High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 B XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

XL-OMY0002

XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

XLDV Series

(The conductance is shown as a guide only.) 32 Initial pumping conductance 30 28 L/s () P=0.1MPa XLD-100 XLD-160 XLDV-100 XLDV-160 26 Initial pumping valve conductance l/s (Viscous flow) Shows flow rate 24 22 20 XLDV-63 XLDV-80 XLD-63 XLD-80 18 16 14 XLD-50 XLDV-50 12 10 XLDV-40 XLD-40 8 when P=0.1MPa 6 4 XLD-25 XLDV-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0

XMD/XYD Series

Step 4 Step 5 O ring S valve M valve Needle seat (XLD-25) S valve seal assembly (XLD-40,50) S valve seal assembly (XLD-63,80) Wipe off the dust of the S valve and around it. Remove dust from the needle seat or S valve seal assembly. For size 25, 40 and 50, remove the dust from the initial pumping valve seal O ring.

2

(C) Correction factor 1.25 1.11 1 0.90 0.63 2 to 25 30 32 35 40 2 to 25 30 32 35 40 45 2 to 25 30 32 35 40 2 to 25 30 32 35 40 2 to 25 30 32 35 40 Note) For the water-cooled type, the correction factor is determined to 1 in an ambient temperature range of 2 to 45C.

High Vacuum Angle Valve

0 Air operated, With solenoid valve XLAV e Indicator/Solenoid valve direction w Flange type q Flange size Symbol Indicator Solenoid valve direction F With indicator Size 16 25 40 50 63 80 Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80 D K (DN) 63, 80 Rear flange surface Left flange surface G Rear flange surface J Right flange surface K Without indicator Right flange

Direct Solenoid

Th cov6r cannot b rotabd on iha bodv, OBINGMANIFOLD MOUNTING PATTEBN PIPETAPIS I/E'NPTFOT 1/4" NPTF AS SPECINED BYMODEL NUMgER DIMENSIONS A B c D E F G H J K M N P R s 5.4 (128) 2.40 (61) 1.77 (4s) 0.94 (211 0.24 (6) o.a1 (8) 228 (58) 0.8:l (211 2.13 (54) o.a7 (221 1.06 en 0.98 (25) 0.39 (10) 0.79 (20) 0.98 (25) Millimeters In Parentheses PARTS LIST O.ldl n t Noi.qt rYa 316 1 Eody Al3rnbly-ri

Please contact us for the latest version.sales@ocaire.com, O-RING (XLD-100D-X510), VACUUM SERIES, XLD HIGH VACUUM VALVE, 21, XLD NO SIZE RATING, 0.022 lb

XLD NO SIZE RATING, .00000 lb

, 2X, XLD NO SIZE RATING, 4.35600 lb

Part Number Description: VALVE SEAL   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 683   Family Description: XLD HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number, VALVE SEAL, VACUUM SERIES, XLD HIGH VACUUM VALVE, 21, XLD

XLD NO SIZE RATING, VACUUM SERIES, XLD HIGH VACUUM VALVE, 2X, XLD NO SIZE RATING, 4.53515 lb

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.

- Raw Material, Seal Material: Q1 [KALREZ® (4079)], Seal Replacement: Valve Seal, Exterior Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Not Applicable

Acid Anodized, Seal Material: R1 [CHEMRAZ® (SS592)], Seal Replacement: Valve Seal, Exterior Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Not Applicable

- Raw Material, Seal Material: U1 [ULTIC ARMOR® (UA4640)], Seal Replacement: Valve Seal, Exterior Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Not Applicable