IIIIIII

133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02-07 230-N02-07 Panel Mounling Panel Mounting F O F ' 1 2 3 s l b s ( 5 6 k 9 ) P T 0 138 in (3 5mm) o,T 0 079 in (2mm) T T 0 216 in (5 5mm) F O F ' 2 6 5 l b s , ( 1 2 k g ) T T 60" '75 PSIG (5 Kgf/cm2) '75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G

Mechanical Valves Series NVM, NVFM, NVZNI

133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02-07 230-N02-07 Panel Mounling Panel Mounting F O F ' 1 2 3 s l b s ( 5 6 k 9 ) P T 0 138 in (3 5mm) o,T 0 079 in (2mm) T T 0 216 in (5 5mm) F O F ' 2 6 5 l b s , ( 1 2 k g ) T T 60" '75 PSIG (5 Kgf/cm2) '75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS1002FS-01 1/8" 8.4 6.7 9.5 3.3 5.5 9.4 10 36.6 5.1 11.8 36.4 33.9 11 15.4 8.8 10.1 13.5 13.6 15.1 5.5 9.6 5.2 AS1002FS-03 5/32" 9.3 7.7 10 37.6 5.5 AS1002FS-07 1/4" 12 10.9 40.1 6.2 12.9 37.5 35 12.8 6.7 AS2002FS-03 5/32" 9.3 7.7 10 3.3 5.5 12 12 41.3 6.3 13.4 44.5 43 12.6 17 10.5 12.3 13.5 20 21.5 6.5 15 9.5 AS2002FS-07 1/4" 12 10.9 43.2 6.5 13.6 44.7 43.2 12.8 10.6 AS2052FS-07 1/4"

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Note 5) 3/16", 3/8", 1/2"are made of brass AS131F (3.2, 4, 6, 1/8", 5/32, 1/4), AS231F-01(3.2, 4, 6, 1/8", 5/32) are POM. 15-9-5 5 Series AS Elbow Type M3 port M5 port U10/32 port Applicable tubing O.D. d (Hexagon width across flats) Applicable tubing O.D. d (Hexagon width across flats) Metric Size Inch Size Applicable tubing O.D. d 1/8" Applicable tubing O.D. d A(2) Weight (g) T D1 H(1)

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

LEC-OM069xx

i s p l a y a n d SigmaWin+TM 2.

F

O N E-T O U C H F I T T I N G S 1F NAS A R E A C O D E A P P L I C A B L E T U B E OD Japan, Asia, Australia, UK N Canada, USA MM 23 3.2 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 B O D Y S I Z E 1 M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03 ..3/8 U04 ..1/2 U32 ..10-32UNF 01 ...

Vacuum Unit Ejector / Vacuum Pump System

KQ2P 06 Model and Dimensions Symbol Applicable size d A L D Weight (g) Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4 18 35 8.5 1 Orange 09 5/16 20.5 39 10 2 Orange -40No. ZK2-OM00201 8. Maintenance 8.1.

JXCx-OMX0009

C to 9 (No used) D Data editing error receiving E Parameter anomaly detection As same as Single numerical data instructions.

JXCx-OMT0061CN

) 2 2 3 3 4 READY 4 5 ALARM 5 6 6 7 7 0 0 8 8 9 9 A A () B B C C D D 1 E E 2 F F 0 1 F0 1 71 () F8 2 F0 2 F0 (1 )*2 (2 ) *1 3 F0 3 F0 ()*2 *1 RWw0,bit4F: 12 *2 RWw0,bit4F: 93 - (2)[IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP

JXCx-OMT0062

*1) Procedures for resuming operation when alarm group D is generated 1.

EXxx-OMN0035CN

) ST(I) (07 ) ST(O) ON/OFF (07 ) ST(I) ON/OFF (07 ) ST(O) (07 ) (SI ) -52No.EX-OMN0035CN-A OFF (LED 0707) ON (LED 07) ()07 ON (LED 07) ()07 (SI ) -53No.EX-OMN0035CN-A EX600-DMPE EX600-DMNE EX600-DMPF EX600-DMNF PNP NPN PNP NPN D-sub(25 ) No.4-40 UNC (32 ) 8 () DC24 V Class22 A 2 A/ 0.5 A/ 2 A/ 4.7 k 5 mA ON /ON 17 V /3 mA (NPN 24 V ) (PNP 0 V ) OFF /OFF 5 V /1 mA (NPN

Speed Controller with Uni One-touch Fitting AS Series

M Weight (g) Model Applicable tubing O.D. d T Uni thread 1 8" AS221F-U01-01 AS221F-U01-03 AS221F-U01-05 AS221F-U01-07 AS221F-U01-09 AS221F-U02-03 AS221F-U02-05 AS221F-U02-07 AS221F-U02-09 AS221F-U02-11 AS321F-U02-07 AS321F-U02-09 AS321F-U02-11 AS321F-U03-07 AS321F-U03-09 AS321F-U03-11 AS421F-U04-11 AS421F-U04-13 7.8 8.9 11.4 13.2 15.2 8.9 11.4 13.2 15.2 17.9 13.2 15.2 17.9 13.2 15.2 17.9

LEC-OM02704CN

P-D 1 P P C C G3 D (2) 1) G4 5m (1) 1.

2/3 Port Valve

Note 3) "D", "E", "N", "P" etc. in the parenthesis are option symbols.

Vacuum

lhe body D-97 Contact Protection Box a D-9 type switches have no internal conlact proteclion cicuit.

Vacuum

lhe body D-97 Contact Protection Box a D-9 type switches have no internal conlact proteclion cicuit.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

One-touch Fittings Series KQ2

D .

High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)