Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Compression Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Face Seal Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

M Series

X83 M3 Note 1) M-3G2 M5 Note 2) M-5G2 X226 Gasket material: Stainless steel 304, FKM Applicable thread Gasket part No. M3 M3G-DPH00489 X112 Gasket material: Stainless steel 316, special FKM Applicable thread Gasket part No. M5 M-5G3 Note 1) Compatible with models using M3 excluding M-3-2.

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

M5 M-5G2 Gasket material: Stainless steel 316, Special FKM X112 Applicable thread Gasket part no. M5 M-5G3 Suffix -X83 to the end of part number. Example) MS-5AU-4-X83 Spare Parts Description Part no.

V100

(Valve) VZ314R-5G2 pcs. (Valve) DXT200-8-6A1 pc. (Blanking plate assembly) DXT200-8-3A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

VZ100/300/500

(Valve) VZ314R-5G2 pcs. (Valve) DXT200-8-6A1 pc. (Blanking plate assembly) DXT200-8-3A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

VQ4000

VQ 4 5 G 1 5 0 Enclosure Series Connector kit Nil Dusttight 4 VQ4000 VV5Q45-05C12C1 set VQ4150-5G2 sets VQ4250-5G2 sets VQ4350-5G1 set Manifold base part no. Valve part no. (Stations 1 and 2) Valve part no. (Stations 3 and 4) Valve part no.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ 4 5 G 1 5 0 Enclosure Series Connector kit Nil Dusttight 4 VQ4000 VV5Q45-05C12C1 set VQ4150-5G2 sets VQ4250-5G2 sets VQ4350-5G1 set Manifold base part no. Valve part no. (Stations 1 and 2) Valve part no. (Stations 3 and 4) Valve part no.

45

SX3140-5G2 sets (Single solenoid part no.) SX3240-5G2 sets (Double solenoid part no.) One-touch fitting for 6 C6 SX3000 Mixed M One-touch fitting for 4 C4 One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M SX5000 The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Vacuum Pad with Ejector

.: M-5G2 Button head screw Part No.: CC00131 5 Button head screw (5) Remove the button head screw with a hexagon bar wrench (with across flat 2.5mm).

One-touch Fittings

Gasket for M5 thread: M-5G2 E Bulkhead union v v Bulkhead connector v v A KQ2 H 06 00 1 4, 6 (Oval type release button) Oval type release button KQ2 H 08 00 A 8 to 16 (Round type release button) Port size/Applicable tubing O.D.

* 1 XSA Series Normal Close High Vacuum Solenoid Valve

XSA1 XSA1R-8-1 XSA2 XSA2R-8-1 XSA3 *1 Not CE-compliant For the special option below, refer to page 7. Special electrical entry direction 2

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: B (24 VAC), Electrical Entry: C (Conduit w/Surge Voltage Suppressor), Special Electrical Entry: A (90°), Spacer: A (w/Spacer)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 6 (12 VDC), Electrical Entry: C (Conduit w/Surge Voltage Suppressor), Special Electrical Entry: None, Spacer: A (w/Spacer)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 6 (12 VDC), Electrical Entry: G (Grommet), Special Electrical Entry: None, Spacer: A (w/Spacer)

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 24 VAC, Electrical Entry: Conduit w/Surge Voltage Suppressor, Special Electrical Entry: 90°, Spacer: w/Spacer

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 12 VDC, Electrical Entry: Conduit w/Surge Voltage Suppressor, Special Electrical Entry: None, Spacer: w/Spacer

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 12 VDC, Electrical Entry: Grommet, Special Electrical Entry: None, Spacer: w/Spacer

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Special Electrical Entry: None, Spacer: A (w/Spacer)

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Special Electrical Entry: None, Spacer: A (w/Spacer)