Flange Size: 40, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)
Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)
Flange Size: 16, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)
Flange Size: 25, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)
Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Flange Size: 25, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Flange Size: 40, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Slit Valve 1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Stroke (mm) Pulling force Bore size (mm) 40, 50, 63 80, 100 Thread size 3 10 N M3 x 0.5 x 30l or more 3 24.5 N M5 x 0.8 x 40l or more Remove the bolt for normal operation. It can cause lock malfunction or faulty release. Rubber cap 2. Manual release lock type Push the M/O knob and turn it 90 counterclockwise.
pin ZZ + Stroke H10 d9 NZ ND L1 RR1 H ZZ PY PX NX Bore size (mm) Spring pin +0.070 0 +0.070 0 +0.070 0 +0.070 0 +0.084 0 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 +0.3 +0.1 16 4 x 24l 40 12 13 51 192 84 11 38 55 +0.3 +0.1 4 x 25l 50 16 12 15 58 207 91 12 60 38 +0.3 +0.1 4 x 25l 63 16 12 15 58 218 91 12 60 38 +0.3 +0.1 +0.3 +0.1 4 x 36l 80 28 18 19 71 257 105 16 55 71 4 x 40l
M2.5 x 0.45 x 25l or more 20, 25, 32 4.9 N 2 M3 x 0.5 x 30l or more 40, 50, 63 10 N 3 M5 x 0.8 x 40l or more 80, 100 24.5 N 3 5. Do not operate multiple cylinders in synchronization. Avoid applications in which two or more end lock cylinders are synchronized to move one workpiece, as one of the cylinder locks may not be able to release when required.
M2.5 x 0.45 x 25l or more 20, 25, 32 4.9 N 2 M3 x 0.5 x 30l or more 40, 50, 63 10 N 3 M5 x 0.8 x 40l or more 80, 100 24.5 N 3 5. Do not operate multiple cylinders in synchronization. Avoid applications in which two or more end lock cylinders are synchronized to move one workpiece, as one of the cylinder locks may not be able to release when required.
Supply Unit: W (Flow Adjustment Valve + Stop Valve), Rated Flow Range: 40 (5~40L/min), Thread: N (NPT), Port Size: 06 (3/4)
Supply Unit: W (Flow Adjustment Valve + Stop Valve), Rated Flow Range: 40 (5~40L/min), Thread: N (NPT), Port Size: 04 (1/2)
Flow Switch Type: 5 (Remote Sensor Unit), Rated Flow Range: 40 (5~40L/min), Return Unit: None, Thread: N (NPT), Port Size: 06 (3/4), Flow Switch Output: 2T (Remote Sensor Unit; Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None, Temp.
Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 40 (5~40L/min), Return Unit: W (Flow Adjustment Valve + Stop Valve), Thread: N (NPT), Port Size: 04 (1/2), Flow Switch Output: E (Integrated Display; Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V, Temp.