VM

VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust center) Rc 3/8: 49 Rc 1/2: 55 VH402-02 to 06 VH412-02 to 06 2 (Position) 1/4 to 3/4 2 1 1.28 VH4 Handle Operation Angle and Air Flow Direction VH420-02 to 06 VH430-02 to 06 3 (Closed center) (Refer to the figures of piping direction to the right.)

Air Fittings & Tubing

76.5 77 78 8 6 KM14-06-08-01S-3 31 39 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 43 44 66 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 94 95 98.5 88 89 90.5 10 8 KM14-08-10-02S-3 47 19 70 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19 15.2 52.6 18.5 12.8 21 KM15 Precautions

Vacuum Unit

B 78.8 Hexagon width across flats C E1 2 x 4.5 Mounting hole Air pressure supply (PV) port 4 19.4 27.5 (58.2) 45.9 8.4 PV port type B Metric size 06 6 9.7 Inch size 07 1/4" 12.3 16.5 38.5 3 15 Suction filter 3.5 78.8 A V port type A C Metric size 06 6 8.25 4 08 8 11.4 6 Inch size 07 1/4" 9.7 4.76 09 5/16" 11.4 6 3 Refer to page 38 for dimensions with a mounting bracket.

VFR

VFN Pilot type Nil R External pilot Internal pilot Plug-in VFR5000 P 06 Non plug-in VFS5000 S 06 Thread type Nil Rc Plug-in VFR5000 P B 06 G F N NPT Non plug-in VFS5000 S B 06 NPTF T Note) Bottom ported is not available for external pilot.

CG5-S

A A A A A A 10 Formic acid (25%, Room temperature) C C B C C D 11 Organic solvent Citric acid C C D A B A 12 Acetic acid (10%, Room temperature) A A C B B C 13 Lactic acid (5%, 20C) A A B B D A 14 Linseed oil C A C B A A 15 Potassium chloride A A A C B A 16 Calcium chloride A A A A B A 17 Other (oil, gas, etc.)

13

06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5 3

SY

(S = 0.25) AN120-M5 (Cv = 0.27) AS3001F-06 (S = 0.36) AN110-01 (Cv = 1.94) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Cv = 0.56) 8 x 1m AS3001F-08 (Cv = 0.56) AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN101-01 (Cv = 1.11) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 10 x 1m AS3001F-08 (Cv = 0.56) 12 x 1m AS4001F-10 (Cv = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36)

CG5-S

A A A A A A 10 Formic acid (25%, Room temperature) C C C C B D 11 Organic solvent Citric acid A B C C D A 12 Acetic acid (10%, Room temperature) B B A A C C 13 Lactic acid (5%, 20C) A B A B D A 14 Linseed oil A C C B A A 15 Polassium chloride A A A A C B 16 Calcium chloride A A A A A B 17 Other (oil, gas, etc.)

ZP

114.6 202.6 ZPR25D50-0-A10 Dimensions by Stroke One-touch Fitting 20, 25 32 J Model G H G H Model K L M U C ZPR 20-0-A10 U C ZPR 30-0-A10 U C ZPR 40-0-A10 U C ZPR 50-0-A10 U C ZPR 10-0-A10 ZPR-04-A10 68.6 23 102.6 69.1 103.1 4 10.4 23.3 ZPR-06-A10 78.6 140.6 79.1 141.1 6 12.8 24.3 51 8 15.2 26.2 ZPR-08-A10 88.6 150.6 89.1 151.1 98.6 186.6 99.1 187.1 77 108.6 196.6 109.6 197.1 13-11-40 41

AS

Model Meter-out type Rod and applicable tubing O.D. 4 6 ) ) 8 ) 10 ) Meter-in type AS1000P-04-04 AS2000P-04-04 AS2000P-06-06 AS2500P-06-06 AS3000P-08-08 AS3000P-10-10 AS1010P-04-04 AS2010P-04-04 AS2010P-06-06 AS2510P-06-06 AS3010P-08-08 AS3010P-10-10 ) ) The lock nut provides identification.

Magnetically Coupled Rodless Cylinder

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

Modular Type Air Filter Series AF

Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)

Table of Contents

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Hydraulic

-32 BAF-04 BAF-05 BAF-06 BAF-08 BAF-10 BGS1-032 BH2-040 BH2-050 BA-06 BH2-080 BH2-100 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BDS-04M BDS-05M BDS-06M BDS-08M BDS-10M BD1-04M BD1-05M BD1-06M BH1-080 BH1-100 40 25 to 800 1800 (1401 or more with tie-rod reinforcing ring) Note 1) 50

ZP

114.6 202.6 ZPR25D50-0-A10 Dimensions by Stroke One-touch Fitting 20, 25 32 J Model G H G H Model K L M U C ZPR 20-0-A10 U C ZPR 30-0-A10 U C ZPR 40-0-A10 U C ZPR 50-0-A10 U C ZPR 10-0-A10 ZPR-04-A10 68.6 23 102.6 69.1 103.1 4 10.4 23.3 ZPR-06-A10 78.6 140.6 79.1 141.1 6 12.8 24.3 51 8 15.2 26.2 ZPR-08-A10 88.6 150.6 89.1 151.1 98.6 186.6 99.1 187.1 77 108.6 196.6 109.6 197.1 13-11-40 Series

Secondary Batteries

With bracket a Option w Note) Applicable to 90-AF40-06, 90-AFM40-06 and 90-AFD-40-06.

Modular Type Filter Regulator Series AW

8 C J N R W Z AW10 AW30 to 40 B C D E G H 1 2 6 8 C J N R W Z Accessories Optional specifications 56 AW10 to 40 Standard specifications AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 Air 1.5MPa 1.0MPa 0.05 to 0.85MPa AW40 1/4, 3/8, 1/2 AW40-06 3/4 Model Port sizes Fluid Proof pressure Maximum operating pressure Set pressure range Pressure gauge port size Note 1) 0.05 to 0.7MPa Rc 1/16 Note 2)

Base Mounted Metal Seal/Rubber Seal Series VQ

Locking type (Manual) N.O N.O 2 VQ0 4 position dual 3 port valve (C) 2 position double Yes None Nil E Note) 4 2 C Note) 1 5 3 VQ4 D-sub connector AXT100-DS25-030 Cylinder ports C8: With One-touch fitting for 8 N.C N.O Rubber seal type only.

Metal Seal/Rubber Seal Series VQ Body Ported

Note1) C kit only.

Compact Manifold Regulator Series ARM5

ITV IC SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC SMC SMC SMC SMC MADE IN JAPAN PVQ K K K P P P C C C U U U K K K P P P O O O S S S C C C L L L H H H U U U O O O S S S L L L H H H VEF VEP Front handle/Bottom ported Front handle/Top ported Mixed manifold Mixed manifold Types and sizes of the One-touch fittings can be changed.