LEC-OM02704CN

S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1

Vacuum System Peripherals:

Customer name Contact person Sheet number P .O. number Equipment Quantity set(s) Date required Series ZM Manifold Specification Sheet Please fill in the order of q to w. q How to Order Manifold Fill in the blanks below with symbols of necessary specifications.

Table of Contents

W D 1.6 x P 0.1 x W + W D 5.0 x P 20Data W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-64.)

Modular F.R.L. Unit

Description Symbol Nil None AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size AW + [S] + AL AC20A to 40A S Body size Port size Pressure switch AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AF + AFM + [S] + AR AC20C to 40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S]

VZS

Sub-plate Assembly Plug-in Non plug-in VZS2000-P-01 VZS2000-S-01 Component Parts Mounting bolt and gasket are not attached. : Thread type No.

0.4

unit S kit P kit F kit L kit !

Series SV

PG PH 1 2 U D B Tie-rod base manifold: SS5V1-10 D (S, R, RS) Stations (-D) When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

JXCx-OMT0005CN

PLC <> 1 1ABS 2INC 2PLC 15ms 30ms 14.2[2] (P.54) No. (01-051) No.

Micro Mechanical Valve Series VM1000

F.O.F. 6 N 2.5mm[2mm] 4.8mm[2.5mm] 2.3mm[0.5mm] Roller lever VM1000-4N-01 VM1000-4NU-01 VM1100-4N-01 VM1100-4NU-01 Symbol/2 port 3 port (A) 2 (A) 2 12 12 10 10 1 (P) 1 (P) 3 (R) 0.5 MPa supply Applicable tubing VM1100-4N-01 VM1000-4N-01 T0425 TU0425, T0403, TS0425 Side ported 3 port 2 port VM1100-4NU-01 VM1000-4NU-01 T.T. O.T. P.T.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

N.O. 1 (P) 3 (R) 1 (P) 3 (R) q e t r q e t r SY SYJ VK A A VZ u u VT VT P R P R VP w w VG y y VP Component Parts Replacement Parts VQ Description Body Piston plate End cover Piston Spool valve ass'y Description Sub-plate Pilot valve Note White White White Note Zinc die cast Parts No.

modular-press-e

C3SF-J C4SF-J SMC C3SF-W C4SF-W K P C U O S L H o t C2SF-CJ C1SF-6 C2SF-6 C3SF-6 C4SF-6 A C2SF-6C The numbers are the same as the "Construction" of the Best Pneumatics No.5 Series AW.

Modular F.R.L. Pressure Control Equipment

C3SF-J C4SF-J SMC C3SF-W C4SF-W K P C U O S L H o t C2SF-CJ C1SF-6 C2SF-6 C3SF-6 C4SF-6 A C2SF-6C The numbers are the same as the "Construction" of the Best Pneumatics No.5 Series AW.

VS 8-2/VS 8-4

P.3, 12 P.3, 12 D-sub connector D-sub connector 25 pins 26 pins Terminal block is compactly arranged on one side. ( ( ) ) ( ) ( ) ( ) Conforming to MIL D-sub connector P.3, 13 P.3, 13 F kit Flat ribbon cable Flat ribbon cable Conforming to MIL flat ribbon cable connector P.3, 15 P.3, 15 P kit Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type

SFOD-OMT0005CN

(P.12) ) INP ON (INP 9.1 (P.32) PLC ) 5 3.(P.12) PLC (PLC) 2 11.4 (P.49) () 10.(P.41) 3.(P.12) -81- 5(P.23) 9.1 (P.32) 3.(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.

V

V A C U U M S W I T C H S E R I E S ZSE1 ZSE1--55 ZSE1 L Switch Type 55L E L E C T R I C A L E N T R Y Grommet (24) L Grommet (120) C w/Plug Connector (24) CL w/Plug Connector (120) CN Plug Type (w/o Lead) C O N N E C T I O N 00 NZM Ejector Mounting 01 1 8 PT T1 1/8 NPTF ACCESSORIES V A C U U M S W I T C H S E R I E S ZS S W I T C H T Y P E Interface plate for ZM Ejector P31806-01 (blank

CLA

lor 9~re lock- tAB ~ 01 9xhaust lockU>l: blank plug .H:h bre&li'lerj with Rod Boot p p p BN Z+ t+Stroke ZZ .. t f S f(Q/(e Stroke ra ~ (mmt ,-.ow "",.f I Bore size (mm) A DB BN BP BO DC 00 oE F GA GB GC GO GL GR J K LZ MM Without boot With boot 40 500 25-500 27 30 60 96 '/. y. 44 16 32 10 85 15 26 54 10 10 M8Xl.25 6 71 M14X1 .S 50 600 25-600 32 35 70 108 'I, 'I< 52 20 40 10

Modular Type Filter Regulator Series AW

Note 2) Bowl assembly for AWM30 and AWM40 comes with a bowl guard (steel band material). 69 Mist Separator Regulator AWM20/30/40 Dimensions H M AWM20 D T J N U Panel fitting dimension Bracket (option) S Y W IN OUT Z C Q P V Plate thickness AWM20: Max. 3.5 IN OUT K B Pressure gauge (option) OUT Pressure gauge port size Square embedded type pressure gauge (option) Port size O S Drain E Min

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

2-P Port size A B Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M M 2-J, thread depth K 2-J, thread depth K DIN terminal: D Conduit terminal: T D S F Q Cable 6 to 12 Q 2 F 34 G1/2 D 25 T C C R R Width across flats H Width across flats H E E S 2 2-P Port

IIIIIII

Cam Lever NVM121-NO1-02 = z-wayi 2 porl-lh" NPT w/One Way Cam Lever NVM131-N01-01 : 3-way; 2 porl:/e" NPT w/Std.

42

Locking type/Tool required SUP/EXH block plate Push type/Tool required SYJ Restrictor spacer Locking type/Manual External pilot 50/60 Hz 50/60 Hz Manifold SZ Grommet Plug-in VF VP4 VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ P.481 P.482 P.476 P.476 P.477 P.477 P.477 P.477 P.478 P.478 P.479 P.480 (Except S kit) (Except S kit) (Except S kit) (Except S kit) SQ VFS VFR VQ7 P.527 P.522 P.522 P.523