Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet), Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1pc, Valve Open, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 3-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: [Other] DN, Flange Size Nominal: 63, Seal Type: Bellows Seal, Indicator: No indicator, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60℃ (no

Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 3-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: [Other] DN, Flange Size Nominal: 63, Seal Type: Bellows Seal, Indicator: No indicator, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60℃ (no

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

XLA- ∗ -F7NJ ∗ - ∗ Series

-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 9 XL*-OML0013-B 5.

XL-OMV0005

Symbol Standard Nil Optional Refer to XLA/XLC-16-2 16 Table 3 XLA/XLC-25-2 25 XLA/XLC-40-2 40 XLA/XLC-50-2 50 XLA/XLC-63-2 63 XLA/XLC-80-2 80 Note 1) Bellows assembly contains the valve seal 1.

XLA Series

-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E 5.

XM, XY

Stainless Steel High Vacuum Angle/In-line Valve XM, XY Series Angle type/ XM Series XY Series In-line type XY Series XM Series XLA XL XLQ Body material: SCS13 (conforms to Stainless steel 304) A precision casting, unified composition prevents accumulation of gas. The XM series is interchangeable with the XL series, aluminum high vacuum angle valve.

XLAQ/XLDQ

0) XLA Pilot port S (for initial exhaust valve) Magnet (Option) XL Pilot port M (for main exhaust valve) Bellows holder (Material: Stainless steel 304) !

MNB

MLGC 40 50 63 80 100 MNB 40D-UA MNB 50D-UA CNG P 0.3 MPa MNB 63D-UA Piston rod assembly MNB 80D-UA MNB MNB100D-UA CNA 2. How to replace lock unit 1) Loosen the tie-rod nuts (4 pcs.) on the cylinder head cover side by using a hexagon wrench. For the applicable hexagon wrench, refer to the table below.

MNB

Bore size (mm) 40 50 63 80 100 Lock unit order number MNB 40D-UA MNB 50D-UA P0.3MPa Piston rod assembly P0.3MPa MNB 63D-UA MNB 80D-UA MNB100D-UA 2. Replacement of lock units. 1) Loosen the tie-rod nuts (4pcs.) on the cylinder head cover using a hexagon wrench. Refer to the table below for the applicable hexagon wrench.

Toggle Type Air Gripper

Auto switch mounting screw Hysteresis Auto switch Auto switch reset position (OFF) Auto switch operating position (ON) Tightening torque of auto switch mounting screw (Nm) Air gripper model Hysteresis degree (Max. value) MHT2-32D MHT2-40D MHT2-50D MHT2-63D Auto switch model Tightening torque D-M9(V) D-M9W(V) D-M9A(V) D-A9(V) 3 0.05 to 0.15 3 3 0.10 to 0.20 3 651 A Series MHT2 In addition

Size, Body, Valve Type: 63D (Size: 3; Body Mat'l: C37; Port Size: 3/8; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: J (110VAC); DIN Terminal w/Surge Voltage Suppressor)

Size, Body, Valve Type: 63D (Size: 3; Body Mat'l: C37; Port Size: 3/8; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: D (Oil-free, G Thread), Bracket Interchangeable w/Old Type: XB (Yes)