SMC Corporation of America
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PDF Icon XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

https://partbuilder.smcpneumatics.com/hto_pdf/XL_US2.pdf
PDF Icon Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

https://www.smcpneumatics.com/pdfs/xgt.pdf
XLA-40A-M9BA

Flange Size: 40, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLA-40A-M9BA
XLA-160A-M9BA

Flange Size: 160, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLA-160A-M9BA
XLA-16-M9BA

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLA-16-M9BA
XLA-40-M9BA

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLA-40-M9BA
XLA-16A-M9BA

Flange Size: 16, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLA-16A-M9BA
XLA-25A-M9BA

Flange Size: 25, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLA-25A-M9BA
XLA-25-M9BA

Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLA-25-M9BA
XLA-50-M9BA

Flange Size: 50, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLA-50-M9BA
XLA-80DA-M9BA

Flange Size: 80, Flange Type: D [K(DN)], Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLA-80DA-M9BA
XLA-16G-M9BA

Flange Size: 16, Flange Type: KF(NW), Port Direction: G (w/Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLA-16G-M9BA
XLA-25G-M9BA

Flange Size: 25, Flange Type: KF(NW), Port Direction: G (w/Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLA-25G-M9BA
XLA-63DG-M9BA

Flange Size: 63, Flange Type: D [K(DN)], Port Direction: G (w/Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLA-63DG-M9BA
XLA-160DA-M9BA

Flange Size: 160, Flange Type: D [K(DN)], Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLA-160DA-M9BA
XLA-160D-M9BA

Flange Size: 160, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLA-160D-M9BA
XLA-40A-M9BA

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162979/?HissuCode=XLA-40A-M9BA
XLA-160A-M9BA

Flange Size: 160, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162979/?HissuCode=XLA-160A-M9BA
XLA-16-M9BA

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162979/?HissuCode=XLA-16-M9BA
XLA-40-M9BA

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162979/?HissuCode=XLA-40-M9BA