Nozzle Diameter: ø1.3, Body Style: 1S (Single Unit w/Valve + High Noise Reduction Silencer), Vacuum Port Location: A (Side Entry), Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: G (Grommet Type w/0.3m Lead Wire), Light/Surge Voltage Suppressor: None, Manual Override: B

Nozzle Diameter: ø1.3, Body Style: 1S (Single Unit w/Valve + High Noise Reduction Silencer), Vacuum Port Location: A (Side Entry), Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage

Nozzle Diameter: ø1.3, Body Style: 1S (Single Unit w/Valve + High Noise Reduction Silencer), Vacuum Port Location: A (Side Entry), Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage

Nozzle Diameter: ø1.3, Body Style: 1S (Single Unit w/Valve + High Noise Reduction Silencer), Vacuum Port Location: A (Side Entry), Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: J (Supply Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor

Main Body Shape: Square Shape, Additional Function: Silencers / Filter / Valves for Vacuum Generation / Vacuum Destructive Valve, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 90, Vacuum Port Connecting Port Shape: Rc1/8, Air Supply Port Connecting Shape: Rc1/8, Application: Individual Item, Operating Pressure Range(MPa): null～0.7, Operating Temperature Range(°C): 5:50～, Suction

Main Body Shape: Square Shape, Additional Function: Silencers / Filter / Valves for Vacuum Generation / Vacuum Destructive Valve, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 90, Vacuum Port Connecting Port Shape: Rc1/8, Air Supply Port Connecting Shape: Rc1/8, Application: Individual Item, Operating Pressure Range(MPa): null～0.7, Operating Temperature Range(°C): 5:50～, Suction

Process Pump

How to use -P5. to 6 5. Maintenance and check -P.6 6. Specification and how to order P.6 to 7 7. Discharge capability P.8 to 9 8. Troubleshooting P.10 to 11 9. Construction and operating principle P.12 10. Operating principle -P.12 11.

PAB-OM-K007

Specification and how to order P5 to 6 7. Discharge capability P7 to 8 8. Troubleshooting P9 to 10 9. Operating principle P11 Safety instructions This operation manual indicates the precautions for safety use of process pump with the level of potential hazard as follows. Those precautions contain the content essential to keep safety.

PAB-OM-K008

Specification and how to order P5 to 6 7. Discharge capability P7 to 8 8. Troubleshooting P9 to 10 9. Operating principle P11 Safety instructions This operation manual indicates the precautions for safety use of process pump with the level of potential hazard as follows. Those precautions contain the content essential to keep safety.

IBV-OMY0015

IBV1 Series SMC Corporation 1.Index 1Table of contents P1 2Specifications P2 3Features P2 4External dimensions drawing P3 5How to mount a nozzle P4 6Relationship between Upstream Piping and Peak Pressure P5 7Safety Instructions P6~10 1 2.

High Vacuum L Type Valve

Valve size Valve size Material 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description

XL-OMY0001

1H-2 XLA80A-30-1H-2 11,2 FKM:No.1349-80[ ]P8 XLA16A-30-1-2-XN1 2 M9// XLA16-30-1-2M9// 3 XLA16A-30-1-2M9NA-XN1 412 / 1 / 2 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025** AS568-030** AS568-035** AS568-039** B2401-V15V B2401-V24V B2401-P42V AS568-227V 1 B2401-V15** B2401-V24** B2401-P42** AS568-227** B2401-P4V B2401-P5V B2401-P6V B2401-P8V 2 B2401-P4** B2401-P5

High Vacuum L Type Valve

Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5

XL-OMV0005

Maintenance parts list (Valve seal 1, 2 / External seal / Nut assembly) Description Valve size Valve size Material Part indication No. 16 25 40 50 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Standard AS568-025V

High Vacuum L Type Valve

Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5

FGD-C

FGDA(1 ) FGDB(2 ) 50mm Rc Rc 9/11 FGX-OM-L007-C 5. 1 1) 50mm 2) 0.02MPa 0.02MPa 3) 2 1) 2) 6. ,0.1MPa, 11 1) 2) oC 40 3) IN OUT 4) 5) 6) 7) *2 250mm 8) 21 1) 6 1 2) 3) 2 250mm * * 4) 5) *:FGDT/F 25NmFGDC/E 15Nm 10/11 FGX-OM-L007-C 3 1) 2) 7. 1 2 1 11/11 FGX-OM-L007-C Revision history A P6. 10 1 B P5. P6.1-2. P7.

FGE-C

FGE-KT002 FKM O V CY-24S SUS304/SWCH 001(FGESLA) 002(FGESLB) 003(FGESLC) FGE-CV SUS304 SUS304 M8X1.25XL30 SS400 M8X1.25 SS400 SS400 () 8/12 FGX-OM-L009-B 2 2 FGES L A FGES L B FGES L C 1) () (R) 12 (MPa) 0.7 () 80(60) 4 4 2)8 4 2)12 (mm) 6570250 6570500 (8 6570250) 6570750 (12 6570250) (MPa) 0.1 SUS304 SUS304 O FGESNBR FGELFKM SS400 (kg) 10 13 18 (L) 14 21 29 1) 2) 3) 3 1) (P5

IP80-OM00019

O 21 5. ( 3-1-2 ) 6. () ( 7-2) 22 11 11-1 OUT1OUT2 (1920) 6 90cm3 07 P36801080 P565010-18 180cm3 1 P36801081 P565010-19 O P5 19 20 (1) O (2) A (P22401123) 11-2 IP8100 IP8100 7 M P368010-24 S P368010-25 21 M 22 S M IP610 SIP610 23 11-3 IP8000 IP8000 8 1085mm P368010-20 35100mm P368010-21 50140mm P368010-22 11-4 (IP8*00-**0)2 9 (A) P368010-26 79 (B) P368010-27 911 G1/2 23 24

AIR CYLINDER

In this case, the rigidity of the machinery should also be examined. 9 - 7) How to order 25A D B 125 100 D-M9* C S2 Auto-switch Stroke Bore size Mounting bracket Built-in magnet Secondary battery production facility Air Cylinder Built-in magnet Bore size D Built-in magnet 125 125mm Nil Without magnet 140 140mm 160 160mm Mounting B L *Refer to Maximum stroke table(P5 Table 1) F G Auto-switch

LEC-T1_C

. -106090% -106090 113 - 8.5 5 P5 8.6 SVRE OFF [BK RLS]DC24V [BK RLS] [BK RLS] DC24V [BK RLS] EMG /LEC 114 - 9. 9.1 / 9.2 ON 115 - 5 () 116 - 9.3 50mm 9.4 ( ) 117 - 9.5 9.6 D 100 9.7 118 - 10. No.