By combining the reference points of these two pieces of data, you will be able to see the CAD data of the SY5140-5LZ-02.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 40, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance

CNA

71 61 5 4 MIGAKIMARU Polish 16 MXS m l 4 X 25l 76.5 66.5 5 4 MIGAKIMARU Polish 18 L 4 X 25l 83 73 5 4 MIGAKIMARU Polish 20 MXQ 4 X 36l 88 78 5 4 MIGAKIMARU Polish 24 MXF MXW I Type Single Knuckle Joint Rod End Nut (Standard option) NDH10 MXP 30 MM RR1 45 d MG E1 MGP D C U1 NX A1 L1 MGQ H B A MGG Material: Sulful free-cutting steel Material: Rolled steel material (mm) (mm) MGC Bore size (

CNA

Dd9 3 x 18l 0.040 0.076 10 40 50 63 80 100 CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 40, 50, 63 80 100 Polished round 10 3 4 46 38 3 x 18l 0.050 0.093 12 Polished round 12 3 4 55.5 47.5 4 x 25l 0.050 0.093 16 Polished round 16 4 5 71 61 4 x 25l 0.050 0.093 18 Polished round 18 4 5 76.5 66.5 m l 4 x 25l 0.065 0.117 20 Polished round 20 4 5 83 73 L 4 x 36l 0.065 0.117 25 Polished round

CV/MVGQ

Dd9 Knuckle 40, 50, 63 80 100 3 x 18l 3 x 18l 4 x 25l 4 x 25l 4 x 30l 4 x 36l CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 10 0.046 0.076 12 0.050 0.093 16 0.050 0.093 18 0.050 0.093 20 0.065 0.117 25 0.065 0.117 46 55.5 71 76.5 83 88 4 4 5 5 5 6 3 3 4 4 4 4 38 47.5 61 66.5 73 78 Material: Rolled steel Applicable bore size (mm) 40 50, 63 80 100 d D H B C Part no.

CV/MVGQ

Dd9 Knuckle 40, 50, 63 80 100 3 x 18l 3 x 18l 4 x 25l 4 x 25l 4 x 30l 4 x 36l CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 10 0.046 0.076 12 0.050 0.093 16 0.050 0.093 18 0.050 0.093 20 0.065 0.117 25 0.065 0.117 46 55.5 71 76.5 83 88 4 4 5 5 5 6 3 3 4 4 4 4 38 47.5 61 66.5 73 78 Material: Rolled steel Applicable bore size (mm) 40 50, 63 80 100 d D H B C Part no.

CNA

Dd9 3 x 18l 0.040 0.076 10 CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 40 50 63 80 100 40, 50, 63 80 100 Polished round 10 3 4 46 38 3 x 18l 0.050 0.093 12 Polished round 12 3 4 55.5 47.5 4 x 25l 0.050 0.093 16 Polished round 16 4 5 71 61 4 x 25l 0.050 0.093 18 Polished round 18 4 5 76.5 66.5 m l 4 x 25l 0.065 0.117 20 Polished round 20 4 5 83 73 L 4 x 36l 0.065 0.117 25 Polished round

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Clevis Dd9 L m l Knuckle CDP-2A 0.040 0.076 40 10 Polishing ball 10 46 3 38 3 X 18l 4 CDP-3A 0.050 0.093 40, 50, 63 50 12 Polishing ball 12 55.5 3 47.5 3 X 18l 4 CDP-4A 0.050 0.093 63 16 Polishing ball 16 71 4 61 4 X 25l 5 CDP-5A 0.050 0.093 80 18 Polishing ball 18 76.5 4 66.5 4 X 25l 5 CDP-6A 0.065 0.117 80 100 20 Polishing ball 20 83 4 73 4 X 30l 5 CDP-7A 0.065 0.117 100 25 Polishing

CATALOG

ISE4L-01-25L ISE4-01-25L PNP Output ZSE4-01-65L ISE4L-01-65L ISE4-01-65L Analog Output ZSE4-01-26L ISE4L-01-26L ISE4-01-26L Operating Pressure Range +10 to -101KPa (1.5~15PSI) -0.1~1 Bar (-1.5~15PSI) -1~10 Bar (-1.5~145PSI) Minimum Displayed Unit mmHG: 5 kgf/cm2 = 0.01 kgf/cm2 = 0.1 PSI: 0.1 PSI: 0.1 PSI: 1 Bar: 0.01 Bar: 0.01 Bar: 0.1 kPa: 1 kPa: 1 MPa: 0.01 Switch Indicator ON (green light

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Clevis Dd9 L m l Knuckle CDP-2A 0.040 0.076 40 10 Polishing ball 10 3 3 X 18l 46 38 4 CDP-3A 0.050 0.093 40, 50, 63 50 12 Polishing ball 12 3 3 X 18l 55.5 47.5 4 0.050 0.093 CDP-4A 63 16 Polishing ball 16 4 4 X 25l 71 61 5 0.050 0.093 CDP-5A 80 18 Polishing ball 18 4 4 X 25l 76.5 66.5 5 0.065 0.117 CDP-6A 80 100 20 Polishing ball 20 4 4 X 30l 83 73 5 0.065 0.117 CDP-7A 100 25 Polishing

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Auto Switch: M9N--Solid State, Gen.

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: M

smcmaintenancepartslist

Hexagon socket head cap screw Nominal size of wrench Bore size (mm) 125, 140, 160 M8 x 1.25 x 25L 6 356 2 Series CNS Replacement Procedure of Seal 3. Assembly b. Remove lock unit by applying compressed air over 0.3 MPa to lock release port. 3-1. Before assembling cylinder, be sure to clean each part to remove dust. 3-2.

CL

Used cotter pin 3 X 18l 3 X 18l 4 X 25l 4 X 25l 4 X 30l 4 X 36l Used flat washer Part No. Clevis Knuckle CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A Dd9 L m Part No. D C B H d Tube I.D.

I

ISE4L-01-25L ISE4-01-25L PNP Output ZSE4-01-65L ISE4L-01-65L ISE4-01-65L Analog Output ZSE4-01-26L ISE4L-01-26L ISE4-01-26L Operating Pressure Range +10 to -101KPa (1.5~15PSI) -0.1~1 Bar (-1.5~15PSI) -1~10 Bar (-1.5~145PSI) Minimum Displayed Unit mmHG: 5 kgf/cm2 = 0.01 kgf/cm2 = 0.1 PSI: 0.1 PSI: 0.1 PSI: 1 Bar: 0.01 Bar: 0.01 Bar: 0.1 kPa: 1 kPa: 1 MPa: 0.01 Switch Indicator ON (green light

CV/MVGQ

Dd9 Knuckle 40, 50, 63 80 100 3 x 18l 3 x 18l 4 x 25l 4 x 25l 4 x 30l 4 x 36l CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 10 0.046 0.076 12 0.050 0.093 16 0.050 0.093 18 0.050 0.093 20 0.065 0.117 25 0.065 0.117 46 55.5 71 76.5 83 88 4 4 5 5 5 6 3 3 4 4 4 4 38 47.5 61 66.5 73 78 Material: Rolled steel Applicable bore size (mm) 40 50, 63 80 100 d D H B C Part no.

Combination Cylinder

37 36 71 19 28 18 55 18 MIGAKIMARU Y-10C 100 +0.3 +0.1 30 M26 X 1.5 83 4 X 30l 37 40 83 21 38 20 61 20 Clevis pin/Knuckle pin Rod end nut (mm) Material: Rolled steel Material: Carbon steel d Cut through 3 3 4 4 4 4 Used cotter pin 3 X 18l 3 X 18l 4 X 25l 4 X 25l 4 X 30l 4 X 36l Used flat washer Tube I.D.