Hydraulic

U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

Base Mounted Metal Seal/Rubber Seal Series VQ

Unused A Unused A A A B A B A B A B A B A B A VQC Double Double Double Double Single Single Single Single Single Single SI unit SI unit SQ Stations 1 2 3 4 5 Stations 1 2 3 4 5 VQ0 Single/Double mixed wiring (Option) Double wiring (Standard) VQ4 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System VQ5 VQZ ADDRESS NO. STATION NO.

Metal Seal/Rubber Seal Series VQ Body Ported

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

ZP

C D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U

Pulse Valve

A For 3 mm to 5 mm Port size: 06, 10 55-JSXFA B A Enter the standard product number.

Compact Manifold Regulator Series ARM5

u A B N 1.

Compact Hydraulic Cylinder

27.5 B 17 19 18 23.5 A 13.5 11.5 18.5 23 B 12.5 14.5 13.5 19 B 9 11 10 15.5 B 7 9 8 13.5 B 13 15 14 19.5 A 14.5 12.5 19.5 24 B 13.5 15.5 14.5 20 B 7.5 9.5 8.5 14 B 10.5 12.5 11.5 17 B 7 9 8 13.5 A 8 6 13 17.5 A 14 12 19 23.5 A 8.5 6.5 13.5 18 A 11.5 9.5 16 21 A 8 6 13 17.5 20 25 32 40 Note) When setting an auto switch, be sure to check its operation before adjusting.

V100

Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

2/3 Port Valve

Class B H B Class H DIN connector or DC not available.

F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

AW

Note) B Note) B Note) B Note) B Note) AW10 AW20(K) AW30(K) AW40(K) AW40(K)-06 AW60(K) 125 177 242 278 282 448 209 247 251 417 164 208 246 249 416 107 160 214 252 255 422 234 272 275 442 AV AF800 AF900 Note) The total length of B dimension is the length when the filter regulator knob is unlocked. 373 Filter Regulator AW20 to AW60 Made to Order Specifications: Please contact SMC for detailed

High Purity Chemical Valve

LVC B A B A B A PB Double acting N.C. N.O. Double acting LVA With flow rate adjustment PA PA N.C. B A PB B A Double acting LVH N.C. Double acting With bypass PA PA N.C. LVD PB B A B A Double acting N.C. Double acting With flow rate adjustment & bypass LVQ PA PA N.C. PB B A B A Double acting N.C. Double acting LQ1 With indicator PA N.C. B A LVN N.C.

90

Refer to Fig.1 ) 3) Remove the junction box B (top) for all stations using a precision screwdriver. (Refer to Fig.2 ) (Remove the junction box B from D side.) 4) Remove all connectors mounted to the junction box B.

Modular Type Air Filters Series AF

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S M5 x 0.8 1/8 1/4 Barb fitting Applicable tubing: T0604 10 one-touch fitting Width across flats 17 Width across flats 14 Model Standard specifications Optional specifications Bracket mount With auto drain P A B C D E G J M N Q R S T U V B AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 M5 x 0.8 25 67 7 12.5 25 12.5 85 AC 1/8, 1/4 40 97 10 20

VEX1

-20 VEX5504 06 10 VEX57-10 12 14 20 VEX591978 Power Valve: Economy Valve Series VEX5 How to Order How to order pilot valves VEX5 1 06 2 E Z 5 1 B SF4 20 Option Economy valve Light/Surge voltage suppressor None Nil Bracket B G Pressure gauge Electrical entry Rated voltage Light/Surge voltage suppressor (Only with solenoid) Type (Ex.)

Flow Control Equipment

AQ340F-06 04 06 06 4.3-3 4.0-2 Precautions Be sure to read before handling.

AR Series Modular Type Regulator

Modular Type Regulator AR Series AC-A Regulator AR Series AF-A Model Port size Options AF-A AR10-A M5 x 0.8 AR-A AR-A AL-A AR20-A 1/8, 1/4 AW-A Bracket AC-B AF-A AR25-A AF-A 1/4, 3/8 Round type pressure gauge AR -A -B AR30-A AL-A Set nut (for panel mount)* AW -A -B AR40-A 1/4, 3/8, 1/2 AW AG AR40-06-A 3/4 * For AR20-A to AR40-06-A, panel fitting dimensions are different from those of the

Series VQ Base Mounted Metal Seal/Rubber Seal

A B A B A Void A Void A B A B A B A A A B Double Double Double Double Double SY Sl unit Sl unit Single Single Single Single Single SYJ Stations Stations 1 2 3 4 5 1 2 3 4 5 Single/Double mixed wiring (Option) Double wiring (Standard) SX SC applicable to SYSBUS Wire System (OMRON) SD applicable to Satellite I/O Link System (Sharp) VK VZ ADDRESS NO. STATION NO.

SX

141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold) (A, B port) (A, B port) 2-One-touch fittings

Table of Contents

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.