E-P HYREG ® Series VY1 1

A port: n-Rc 1/8 Note for P1 Confirm internal pilot or common external pilot by checking whether P1 has a M5 screw or not. Internal pilot P1 has no M5 screw. Common external pilotP1 has an M5 screw.

Modular Type Lubricators Series AL

AL30 Rc 3/8 AL60 Rc 1 0.1 0.1 P1 = 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.08 0.08 P1 = 0.5 MPa Selection P1 = 0.3 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 = 0.1 MPa Warning 1. Do not introduce air from the outlet side as this can damage the damper. 0.06 0.06 P1 = 0.1 MPa 0.04 0.04 Caution 1.

Process Pump

For AIR EXH: AN20-02 (: Either Nil or N is entered as a thread symbol.)

42

Note Option mounting diagram Single valve AXT632-17-4 (M3 x 37) 3 Valve 0 Blanking plate (VVQ4000-10A1 5 ) AXT632-38-1 (M3 x 14) 4 For manifold Blanking plate Valve + Individual SUP spacer (VVQ4000-P1 5 02 03 ) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x 26) 2 Valve + Individual EXH spacer (VVQ4000-R1 5 -02 03) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Grommet terminal: Double VFS2210-E-01 02 Closed center VFS2310-E-01 02 Exhaust center VFS2410-E-01 02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 With light/surge voltage suppressor 151 (3 position: 159) Lead wire O.D.

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

AC Servo Motor Driver (CC-Link Type ）

Servo amplifier Servo motor Driver M 4) P1-P2 (For 11kW or more, P1-P) should be connected. Driver Servo amplifier P1 P2 (c) When option and auxiliary equipment are used 1) When regenerative option is used under 3.5kW for 200V class The lead between P terminal and D terminal of CNP2 connector should not be connected.

IR1000/2000/3000

rate ( /min (ANR)) Supply pressure P1 (MPa) VY1 IR2020-02 IR2020-02 IR2020-02 Supply pressure 1.0 MPa Back pressure: 1.0 MPa 1.0 G 0.8 0.204 0.9 0.7 Set pressure P2 (MPa) 0.8 PPA Set pressure (MPa) Set pressure (MPa) 0.6 0.202 0.7 Set point 0.5 AL 0.6 0.200 0.5 0.4 0.4 0.3 0.3 0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7

Magnetically Coupled Rodless Cylinder

Port P2 Port P1 Port P2 Port P1 P1 P2 P2 P1 P2 P2 P1 P2 Port P2 Port Operating direction Operating direction Operating direction Operating direction P1 Pressure is applied P1 Pressure is applied P1 Pressure is applied P1 Pressure is applied P2 Pressure is applied P2 Pressure is applied P2 Pressure is applied P2 Pressure is applied Features 1 Features 1 3-Options available for stroke adjustment

I

ZSE5-02-27L Two Output NPN Open Collector 30V, 80mA ZSE5-02-67L Two Output PNP Open Collector 80mA ISE5-02-26L None (Analog Output) 1~5V(5%F.S.)

Precision Regulator

100 200 300 400 0 100 200 300 400 500 600 700 Supply pressure P1 (MPa) Flow rate (L/min (ANR)) Relief flow rate (L/min (ANR)) IR-A IR2010-02 IR2010-02 IR2010-02 Supply pressure: 0.7 MPa Back pressure: 0.7 MPa IR IR 0.7 0.204 0.4 IRV 0.6 Set pressure (MPa) Set pressure P2 (MPa) 0.202 0.5 VEX Set point 0.3 0.4 0.200 SRH 0.2 0.3 0.198 SRP 0.2 0.1 0.1 SRF 0.196 0 100 200 300 400 500 0 0.2 0.1

1

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

IR1000/2000/3000

800 900 1.0 0 100 200 300 400 500 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa IR2020-02 IR2020-02 IR2020-02 Conditions: Supply pressure 1.0MPa Conditions: Back pressure 1.0MPa 1.0 0.8 0.204 0.9 0.7 Set pressure P2 MPa Set pressure MPa 0.8 Set pressure MPa 0.6 0.202 0.7 Setting point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.3 0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600

Precision Regulator Series IR1000/2000/3000

/min (ANR)) Relief flow rate (l /min (ANR)) Supply pressure P1 (MPa) IR2010-02 IR2010-02 IR2010-02 Supply pressure: 0.7 MPa Back pressure: 0.7 MPa 0.7 0.204 0.4 0.6 Set pressure (MPa) Set pressure (MPa) Set pressure P2 (MPa) 0.202 0.5 Set point 0.3 0.4 0.200 0.2 0.3 0.198 0.2 0.1 0.1 0.196 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 100 200 300 400 500 600 700 800 900 1.0

Power Valve Precision Regulator

N Port P1 0 3 ITV Thread type Fittings for M5 IC Nil F N T Rc G Note 1) Body size Port size Body size Port Port size 1(P), 2(A) 3(R) ITVH NPT NPTF 8 1 01 02 02 03 04 04 06 10 10 12 14 20 Nil 01 02 ITVX 1 4 1 For VEX13 (NBR seals) Fixed orifice assembly (with O-ring) part no.: VEX1-A30-3 For VEX1 33B (FKM seals) Fixed orifice assembly (with O-ring) part no.: VEX1-A30-3B

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

30 30 Example 2 20 20 P1 = 0.5 MPa P1 = 0.4 MPa Example 1 10 10 P1 = 0.3 MPa P1 = 0.2 MPa 5 4 5 4 P1 = 0.1 MPa 3 3 2 2 1 1 Glossary of Terms 0.002 0.003 0.02 0.03 0.04 0.004 0.001 0.01 0.1 Pressure differential P [MPa] Graph (2) Flow rate characteristics Example 1) Obtain the pressure difference when 15 [L/min] of water runs through a solenoid valve with a Kv = 1.5 [m3/h].

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

IDG

state (AMH) Element saturated state (AFM, AFD) Element initial state (AFM, AFD) P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.12 0.12 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.10 0.10 0.08 0.08 0.06 0.06 0.04 0.04 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.02 0.02 100 200 300 400 0 400 800 1200 1600 0 Inlet air flow rate

Series IDG

(AFM, AFD) 0.12 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa 0.08 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa Pressure drop MPa Pressure drop MPa 0.10 0.06 0.08 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa 0.06 0.04 0.04 0.02 0.02 0 80 160 240 200 400 600 800 0 Inlet air flow rate l/min (ANR) Inlet air flow rate l/min (ANR) IDG75M, 75V (standard dew point 20C (4F)) IDG75HM, 75HV

AC Servo Motor Driver (CC-Link Type ）

For 3-phase or 1-phase 200 to 230VAC 40 For 1-phase 100 to 120VAC PE terminal 6 L1 L1 L2 2-M5 screw L2 L3 CNP1 CNP1 Screw size: M4 Tightening torque: 1.2 [N m] (10.6 [lb in]) N N P1 P3 P1 Screw size:M4 Tightening torque:1.2[Nm] P4 P2 P2 P P C C CNP2 CNP2 D D L11 L11 L21 L21 Mounting hole process drawing Mounting hole process drawing Mounting screw Screw size: M5 Tightening torque: 3.24[N