A

2 / C Q 2 D O U B L E R O D C L E V I S P I N A C C E S S O R I E S S E R I E S N C Q 2 / C Q 2 J A M N U T CQ2 D O U B L E R O D C L E V I S P I N CQ2 J A M N U T Snap Ring t L m Part No Dd9 d Bore Size C H B Part No d Bore Size l -0.06 ~ -0.03 5 0.7 Axial C Style 5 14.6 1.5 IY-G012 4.8 12 9.2 4 8 NTJ-015A M5x0.8 10.2 12 -0.06 ~ -0.03 5 0.7 Axial C Style 5 16.6 1.5 IY-J015 4.8 16 11.5 5

NCQ2/CQ2

L F K M E J L Q Q A + Stroke B + Stroke A + Stroke B + Stroke W End Lock Mechanism Dimensions (mm) HN (Max.)

42

: 0.62(n1) + 2.6 F, L, T1 kits 12 stations L F kitD-sub connector L T kitTerminal block box L T1 kitIndividual terminal block kit L L kitLead wire L S kitSerial transmission 3/8 1/2 Side 3/4 Option Direct exhaust with silencer box SV VQ5l00 VQ5l01 T kit 12 stations VQ5000 VV5Q51-lll Not including valve weight.

Compact Cylinder

L F K M E J (Port size) L Q Q B + Stroke B + Stroke A + Stroke A + Stroke W End Lock Mechanism Dimensions (mm) HN (Max.)

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Table of Contents

0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10 30 50 70 90 90 70 Gripping point L (mm) Gripping point L (mm) 12-5-7 8 Series MHR2/MDHR2 Construction MHR2 q !

2/3 Port Valve

) Calculation by Cv factor Q=1972.8Cv(P1+0.1013)l/min(ANR) Calculation by effective area Q=109.6S(P1+0.1013) l/min(ANR) Water How to Read the Graph In case of a flow of 2 l/min.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

connector 2 to 15 Plug-in type VV5FR2-01(-Q) VFR200-F(-Q) 2 to 8 VFR2 10-G VFR210-E VFR210-T VFR210-D(-Q) VFR210-L VFR210-M Note) Side/Bottom 1 4 1 4 1 8, C6, C8 Non plug-in type VV5FR2-10(-Q) 2 to 15 Note) Side ported and bottom ported cannot be taken at the same time.

ZP

N Dimensions Per Vacuum Inlet Model E2 Width across flats L N P Q Fitting part min. hole size Vacuum inlet direction q Pad dia.

Table of Contents

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

Modular F.R.L. Units

L AF40-A AF20-A How to Order AF10-A AF A 30 q 03 e BD Option/Semi-standard: Select one each for a to f.

Table of Contents

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

High Vacuum Angle Valve

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

Compact Hydraulic Cylinder

+ l J H 2 x Rc P Keeper plate Air release CDH9/f8 MM mC D E e 10 f l Air release +0.4 +0.1 SS + Q + l + Stroke W W CX U NB NA T L K F S + Stroke MA ZZ + Q + l + Stroke mB Width across flats G RR SS + Stroke A ZZ + Stroke CHQ CHKm CHN CHM CHSm CH2m CHA Related Equipment D-m (mm) With rod boot Stroke range (mm) Bore size (mm) J e CX B C F GA GB NA NB P R S T CD RR SS L U W l f Q B-rod C-rod

Made to Order

Cylinders Mechanically Jointed Rodless Cylinder Stroke adjusting unit Bore size Type Model 10 16 20 25 32 40 L H L H L H L H L H L H L H L H L L L H L H L H L H L H L H L H L H 50 RJ1412H RJ1007H RJ1412H RB1007 RB1412 -XB22 MY1B-Z MY1H-Z RB1412 RB2015 Standard RJ0806H RJ1007H RB0806 RB1007 -XB22 RJ0805 MY1B Standard RB0805 RJ0806H RJ1007H RJ1412H RB1007 RB1412 RJ1412H -XB22 MY1M MY1C RJ1007H

CQ2

l X 140 l M6 X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 120 l X 145 l M8 X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l X 125 l X 150 l M10 X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l X 95 l X 130 l X 155 l M10 X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l X 95 l X 100 l X 105 l X 140 l X 165 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M3

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

Modular F.R.L. Unit

Unit AC20C to 40C Dimensions AC20C A Pressure gauge port size G Q F E T L P B C H IN OUT U H L J Pressure gauge (accessory) K M Square embedded type pressure gauge (accessory) Port size N Min. clearance for maintenance Drain Drain D Air filter Mist separator Regulator AC25C, 30C, 40C A Q G F E T Pressure gauge port size L P H B C OUT IN U H L Pressure gauge (accessory) K M Square embedded

Table of Contents

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

Battery-less

A + Stroke CL + Stroke 72 Battery-less Absolute (Step Motor 24 VDC) Guide Rod Type LEYG Series Model Selection Moment Load Graph Selection conditions Vertical Horizontal L L L m m L Mounting position m m Max. speed [mm/s] SpeedWork Load Graph 200 or less Over 200 Bearing Sliding bearing Graphs q, w Graphs t, y*1 Ball bushing bearing Graphs e, r Graphs u, i Graphs o, !