New

VAC 110 VAC 200 VAC 230 VAC DIN terminal (With surge voltage suppressor) 48 VAC 2G 2H 2V 2J 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 2K 2L 100 VAC 110 VAC 200 VAC 230 VAC 2M 2N 2P 2Q 2R 2S Conduit terminal (With surge voltage suppressor) 48 VAC 220 VAC 240 VAC 2W 24 VAC 12 VDC 24 VDC 2T 3A 3B 3C 3D 3E 3F 100 VAC 110 VAC 200 VAC 230 VAC DIN terminal (With surge voltage suppressor) 48 VAC 3G 3H

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

Compact Cylinder with Air Cushion Series RQ

Material: Chromium molybdenum steel Surface treatment: Nickel plated Cylinder model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Cylinder model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Mounting bolt size M5 x 50L x 55L x 60L x 65L x 75L x 85L M5 x 55L x 60L x 65L x 70L x 80L x 90L M5 x 60L x 65L x 70L x 80L x 90L x 115L

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Mounting bolt M3 x 45L M3 x 55L M3 x 60L M5 x 55L M5 x 60L M5 x 65L M5 x 60L M5 x 65L M5 x 70L Mounting bolt M5 x 75L M5 x 80L M5 x 85L M6 x 75L M6 x 80L M6 x 85L RSQB12-10 Note) RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 7 9 Mounting bolt C D 9 Note) When using the through-hole mounting for a size 12 cylinder, be sure to use the flat washer which

Low Maintenance Filter Series FN1

Maximum flow rate: 40l/min, 80l/min. Features 1 Operating principle Flow flow Air flow Filtering Back-flushing Cylinder Cylinder The element compressed by the cylinder filters the fluid. As the cylinder extends downward, the element is decompressed. Air pressure forces the fluid in the reservoir out to the filter and back-flushes the element. Automatic back-flushing.

Compact Cylinder with Air Cushion Series RQ

Mounting bolt Model C Mounting bolt M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l Model C Mounting bolt M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l D 65 70 75 85 95 120 145 85 95 105 130 155 D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 R(D)QB20-15 -20 -25 -

CQ2

X 85l X 90l X 95l M5 X 40l M5 X 45l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l 15 10.5 7.5 X 100 l X 105 l X 130 l X 155 l M10 X 75l M5 X 40l X 115 l X 140 l X 80l X 85l X 90l X 95l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l M6 X 55l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l X 95

Compact Cylinder with Air Cushion

x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l 9 8 9.5 13.5 15.5 10 15 17.5 3 Compact Cylinder with Air Cushion Series RQ Replacement Parts/Seal Kits Auto Switch Mounting Bracket Part Nos.

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

RSQ

M5 x 85l M6 x 75l M6 x 80l M6 x 85l Lever with built-in shock absorber 0.97 1.01 1.05 RSQB12-10 RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 Note) CX Round bar, Chamfered, Roller 1.03 1.07 1.11 50 Lever with built-in shock absorber 1.26 1.30 1.34 CY 7 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370

RQ

x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l M8 x 90l x 100l x 110l x 135l x 160l M10 x 105l x 115l x 140l x 165l M10 x 120l x 130l x 155l x 180l 9 8 9.5 13.5 15.5 10 15 17.5 7-7-6 6 Series RQ Compact Cylinder with Air Cushion Double Acting, Single Rod Replacement Parts: Seal Kit Auto Switch Mounting

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

High Vacuum L Type Valve

-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

High Vacuum Angle Valve, XL Series

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series LTF (Incremental encoder) H Applicable actuators Compatible actuator models LTF6ELTF8FLTF6E-K LTF8F-K Symbol 2H 3H 2V 3V Motor capacity 100W 200W 100W 200W 1) 1) 2) 2) Note 2) Be sure to use a regenerative absorption unit (LC7R-K1A) with this controller

Dedicated Controller

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series LTF (Incremental encoder) H Applicable actuators Compatible actuator models LTF6ELTF8FLTF6E-K LTF8F-K Symbol 2H 3H 2V 3V Motor capacity 100W 200W 100W 200W 1) 1) 2) 2) Note 2) Be sure to use a regenerative absorption unit (LC7R-K1A) with this controller

Electric Actuators

Series LG1H20) Incremental encoder F Applicable actuators Motor capacity Compatible actuator models Symbol 1H 50W LJ1H101B LJ1H202A LJ1H202C LJ1H303D LJ1S101SC LJ1S202SC LJ1S303SC LJ1H101SC LJ1H202SC LJ1H303SE LJ1H102H-K LJ1H102B-K LJ1H202F-K LJ1H202A-K LJ1H303A-K Ball screw High rigidity direct acting guide Without brake 2H 100W 200W 50W 100W 200W 50W 100W 200W 100W 100W 100W 100W 200W 3H