KQ2-G

Gasket for M5 thread: M-5G2 E Bulkhead union v v Bulkhead connector v v A KQ2 H 06 00 1 4, 6 (Oval type release button) Oval type release button KQ2 H 08 00 A 8 to 16 (Round type release button) Port size/Applicable tubing O.D.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Description Material Part no. 5 6 7 8 Note Valve seat U seal O-ring Gasket Brass HNBR NBR NBR/Stainless steel 1429138 142964-3 KA00327 M-5G2 9 x 7 x 1 Note) Construction drawing: AS1000-M5-N In case of AS1000-M5, nipples and gaskets are not attached. 527 Series AS Construction: AS2000/3000 Component Parts No. Description Parts no.

Speed Controller: Standard Type In-line Type AS Series

Description Material Part no. 5 6 7 8 Note Valve seat U seal O-ring Gasket Brass HNBR NBR NBR/Stainless steel 1429138 142964-3 KA00327 M-5G2 9 x 7 x 1 Note) Construction drawing: AS1000-M5-N In case of AS1000-M5, nipples and gaskets are not attached. 651 AS Series Construction: AS2000/3000 Component Parts No. Description Parts no.

Manifold Specifications

(Manifold base) VZ5140-5G2 pcs. (Valve) DXT199-22-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

S Couplers Series KK/KKH/KK13

3 Gasket M-5G2 T Electroless nickel plated KK3/4/6 i q u !3 !7 !1 r !6 t y !2 e !4 !5 !4 !5 !

VALVE, HIGH VACUUM, HIGH VACUUM VALVE, 330 lb

N.C. High Vacuum Solenoid Valve, HIGH VACUUM VALVE, L53, 0.33 lb

N.C. High Vacuum Solenoid Valve, HIGH VACUUM VALVE, 0.33 lb

N.C. High Vacuum Solenoid Valve, HIGH VACUUM VALVE, L53, 0.33 lb

N.C. High Vacuum Solenoid Valve, HIGH VACUUM VALVE, 0.33 lb

N.C. High Vacuum Solenoid Valve, HIGH VACUUM VALVE, L53, 0.33 lb

VALVE, HIGH VACUUM, VACUUM SERIES, XSA HIGH VACUUM VALVE, 1X, XSA OTHER SIZE RATING, 0.86983 lb

VALVE, HIGH VACUUM, VACUUM SERIES, XSA HIGH VACUUM VALVE, 1X, XSA OTHER SIZE RATING, 0.97003 lb

VALVE, HIGH VACUUM, VACUUM SERIES, XSA HIGH VACUUM VALVE, 1X, XSA OTHER SIZE RATING, 1.0127 lb

VALVE, HIGH VACUUM, VACUUM SERIES, XSA HIGH VACUUM VALVE, 1X, XSA OTHER SIZE RATING, 0.88184 lb

N.C. High Vacuum Solenoid Valve, HIGH VACUUM VALVE, 0.33 lb

VALVE, HIGH VACUUM, VACUUM SERIES, XSA HIGH VACUUM VALVE, 1X, XSA OTHER SIZE RATING, 0.88184 lb

N.C. High Vacuum Solenoid Valve, HIGH VACUUM VALVE, L53, 0.28000 lb

N.C. High Vacuum Solenoid Valve, HIGH VACUUM VALVE, L53, 0.28000 lb

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 1 (1/8), Fitting Type: N (NPT Female Thread), Voltage: 5 (24 VDC), Electrical Entry: DL (DIN Termianl w/Light, w/Surge Voltage Suppressor)