High Vacuum L Type Valve

-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

MHC2

MHQ MHL2 MHC2-25l MHR MHK MHS MHC2 MHT2 MHY2 MHW2 MRHQ Auto switch Note) When signal acting type is used, one side port is bleed port and adjusting needle for finger speed is not attached. When auto switch is used, through hole mounting type is not available.

AS

Applicable series AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L AS-10D AS-20D AS-25D AS-30D AS-40D AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F AS2002F AS2052F AS3002F AS4002F DIN rail mounting bracket L-bracket Prepare DIN rail by user. Bracket for AS1002F-02 is not available.

Series MXQ Air Slide Table

/Symmetric Type 114 Air Slide Table Series MXQ Dimensions MXQ 25L/Symmetric Type 115 Series MXQ Air Slide Table Auto Switch/Proper Mounting Position at Detection of Stroke End 116 Air Slide Table Series MXQ Made To Order 117

CV/MVGQ

Data 3 x 18l Polished round 12 Polished round 16 Polished round 20 Polished round 24 Polished round 12 Polished round 18 Polished round 20 CDP-3A CDP-3A NT-04 NT-05 NT-08 NT-10 3 x 18 3 55.5 3 47.5 4.0 55.5 47.5 M14 x 1.5 22 25.4 4 8 21 0.050 0.093 0.050 0.093 12 12 40, 50, 63 80 100 4 x 25l CVD-06 CDP-5A 4 x 22 4 75 4 65 5.0 76.5 66.5 M18 x 1.5 5 11 27 31.2 26 0.050 0.093 0.050 0.093 16

mlu

side) to unlock. 2) Screw a manual unlocking bolt (a conventional bolt of 25, 32: M3 x 0.5 x 25l or more, 40, 50: M4 x 0.7 x 35l or more) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (head side) to unlock.

Speed Controller with

Applicable series AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L AS-10D AS-20D AS-25D AS-30D AS-40D AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F AS2002F AS2052F AS3002F AS4002F DIN rail mounting bracket L-bracket Prepare DIN rail by user. Bracket for AS1002F-02 is not available.

Speed Controller with

Applicable model AS-10L AS1002Fm AS-20L AS2002Fm AS-25L AS2052Fm AS-30L AS3002Fm AS-40L AS4002Fm Part no.

Speed Controller with One-touch Fittings

Applicable series AS-10D AS-20D AS-25D AS-30D AS-40D AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F AS2002F AS2052F AS3002F AS4002F DIN rail mounting bracket L-bracket Bracket for AS1002F-02 is not available. Prepare DIN rail by user.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Applicable model AS-10L AS1002FS AS-20L AS2002FS AS-25L AS2052FS AS-30L AS3002FS AS-40L AS4002FS Part no.

Compact and Lightweight

AS-25L ZH13/15DA Applicable thread size: M4 AS-30L ZH18/20DA Applicable thread size: M4 L-bracket wDIN Rail Mounting Bracket1 Part no. Applicable model Note Quantity AS-10D ZH05/07/10DA Applicable thread size: M3 1 pc. AS-25D ZH13/15DA Applicable thread size: M4 AS-30D ZH18/20DA Applicable thread size: M4 1 DIN rail is not included. It should be provided by the customer.

1

9 45 18 38 10 65 150 3 x 16l 32 9 45 38 18 10 65 152 4 x 24l 40 12 50 38 55 13 83 200 Series CA2 (CBA2, CV3, CVS1) Hole: NDH10 Shaft: NDd9 Spring pin ZZ + Stroke H10 d9 NZ ND L1 RR1 H ZZ PY PX NX Bore size (mm) Spring pin +0.070 0 +0.070 0 +0.070 0 +0.070 0 +0.084 0 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 +0.3 +0.1 16 4 x 24l 40 12 13 51 192 84 11 38 55 +0.3 +0.1 4 x 25l

MLU

D2) Screw a manual unlocking bolt (a conventional bolt of 25, 32: M3 x 0.5 x 25l or more, 40, 50: M4 x 0.7 x 35l or more) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (rod side) to unlock. 2) Screw a manual unlocking bolt (a conventional bolt of 25, 32: M3 x 0.5 x 25l or more, 40, 50: M4 x 0.7 x 35l or more) into the lock ring threads

XM, XY

Stainless Steel High Vacuum Angle/In-line Valve XM, XY Series Angle type/ XM Series XY Series In-line type XY Series XM Series XLA XL XLQ Body material: SCS13 (conforms to Stainless steel 304) A precision casting, unified composition prevents accumulation of gas. The XM series is interchangeable with the XL series, aluminum high vacuum angle valve.

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

Valve Type: XMC (Angle Type, Double Acting, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Indicator Std, Rear Flange Surface), Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (or None in the Case of No Auto Switch), Number: A [2 pcs (Valve

Valve Type: Double Acting, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface

Valve Type: Angle Type, Double Acting, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Port Direction: w/o Indicator, Rear Flange Surface; Indicator Std, Rear Flange Surface, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (or None in the Case of No Auto Switch), Number: A [2 pcs (Valve Open

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Non-standard