Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor, Non-standard

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 12 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: w/Light & Surge Voltage Suppressor

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: -, Non-standard Indicator: -, Body Surface

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor: w/Light & Surge Voltage Suppressor

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: M Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor, Non-standard

4/5 Port Solenoid Valve

Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 2) ( ): Without sub-plate Note 3) For DC voltages.

7.4

Electrical entry Type of actuation S07 1 5 5 G Connector kit SS0755-07C4C S0715-5G S0725-5G S07A5-5G 1 setManifold base part no. 3 setsValve part no. (Stations 1 to 3) 2 setsValve part no. (Stations 4 to 5) 2 setsValve part no.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: F (w/Indicator, Left Flange Surface), Version: 2, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)]

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: F (w/Indicator, Left Flange Surface), Version: 2, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)]

Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/Indicator, Left Flange Surface, Version: 2, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: -, Non-standard Indicator: -,

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 3-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Air Pilot, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 16, Seal Type: Bellows Seal, Indicator: With indicator, Pilot Port Direction

Valve Single Unit

(2 set) Double solenoid (24 VDC) 3 SX3000 5 SX5000 02 Nil 2 stations Rc Blanking plate assembly SY3000-26-9A (1 set) Manifold base G 00F SX3220-5G-C6 (2 set) 7 SX7000 20 00N 20 stations NPT SS5X3-20-05 (5 stations) NPTF 00T Stations3 2 1 Connector assembly for L and M types Refer to page 1-6-8.

Please contact us for the latest version.sales@ocaire.com, SEAL,PNY-25F,FKM, ACTUATOR, (GT CODES)CYLINDER HARDWARE, 11, CYLINDER HARDWARE, .00770 lb

5 Port Solenoid Valve

(Stations 1 to 3) 2 sets Valve part no. (Stations 4 to 5) 2 sets Valve part no. (Stations 6 to 7) SS0755-07C4 S0715-5G S0725-5G S07A5-5G Specifications Symbol 1 2 Specifications Symbol 2-position single 2-position double G Grommet 4-position dual 3-port (N.C. + N.C.)

Microspeed Cylinder

(built-in magnet) Nil S 2 pcs. 1 pc.

Table of Contents

TI/ TIL 5 PA PAX Material Model PB %# & 1 & VXA212 0 2 2 0 2 . 2 0 2 . 2 . 0 2 . 0 2 . 0 2 . 0 2 ) .!* VXA213 0 2 VXA223 VXA224 VXA225 0 2 .!* / 0 0 2 0 2 2( VXA226 0 2 17-3-93 2 The VX series will be revised shortly. Series VXA21/22 Normally Closed (N.C.), Normally Open (N.O.) Fluid JIS Symbol N.C.

IDX-OM-W016

/ Installation 2 1 Transportation . 2 1 2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart

ＳＭＯＯＴＨ ＣＹＬＩＮＤＥＲ

Secondly, mount seal ground 2 and then retaining ring 1. Port Rod seal Seal ground Retaining ring Fig. 1. Replacing method of rod seals Replacement part: Rod seals Grease for maintenance Bore size (mm) Part No. Net Weight Part No. 20 CM20Z-PS 5g GR-L-005 25 CM25Z-PS 10g GR-L-010 32 CM32Z-PS 150g GR-L-150 40 CM40Z-PS 11 3-2-2.

V100

actuation Port size {2(A) port} (A) 2 N.C.

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.