XLAQ/XLDQ XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17 26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal
An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).
2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Description Part no. 1 Bonnet assembly XVD2-02A-30-1 XVD2-02V-30-2 (For VCR) 2 Body assembly XVD2-02S-30-2 (For Swagelok) 3 Exterior seal AS568-024V 526
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERNAL SEAL (XLA-40), VACUUM SERIES, XLA NO SIZE RATING, .01980 lb
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERIOR SEAL FOR XLA-40, VACUUM SERIES, XLA NO SIZE RATING, .01980 lb
) 3 (R) 52 22 13 32 16 * 0.5 MPa supply 2 x 1/4 2 x 5.5 mounting hole 25 40 30 F.O.F.* 32 N T.T. 90 Key selector (2 position) VM220-02-36A VM230-02-36A Panel mounting hole ON T.T. 40 3 1.5 OFF 39 Max. 6 38 Symbol 2 port (A) 2 21 30.5 22.1 12 10 1 (P) 1.5 R port (3 port only) 3 port (125.6) (A) 2 (104.6) 12 10 (74.1) 1 (P) 3 (R) 52 22 13 32 16 2 x 1/4 2 x 5.5 mounting hole 25 40 30 * 0.5 MPa
This is a legacy product, and replaced byXLA-40-2M9// XLA HIGH VACUUM VALVE. HIGH VACUUM VALVE, MAG NO SW. VACUUM SERIES. XLA NO SIZE RATING. 2.88371 lb. 2X.
Please contact us for the latest version.sales@ocaire.com, EXTERNAL O-RING FOR XLA-40, VACUUM SERIES, XLA NO SIZE RATING, .01980 lb
This is a legacy product, and replaced byXLA-40-2M9//, HIGH VACUUM VALVE, MAG NO SW, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 2.88371 lb
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21, XLA NO SIZE RATING, 0.0198 lb
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21, XLA NO SIZE RATING, 0.0198 lb
VACUUM VALVE, 21, XLA NO SIZE RATING, .00000 lb
XLA NO SIZE RATING, .00000 lb
This is a legacy product, and replaced byXLA-50GH4-2, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING
This is a legacy product, and replaced byXLA-50H5-2, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 4.25529 lb
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERNAL SEAL, XLAV, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21, XLA NO SIZE RATING, .02840 lb
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERNAL SEAL, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21, XLA NO SIZE RATING, .00088 lb
Series XLA-2 are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLA-2 valves are single-acting, normally closed, with a bellows seal over the shaft and spring.
Part Number Description: VALVE SEAL FOR XLA Product Line: Z Product Line Description: VACUUM SERIES Family Code: 681 Family Description: XLA HIGH VACUUM VALVE Class Code: 21 Part Code: 2 Reference Code: L Click here to report information errorImage shown may not match exact part number