Process Pump Series PA3000/5000/PAX1000 Series PB1000

Type PA3000 115 68 85 105 4-7 7.5 FLUID OUT Rc 3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10

ZSM1-115/121

ISG Supply pressure normal Supply pressure drop Supply pressure increase ZSM P1 Set value Vacuum P1 P2 Normal filled pressure Insufficient filled pressure Excessive filled pressure P1 P2 n1 n2 n1 n2 P2 Filled pressure Set value Reverse mode AUTO-SHIFT input n1 n2 Time Normal mode Operating normally Operating normally Operating normally ON OFF Time Time ON When the Auto Shift Function is used

IR1000/2000/3000

0 40 80 120 160 200 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa IR1020-01 IR1020-01 IR1020-01 Conditions: Back pressure 1.0MPa Conditions: Supply pressure 1.0MPa 1.0 0.8 0.204 0.9 Set pressure P2 MPa 0.7 0.8 Set pressure MPa Set pressure MPa 0.202 0.6 0.7 Setting point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.198 0.3 0.2 0.2 0.1 0.196 0.1 0 100 200 300 400 500 0 0.2

IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 /min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 0.202 F.R.L.

VND

In contrast with the N.C., when air is exhausted from the P2 port, the return spring opens the valve element. Pressurized air that enters through the P2 port closes the valve element. 0 4 Component Parts No.

Precision Regulator Series IR1000/2000/3000

0 40 80 120 160 200 0 50 100 150 200 250 300 350 Flow rate (l /min (ANR)) Relief flow rate (l /min (ANR)) Supply pressure P1 (MPa) ITV IR1020-01 IR1020-01 IR1020-01 Back pressure: 1.0 MPa Supply pressure: 1.0 MPa IC 1.0 0.8 0.204 Set pressure P2 (MPa) 0.9 PVQ 0.7 Set pressure (MPa) Set pressure (MPa) 0.8 0.202 0.6 0.7 VEF VEP Set point 0.5 0.6 0.200 0.5 0.4 VER 0.4 0.3 0.198 0.3 VEA 0.2

AC Servo Motor Driver (CC-Link Type ）

For 3-phase or 1-phase 200 to 230VAC 40 For 1-phase 100 to 120VAC PE terminal 6 L1 L1 L2 2-M5 screw L2 L3 CNP1 CNP1 Screw size: M4 Tightening torque: 1.2 [N m] (10.6 [lb in]) N N P1 P3 P1 Screw size:M4 Tightening torque:1.2[Nm] P4 P2 P2 P P C C CNP2 CNP2 D D L11 L11 L21 L21 Mounting hole process drawing Mounting hole process drawing Mounting screw Screw size: M5 Tightening torque: 3.24[N

Precision Regulator

0.7 0.9 1.0 Supply pressure P1 (MPa) Flow rate (L/min (ANR)) Relief flow rate (L/min (ANR)) IR1010-01 IR1010-01 IR1010-01 Back pressure: 0.7 MPa Supply pressure: 0.7 MPa 0.4 0.204 0.7 Set pressure P2 (MPa) Set pressure P2 (MPa) Set pressure (MPa) 0.6 0.202 0.3 0.5 Set point 0.4 0.200 0.2 0.3 0.198 0.2 0.1 0.1 0.196 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 0 40 80 120 160 200 0 50 100 150

VNC

Piping External Pilot Caution Caution Pilot port 12(P1) and 10(P2) piping P1 and P2 piping should be as follows according to the model. When high temperature fluids are used, use fittings and tube with heat resistant features. (Self-align fittings, Teflon tubing, Copper piping, etc.)

VR4151/4152

7 A(2) port P2(12) port !4 !3 w !2 !

Air Catch Sensor Series ISA

When the work piece comes close to the detection nozzle, the back pressure P2 increases until it is larger than P1 (P2 P1). Then the switch output turns on to notify that the pressure is below the detection gap.

3

Analog output: p3% F.S. p2% F.S.

5-Port Solenoid Valve

SY5130-5U1-C6-P2 1 set (2-position double part no.) SY5230-5U1-C6-P2 1 set (2-position double part no.) SY5330-5U1-C6-P2 1 set (3-position closed center part no.) 2-position single (24 VDC) SY5130-5U1-C6-P2 (1 set) u Coil type 2-position single (24 VDC) SY5130-5U1-C6-P1 (2 sets) Nil Standard T With power saving circuit (Continuous duty type) The illustration shows a mounting example.

VN-OMJ0001

) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 2 4 4 VNB0 VNB02 VNB03 VNB1 12 () (P1) (P2) () 10 ()12(P1) 10(P2) 2 VNB01V VNB02V VNB1 V 12 (P1) 10 (P2) VNB 1V (N.C.) 0 6 VN*-OMJ0001-B () P2 O O 7 VN*-OMJ0001-B No. 1 2 3 4 5 6 7 8 9 10 11 P2N.C.

JXCx-OMY0006

Red LED is flashing EtherNet/IP connection time out Red LED is ON IP duplicated OFF BUS IN side (P1): No Link, No Activity L/A1 Link/Act Green LED is ON BUS IN side (P1): Link, No Activity Green LED is flashing BUS IN side (P1): Link, Activity OFF BUS OUT side (P2): No Link, Activity L/A2 Link/Act Green LED is ON BUS OUT side (P2): Link, No Activity Green LED is flashing BUS OUT side (P2)

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

Hysteresis mode (P1 P2, P3 P4) PSE (Hysteresis = 3 digits fixed) Hysteresis (Variable from 0) Hysteresis (Fixed) Hysteresis (Fixed) 1 digit is the minimum setting pressure unit. ON IS ON OFF OFF ISG P1 (P3) P2 (P4) P1 (P3) P2 (P4) ZSM Pressure Low High Vacuum Low High Pressure Low High Vacuum Low High 1 output type with failure prediction function 1. Input mode for set point value 2.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

PF2A7<p2%F.S. p0.5%F.S. p5%F.S. p3%F.S.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

22 40 36 0.72 31 31 55 45 SJ SY Effective area at exhaust side (mm 2) (2) S at P2 = 0.5 MPa SV Note 1) Set within the operating pressure range of solenoid valve.

ZISE3.eng

P1 (P3) P2 (P4) P1 (P3) P2 (P4) Pressure low Pressure high Vacuum low Vaccum high Pressure low Pressure high Vacuum low Vacuum high Filter gasket (ZX1-FG) : Hysteresis mode (same as for positive pressure use) When the value of hysteresis is set to 2 digits or less, the switching output might chatter due to fluctuation of the input pressure around its set point.