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(Example: If the Pressure switch with output impedance of 1k is connected to the A/D converter to detect the analog output of 5 V, the detected voltage by the A/D converter becomes 5(V) 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V.) Output impedance R The pressure range in which the Pressure switch satisfies the specifications.

Piping 01/N01 A B D ZS-24-A ZS-24-B ZS-24-D ZS-35-C ZS-35-D ZS-35-F ZS-35-G Bracket A Bracket B Bracket D E E Panel mount adapter Panel mount adapter + Front protective cover F W1/WF1/M5/C4/C6 Output specifications R T S V X Y NPN open collector 2 outputs + Analog voltage/Auto-shift switching PNP open collector 2 outputs + Analog voltage/Auto-shift switching NPN open collector 2 outputs +

SMC 50 35 5 SMC 6 28 (R) P P K U K C S U O C H L S O H L 38 AV AU Panel cut Panel thickness: Max. 4 Panel cut Panel thickness: Max. 3 34 AF 40 15.4 x 5.4 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR 8 x 6.5 79 13 45.5 VEX Atmosphere 106 G SET SET Pad side

-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Dual pressure is available only on external pilot. 5-6-3 Mechanical Valves Series VM Precautions Be sure to read before handling.

V V V V V V V V V V Standard CM2 V V V V V V V V V V V D CG1 v CJ2l-lA MB V v v v Note 8) 10-, 11CA2 CQ2 CQS v v v v v v v v v v v 25ALuberetainer 20JA v v v v v v v v v XB6 MXH v v v v v v v v XB7 MXQ v XB9 MGP XB13 CY CX v v v v XC3 CK1 C(L)K v v v v v v v XC8 C(L)KU v v v Note 9) XC9 CKQ v v v v v v v v v XC10 CKZ2N v v v Note 9) XC11 WRF v v v v v v v v

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Reversed output mode Refer to the "Hysteresis mode" and "Window comparator mode" in Technical Information on p.3.14-8. U Ripple A small AC voltage superimposed on top of a DC voltage. In case of Fig.4, ripple 10% means V' V" V'/V X 100 = 10% When no pulsation is happened, ripple is 0%. Unit conversion Refer to the Technical Information on p.3.14-13.

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

Year Month T : 2015 o: January U : 2016 P: February V : 2017 Q: March W : 2018 R: April X : 2019 Z: December -7- 5. Precautions for handling Fluid Warning (1) The operating fluids must be compressed air.

-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

6 600L/min(ANR) P Port exhaust *2 *2: Port thread type is the same as the thread type selected for 3). 3) Supply (P), vacuum (V) port / one-touch fitting port size Vacuum (V) port Supply (P) port 5) Combination of the supply valve and the release valve 06 Rc3/4 K1 Supply valve (N.C.) + Release valve (N.C.) 04 2xRc1/2 K2 Supply valve (N.C.) 8() F06 G3/4*1 B1 Supply valve (N.O.) + Release

Connector pin numbers -16No.PS-OMV1001-C Internal circuit and wiring example Z/ISE30A(F)X576 ~ X580 Output specification -N NPN open collector 1 output Max. 28 V, 80 mA Residual voltage 1 V or less -P PNP open collector 1 output Max. 80 mA Residual voltage 1 V or less -A NPN open collector 2 outputs Max. 28 V, 80 mA Residual voltage 1 V or less -B PNP open collector 2 outputs Max. 80 mA Residual

Year Month T : 2015 o: January U : 2016 P: February V : 2017 Q: March W: 2018 R: April X : 2019 Z: December -7- 5. Precautions for handling Fluid Warning (1) The operating fluids must be compressed air.

Year Month T : 2015 o: January U : 2016 P: February V : 2017 Q: March W: 2018 R: April X : 2019 Z: December -7- 5. Precautions for handling Fluid Warning (1) The operating fluids must be compressed air.

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa