 3/4 1 Bowl Metal bowl Applicable model AF30 to 60 Description Symbol Metal bowl with level gauge 8 Note 3) AF30 to 60 2 Note 4) Metal bowl Note 4) Only Metal Bowl

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

Digital Flow Switch

Symbol Model S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 -71No.PF-OMS0002-B Lead wire with M8 connector (ZS-40-A) -72No.PF-OMS0002-B Revision history A: Contents revised in several places.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.

IDX-OM-W029

GFCI 5. 6. 7. 10-2 IDU22E/37E/55E-23-R 10A 30mA IDU75E-23-R 20A 30mA IDU22E/37E/55E-30-R 10A 30mA IDU75E-30-R 15A 30mA IDU Series 10-1 10 1 IDX-OM-W029 10 R 10-3 1) 2) 3) M5 9.5mm 2 1.25mm N L L ,N () 6.5mm () Connect to earth cable GFCI Connector width AC230V 6.5mm or less M5 Electrical entry 9.5mm 2 1.25mm L01,L02,L03 L01 L02 L03 L1 L2 PE L3 () M3 () 6.5mm

MGF

weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70kg, eccentric distance is 60mm, and the maximum speed is 150mm

Air Combination

AC20-D to AC60-D 30 03 DE AC D Symbol Description Body size 20 30 40 50 60 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 3/8 Port size 03 1/2 04 06 3/4 10 1 Nil Without auto drain a Float type C N.C. (Normally closed) Drain port is closed when pressure is not supplied. auto drain D N.O. (Normally opened) Drain port is opened when pressure is not supplied.