Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  The XLFV valves are single-acting, normally closed. 

Suction Guard (Produced upon receipt of order) FHG Series

1 1/4B to 2B CW-5H-W Phosphoric ester CW-5H-V PAT.

Speed Controller with One-touch Fittings

Applicable series AS-10D AS-20D AS-25D AS-30D AS-40D AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F AS2002F AS2052F AS3002F AS4002F DIN rail mounting bracket L-bracket Bracket for AS1002F-02 is not available. Prepare DIN rail by user.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Applicable model AS-10L AS1002FS AS-20L AS2002FS AS-25L AS2052FS AS-30L AS3002FS AS-40L AS4002FS Part no.

MY1

Floating with flat bar Floating with round bar Bracket +0.3 40+0.1 112 +0.3 20+0.1 150 Floating bracket positioning pin (10 x 18L) Bracket mounting hole (80) Hexagon socket head cap screw (M10 x 1.5 x 40L) Bracket mounting hole (100) Hexagon socket head cap screw (M12 x 1.75 x 40L) Support bracket 31 18 C B A Hexagon socket head cap screw tightening torque Unit: Nm Applicable cylinder MY1B

Speed Controller with

Applicable series AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L AS-10D AS-20D AS-25D AS-30D AS-40D AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F AS2002F AS2052F AS3002F AS4002F DIN rail mounting bracket L-bracket Prepare DIN rail by user. Bracket for AS1002F-02 is not available.

Speed Controller with

Applicable model AS-10L AS1002Fm AS-20L AS2002Fm AS-25L AS2052Fm AS-30L AS3002Fm AS-40L AS4002Fm Part no.

4-channel Flow Monitor ( compatible)

Item Display Content Setting of connection product [4L] 4 L range [16L] 16 L range [40L] 40 L range [PFW] is selected [100L] 100 L range [250L] 250 L range [10L] 10 L range [rAnG] [50L] 50 L range Selection of flow range [100L] 100 L range [PFA] is selected [200L] 200 L range [500L] 500 L range [4L] 4 L range [PFd] is selected [16L] 16 L range [40L] 40 L range Press the SET button to set.

Low Maintenance Filter Series FN1

Maximum flow rate: 40l/min, 80l/min. Features 1 Operating principle Flow flow Air flow Filtering Back-flushing Cylinder Cylinder The element compressed by the cylinder filters the fluid. As the cylinder extends downward, the element is decompressed. Air pressure forces the fluid in the reservoir out to the filter and back-flushes the element. Automatic back-flushing.

PF2D

Rated flow range of sensor Set flow rate range of sensor Sensor 4L/min 20L/min 40L/min 1.8L/min 0.4L/min Flow rate range 10L/min 0.4L/min 4L/min PF2D504 0.25L/min 4.5L/min 1.8L/min 20L/min PF2D520 1.3L/min 21L/min 4L/min 40L/min PF2D540 2.5L/min 45L/min Flow Rate Characteristics (Pressure Characteristics) PF2D504 PF2D520 PF2D540 0.040 0.035 0.030 0.035 0.030 0.025 Pressure loss [MPa] Pressure

Clean Exhaust Filter

Max. flow capacity L/min (ANR) 3F 4 30 4G 6 65 5H 8 130 7J 10 200 Plug-in type Bracket SFE-BR 3 Symbol Applicable model 3 SFE3l 4 SFE4l 5 SFE5l 7 SFE7l One-touch fitting type Specifications Model SFE11 SFE3 SFE4 SFE5 SFE7 Fluid Note 1) Air Maximum flow capacity Note 2) Up to 3 L/min (ANR) Up to 30 L/min (ANR) Up to 65 L/min (ANR) Up to 130 L/min (ANR) Up to 200 L/min (ANR) Filtration rating

CG5-S

-4 For piping nylon, soft nylon and polyurethane tubing For piping soft nylon tubing For piping polyurethane tubing Barb tee for soft tube 3.18/2.18 x M5 MS-5H-6 6/4 x M5 MS-5ATHU-3 3.18/2 x M5 Unrestricted 360 positioning and fastening around the stud axis Hose elbow For piping nylon, soft nylon and polyurethane tubing MS-5HLH-4 4/2.5 x M5 4/2.5 x M5 MS-5ATHU-4 For piping soft nylon and

F

-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture M-3G (above) Use with M-5HL Uses Gasket M-5GH Courtesy of Steven Engineering, Inc. !

Shock Absorbers and Rate Controls

(Bl lndicates button mode oi shock aGoioer Buttons cnnot be added to non-butlon models or removed from button models Alldimensbns rn nches 2. ijiethane str ker caos a availabe as accessories for models PRO120 to PRO225 5h#e${. Absorbers Adjustable Hydraulic Series qig{c. I PRO Series PRO110|\4 -.-' PRO225M Metric *Notei 41 and t1 apply to urethane slfiker cap accessory. (tr) fiox.

CATALOG

-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture M-3G (above) Use with M-5HL Uses Gasket M-5GH Courtesy of Steven Engineering, Inc. !

CA2

Stroke (mm) Pulling force Bore size (mm) 40, 50, 63 80, 100 Thread size 3 10 N M3 x 0.5 x 30l or more 3 24.5 N M5 x 0.8 x 40l or more Remove the bolt for normal operation. It can cause lock malfunction or faulty release. Rubber cap 2. Manual release lock type Push the M/O knob and turn it 90 counterclockwise.

Table of Contents

M2.5 x 0.45 x 25l or more 20, 25, 32 4.9 N 2 M3 x 0.5 x 30l or more 40, 50, 63 10 N 3 M5 x 0.8 x 40l or more 80, 100 24.5 N 3 5. Do not operate multiple cylinders in synchronization. Avoid applications in which two or more end lock cylinders are synchronized to move one workpiece, as one of the cylinder locks may not be able to release when required.

MG

M2.5 x 0.45 x 25l or more 20, 25, 32 4.9 N 2 M3 x 0.5 x 30l or more 40, 50, 63 10 N 3 M5 x 0.8 x 40l or more 80, 100 24.5 N 3 5. Do not operate multiple cylinders in synchronization. Avoid applications in which two or more end lock cylinders are synchronized to move one workpiece, as one of the cylinder locks may not be able to release when required.

Supply Unit: W (Flow Adjustment Valve + Stop Valve), Rated Flow Range: 40 (5~40L/min), Thread: N (NPT), Port Size: 06 (3/4)

Supply Unit: W (Flow Adjustment Valve + Stop Valve), Rated Flow Range: 40 (5~40L/min), Thread: N (NPT), Port Size: 04 (1/2)